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Micro and Nano Fabrication Technology 2018 ed. [Kõva köide]

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  • Formaat: Hardback, 957 pages, kõrgus x laius: 235x155 mm, 549 Illustrations, color; 268 Illustrations, black and white; XX, 957 p. 817 illus., 549 illus. in color., 1 Hardback
  • Sari: Micro/Nano Technologies
  • Ilmumisaeg: 16-Jul-2018
  • Kirjastus: Springer Verlag, Singapore
  • ISBN-10: 9811300976
  • ISBN-13: 9789811300974
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Micro and Nano Fabrication Technology 2018 ed.Suurem pilt
  • Formaat: Hardback, 957 pages, kõrgus x laius: 235x155 mm, 549 Illustrations, color; 268 Illustrations, black and white; XX, 957 p. 817 illus., 549 illus. in color., 1 Hardback
  • Sari: Micro/Nano Technologies
  • Ilmumisaeg: 16-Jul-2018
  • Kirjastus: Springer Verlag, Singapore
  • ISBN-10: 9811300976
  • ISBN-13: 9789811300974
Teised raamatud teemal:
Püsilink: https://www.kriso.ee/db/9789811300974.html
This volume focuses on the state-of-the-art micro/nanofabrication technologies for creating miniature structures with high precision. These multidisciplinary technologies include mechanical, electrical, optical, physical, and chemical methods, as well as hybrid processes, covering subtractive and additive material manufacturing, as well as net-shape manufacturing. The materials the volume deals with include metals, alloys, semiconductors, polymers, crystals, glass, ceramics, composites, and nanomaterials. The volume is composed of 30 chapters, which are grouped into five parts. Engaging with the latest research in the field, these chapters provide important perspectives on key topics, from process developments at the shop level to scientific investigations at the academic level, offering both experimental work and theoretical analysis. Moreover, the content of this volume is highly interdisciplinary in nature, with insights from not only manufacturing technology but also mechanical/material science, optics, physics, chemistry, and more.
Part 1 Cutting technology.
Chapter 1 Micro chiseling of retroreflective
arrays.
Chapter 2 Micro milling for functional surface.
Chapter 3 Micro
cylindrical turning of calcium fluoride.
Chapter 4 Nanogrooving by using
multi-tip diamond tools.
Chapter 5 Elliptical vibration cutting for
difficult-to-cut materials.
Chapter 6 Micro machining of roller mould for
roll-to-roll manufacturing.
Chapter 7 Tool servo-driven diamond turning for
structured surface.- Part 2 Abrasive/tip-based machining technology.
Chapter
8 Micro/nano texturing by ultrasonic assisted grinding.
Chapter 9 Precision
grinding for functional micro-structured surface.
Chapter 10 Micro fluid jet
polishing.
Chapter 11 Bonnet polishing of microstructured surface.
Chapter
12 Soft-brittle semiconductors polishing with environment-friendly slurries.-
Chapter 13 Three-dimensional fabrication of micro/nanostructure using
scanning probe lithography.- Part 3High-energy beam machining technology.-
Chapter 14 Femtosecond laser direct writing.
Chapter 15 Laser patterning of
metallic glass.
Chapter 16 Ion beam machining.
Chapter 17 Electron beam
machining.
Chapter 18 Microfabrication by laser lithography combined with
ion etching.- Part 4 Molding/forming/self-organization technology.
Chapter
19 Replication of Micro/Nanostructures.
Chapter 20 Precision Molding of
Microstructures on Chalcogenide Glass for Infrared Optics.
Chapter 21 Press
molding of hybrid Fresnel lenses for infrared applications.
Chapter
22 Microspring fabrication by anisotropic gelation.
Chapter 23 Fabrication
of Metallic Nanodot Arrays.
Chapter 24 Surface micro/nano-structuring using
Self-assembly of fine particles.- Part 5 Physical/chemical machining
technology.
Chapter 25 Micro electrical discharge machining of hard brittle
materials.
Chapter 26 Micro Electrochemical Machining.
Chapter 27 Catalytic
AFM-based nanofabrication.
Chapter 28 3D Microfabrication using
photocatalytic reaction.
Chapter 29 Silicon etching for multiple-height
microstructures.
Chapter 30 Local wettability modification and its
micro-fluidic system application.
Prof. Jiwang Yan is currently a professor of Mechanical Engineering at Keio University, Japan, leading the Laboratory for Precision Machining and Nano Processing (PMNP). His research areas include ultraprecision machining, micro/nanomanufacturing, material processing, and nanomechanics. He has led the implementation of tens of research projects supported by governments and industry to develop key fabrication processes for optics, molds, cutting/grinding tools, semiconductor substrates, batteries, and biomechanical components. He has received a few tens of awards from academic societies and scientific foundations for his contributions in research. He is now a member of the Japan Society of Mechanical Engineers (JSME), Japan Society for Precision Engineering (JSPE), Japan Society for Abrasive Technology (JSAT), Japan Society for Applied Physics (JSAP), American Society for Precision Engineering (ASPE), European Society for Precision Engineering and Nanotechnology (euspen), and the International Academy for Production Engineering (CIRP). He also serves on the editorial boards for several academic journals, such as the International Journal of Machine Tools and Manufacture (IJMTM).