E-raamat: Advances in Abrasive Technology: Proceedings of the International Symposium, Sydney, Australia, 8-10 July 1997 [World Scientific e-raamat]

Preface vii Honour Lectures 1(27) Modelling the Related Processes of Abrasion, Wear and Polishing 1(17) P L B Oxley (Invited Opening Lecture) Recent Advances in Ultraprecision Surface Finishing Technologies in Japan 18(10) N Yasunaga (Invited Closing Lecture) Mechanisms of Material Removal and Related Problems 28(20) Possible Mechanism of Brittle-Ductile Transition in Material Removal in Micromachining of Brittle Materials 28(5) S Shimada T Inamura N Ikawa (Invited) Subsurface Structure Change of Silicon after Ultra-Precision Grinding 33(5) I Zarudi L C Zhang Si-O-Si Bonding Configurations of Damaged Layer Formed after Diamond Grinding and Chemomechanical Polishing of Si Wafers 38(5) Y Chang Y-T Hung J-H Tsai C-L Chao S-C Chang T-S Lin Y-P Chiu C-C Wang Phase Transformation of Silicon during Nano-Indentation 43(5) H Tanaka L C Zhang Polishing and Lapping 48(38) Electrophoresis-Polishing with a Partial Electrode Tool 48(5) K Suzuki A Ide T Uematsu T Kurobe N Yasunaga (Invited) Precision Optical Polishing Using Pitch and Teflon Laps at CSIRO TIP: A Review 53(4) A J Leistner (Invited) Mechanisms of Silicon Polishing: Chemical, Mechanical and Electrical Effects 57(4) Y Samitsu Mirror Finishing of 6Al-4V Titanium Alloy Utilizing New Lapping Tape Application of Polishing Fluid 61(5) K Kitajima H Tomoda H Ohtsubo T Tottori CMP Characteristics and Polishing Machine in ILD Planarization 66(5) J Watanabe T Inamura T Beppu Y Minamikawa Magnetic Field-Assisted Grinding-Like Polishing of Brittle Materials Effect of Magnetic Field and Magnetic Slurry on Polishing Characteristics 71(5) Y Yamada T Kurobe K Sakaya Material Removal Evaluation in the Optical Polishing of Hydrophilic Polymer Materials 76(5) J Sun L C Zhang Y-W Mai S Payor M Hogg Computer Controlled Lapping of Granite Plate 81(5) J Wang B Zhang B Xue Grinding 86(62) High Efficiency Grinding of Difficult-to-Machine Materials 86(5) T Suto T Waida K Okano (Invited) Practical Modelling of the Surface Integrity of Ground Components 91(5) L C Zhang (Invited) Development of Sequential Grinding-Polishing Process Applicable to Large-Size Si Wafer Finishing 96(5) N Yasunaga M Takashina T Itoh Control of Grain Depth of Cut in Ductile Mode Grinding of Brittle Materials and Practical Application 101(5) A Kanai M Miyashita F Inaba M Sato T Yokotsuka R Kato Elastic Recovery of Ground Traces Made by Single Grain Grinding 106(5) M Yoshioka A Study on Grinding Quantities Using Chip Volume 111(5) P-L Tso S-H Wu Precision Grinding of Aspheric Surface Accuracy Improving by On-Machine Measurement 116(5) H Suzuki N Wajima M S S Zahmaty T Kuriyagawa K Syoji Simulation of Cylindrical Plunge Grinding Based on the Behaviour of Cutting Edge Wear 121(5) E-S Lee T Suto M-Y Yang Abrasive Technology -- Next Generation Processes Require Next Generation Machine Tool Technology 126(8) S C Salmon A Study on the Relation between Outgassing and Characteristics of Ground Surfaces 134(4) J Shibata Cylindrical Mirror Grinding with Extremely Fine Grit Wheels 138(5) N Wajima Y Mori K Syoji T Kuriyagawa H Suzuki Performance of Grinding Fluids for High-Speed Grinding Using CBN Wheels 143(5) T Imai R Mukai T Yoshimi M Yoshikawa Grinding Wheels 148(35) Grinding Characteristics of Wheels with New cBN Grits ABN800 148(5) K Suzuki Y Seki T Makizaki M Iwai (Invited) On-Machine Electrodischarge Truing Dressing Method for Metal Bonded Wheels 153(5) T Uematsu T Makizaki K Suzuki T Nakagawa (Invited) Quantified Wear Mechanisms of Diamond Wheels in Creep-Feed Grinding of Ceramic Materials 158(5) T W Liao K Li S B McSpadden, Jr L J ORourke On-Machine Monitoring of Dulling Behaviour of Wheel Working Surface 163(5) S Shimizu H Sakamoto Research and Development of SF Dressing Method for Superabrasive Grinding Wheels Influence of Kind of Dressing Wheels and Flow Rate of Dressing Fluid 168(4) S-I Tooe S-I Ninomiya S Yokomizo K Ohta Characterisation of the Contacting Portion of Grinding Wheel Surfaces 172(6) W Scott Fuzzy Modelling of Wear of Grinding Wheels 178(5) Z F Zhang L C Zhang Other Techniques 183(40) Newly Developed Micro-Processing and Measuring System Unifying Friction Force Microscope 183(4) K Ashida S Hirai N Morita Y Yoshida (Invited) Improving Surface Finish Generated by the Abrasive Waterjet Process 187(5) E Siores L Chen W C K Wong R Begg S Brandellero D Boundy (Invited) Effect of Abrasive Grain Size on Surface Finish and Abrasion in Abrasive-Flow Finishing of Aluminium 192(5) K Yamaguchi N Takakura Development of Automatic Measuring System of Cutting Tool Geometry 197(5) H Aoyama T Aoyama K Taguchi S Inoue Effect of Installation of Surface Grinding Machines on Wheel Unbalance Vibrations 202(5) K Yoshida J Ishimatsu S Koganei M Tanaka Robotics Deburring of GFRP Parts by Using Belt Sander -- Improvement in the Flexibility by Fuzzy Control 207(5) Y Nasu S-I Kuroki K Mitobe M J Uddin T Kuroda Design and Manufacturing of Indexable Insert Grinding Machine: An Experimental Evaluation 212 A D Joshi G K Awari T Chandrasekhar Nonaxisymmetric Aspheric Grinding Technique for Ceramic Mirrors T Kuriyagawa M S S Zahmaty H Suzuki K Syoji T Tachibana Author Index 223