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E-raamat: Aberration-Corrected Analytical Electron Microscopy [Wiley Online]

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Aberration-Corrected Analytical Electron MicroscopySuurem pilt
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Raamatu kodulehekülg: https://onlinelibrary.wiley.com/doi/book/10.1002/9781119978848
The book is concerned with the theory, background, and practical use of transmission electron microscopes with lens correctors that can correct the effects of spherical aberration. The book also covers a comparison with aberration correction in the TEM and applications of analytical aberration corrected STEM in materials science and biology. This book is essential for microscopists involved in nanoscale and materials microanalysis especially those using scanning transmission electron microscopy, and related analytical techniques such as electron diffraction x-ray spectrometry (EDXS) and electron energy loss spectroscopy (EELS).
List of Contributors
xi
Preface xiii
1 General Introduction to Transmission Electron Microscopy (TEM)
1(20)
Peter Goodhew
1.1 What TEM Offers
1(2)
1.2 Electron Scattering
3(7)
1.2.1 Elastic Scattering
7(1)
1.2.2 Inelastic Scattering
8(2)
1.3 Signals which could be Collected
10(2)
1.4 Image Computing
12(2)
1.4.1 Image Processing
12(1)
1.4.2 Image Simulation
13(1)
1.5 Requirements of a Specimen
14(3)
1.6 STEM Versus CTEM
17(1)
1.7 Two Dimensional and Three Dimensional Information
17(4)
2 Introduction to Electron Optics
21(18)
Gordon Tatlock
2.1 Revision of Microscopy with Visible Light and Electrons
21(1)
2.2 Fresnel and Fraunhofer Diffraction
22(1)
2.3 Image Resolution
23(2)
2.4 Electron Lenses
25(5)
2.4.1 Electron Trajectories
26(1)
2.4.2 Aberrations
27(3)
2.5 Electron Sources
30(2)
2.6 Probe Forming Optics and Apertures
32(1)
2.7 SEM, TEM and STEM
33(6)
3 Development of STEM
39(16)
L.M. Brown
3.1 Introduction: Structural and Analytical Information in Electron Microscopy
39(2)
3.2 The Crewe Revolution: How STEM Solves the Information Problem
41(1)
3.3 Electron Optical Simplicity of STEM
42(3)
3.4 The Signal Freedom of STEM
45(3)
3.4.1 Bright-Field Detector (Phase Contrast, Diffraction Contrast)
45(1)
3.4.2 ADF, HAADF
45(1)
3.4.3 Nanodiffraction
46(1)
3.4.4 EELS
47(1)
3.4.5 EDX
47(1)
3.4.6 Other Techniques
48(1)
3.5 Beam Damage and Beam Writing
48(1)
3.6 Correction of Spherical Aberration
49(2)
3.7 What does the Future Hold?
51(4)
4 Lens Aberrations: Diagnosis and Correction
55(34)
Andrew Bleloch
Quentin Ramasse
4.1 Introduction
55(4)
4.2 Geometric Lens Aberrations and Their Classification
59(7)
4.3 Spherical Aberration-Correctors
66(8)
4.3.1 Quadrupole-Octupole Corrector
69(1)
4.3.2 Hexapole Corrector
70(2)
4.3.3 Parasitic Aberrations
72(2)
4.4 Getting Around Chromatic Aberrations
74(1)
4.5 Diagnosing Lens Aberrations
75(10)
4.5.1 Image-based Methods
77(3)
4.5.2 Ronchigram-based Methods
80(5)
4.5.3 Precision Needed
85(1)
4.6 Fifth Order Aberration-Correction
85(1)
4.7 Conclusions
86(3)
5 Theory and Simulations of STEM Imaging
89(22)
Peter D. Nellist
5.1 Introduction
89(1)
5.2 Z-Contrast Imaging of Single Atoms
90(2)
5.3 STEM Imaging Of Crystalline Materials
92(9)
5.3.1 Bright-field Imaging and Phase Contrast
93(3)
5.3.2 Annular Dark-field Imaging
96(5)
5.4 Incoherent Imaging with Dynamical Scattering
101(2)
5.5 Thermal Diffuse Scattering
103(3)
5.5.1 Approximations for Phonon Scattering
104(2)
5.6 Methods of Simulation for ADF Imaging
106(2)
5.6.1 Absorptive Potentials
106(1)
5.6.2 Frozen Phonon Approach
107(1)
5.7 Conclusions
108(3)
6 Details of STEM
111(52)
Alan Craven
6.1 Signal to Noise Ratio and Some of its Implications
112(1)
6.2 The Relationships Between Probe Size, Probe Current and Probe Angle
113(11)
6.2.1 The Geometric Model Revisited
113(2)
6.2.2 The Minimum Probe Size, the Optimum Angle and the Probe Current
115(1)
6.2.3 The Probe Current
115(2)
6.2.4 A Simple Approximation to Wave Optical Probe Size
117(1)
6.2.5 The Effect of Chromatic Aberration
117(1)
6.2.6 Choosing αopt in Practice
118(1)
6.2.7 The Effect of Making a Small Error in the Choice of αopt
119(1)
6.2.8 The Effect of α On the Diffraction Pattern
120(2)
6.2.9 Probe Spreading and Depth of Field
122(2)
6.3 The Condenser System
124(2)
6.4 The Scanning System
126(7)
6.4.1 Principles of the Scanning System
126(2)
6.4.2 Implementation of the Scanning System
128(1)
6.4.3 Deviations of the Scanning System From Ideality
128(2)
6.4.4 The Relationship Between Pixel Size and Probe Size
130(1)
6.4.5 Drift, Drift Correction and Smart Acquisition
131(2)
6.5 The Specimen Stage
133(2)
6.6 Post-Specimen Optics
135(1)
6.7 Beam Blanking
136(1)
6.8 Detectors
137(8)
6.8.1 Basic Properties of a Detector
137(2)
6.8.2 Single and Array Detectors
139(1)
6.8.3 Scintillator/Photomultiplier Detector
139(2)
6.8.4 Semiconductor Detectors
141(1)
6.8.5 CCD Cameras
142(3)
6.9 Imaging Using Transmitted Electrons
145(9)
6.9.1 The Diffraction Pattern
145(2)
6.9.2 Coherent Effects in the Diffraction Pattern
147(5)
6.9.3 Small Angular Range - Bright Field and Tilted Dark Field Images
152(1)
6.9.4 Medium Angular Range - MAADF
152(1)
6.9.5 High Angular Range - HAADF
153(1)
6.9.6 Configured Detectors
153(1)
6.10 Signal Acquisition
154(9)
Acknowledgements
159(4)
7 Electron Energy Loss Spectrometry and Energy Dispersive X-ray Analysis
163(48)
Rik Brydson
Nicole Hondow
7.1 What is EELS and EDX?
164(6)
7.1.1 Basics of EDX
164(2)
7.1.2 Basics of EELS
166(2)
7.1.3 Common Features For Analytical Spectrometries
168(2)
7.2 Analytical Spectrometries in the Environment of the Electron Microscope
170(12)
7.2.1 Instrumentation for EDX
170(4)
7.2.2 EELS Instrumentation
174(4)
7.2.3 Microscope Instrumentation for Analytical Spectroscopies
178(4)
7.3 Elemental Analysis and Quantification Using EDX
182(5)
7.4 Low Loss EELS - Plasmons, IB Transitions and Band Gaps
187(4)
7.5 Core Loss EELS
191(10)
7.5.1 Elemental Quantification
191(4)
7.5.2 Near-Edge Fine Structure For Chemical and Bonding Analysis
195(5)
7.5.3 Extended-Edge Fine Structure For Bonding Analysis
200(1)
7.6 EDX and EELS Spectral Modelling
201(1)
7.6.1 Total Spectrum Modelling
201(1)
7.6.2 EELS Modelling of Near Edge Structures and also the Low Loss
201(1)
7.7 Spectrum Imaging: EDX and EELS
202(4)
7.8 Ultimate Spatial Resolution of EELS
206(1)
7.9 Conclusion
207(4)
8 Applications of Aberration-Corrected Scanning Transmission Electron Microscopy
211(30)
Mervyn D. Shannon
8.1 Introduction
211(1)
8.2 Sample Condition
212(1)
8.3 HAADF Imaging
213(23)
8.3.1 Imaging of Isolated Atoms
213(6)
8.3.2 Line Defects (1-D)
219(1)
8.3.3 Interfaces and Extended Defects (2-D)
220(6)
8.3.4 Detailed Particle Structures (3-D)
226(4)
8.3.5 Low-loss EELS
230(1)
8.3.6 Core-loss EELS and Atomic-scale Spectroscopic Imaging
231(5)
8.4 Conclusions
236(5)
9 Aberration-Corrected Imaging in CTEM
241(22)
Sarah J. Haigh
Angus I. Kirkland
9.1 Introduction
241(2)
9.2 Optics and Instrumentation for Aberration-Corrected CTEM
243(1)
9.2.1 Aberration-Correctors
243(1)
9.2.2 Related Instrumental Developments
243(1)
9.3 CTEM Imaging Theory
244(9)
9.3.1 CTEM Image Formation
244(2)
9.3.2 The Wave Aberration Function
246(6)
9.3.3 Partial Coherence
252(1)
9.4 Corrected Imaging Conditions
253(3)
9.4.1 The Use of Negative Spherical Aberration
254(2)
9.4.2 Amplitude Contrast Imaging
256(1)
9.5 Aberration Measurement
256(2)
9.5.1 Aberration Measurement From Image Shifts
256(1)
9.5.2 Aberration Measurement from Diffractograms
257(1)
9.5.3 An Alternative Approach to Aberration Measurement
258(1)
9.6 Indirect Aberration Compensation
258(1)
9.7 Advantages of Aberration-Correction for CTEM
259(1)
9.8 Conclusions
259(4)
Acknowledgements
260(3)
Appendix A Aberration Notation 263(4)
Appendix B General Notation 267(8)
Index 275
Professor R.M.D. (Rik) Brydson is based in the School of Process, Environmental and Materials Engineering at the University of Leeds, UK. He is a committee member for the European Microscopy Society as well as the Electron Microscopy and Analysis Group (Institute of Physics).
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