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2002 Advanced S/Conductor Devices Micro/Sys 4th: The Fourth International Conference on Advanced Semiconductor Devices and Microsystems, Smolenice Castle, Slovakia, 14-16 October 2002 2002 ed. [Pehme köide]

  • Formaat: Paperback / softback, 379 pages, kõrgus x laius x paksus: 229x165x19 mm, kaal: 680 g
  • Ilmumisaeg: 01-Dec-2002
  • Kirjastus: I.E.E.E.Press
  • ISBN-10: 078037276X
  • ISBN-13: 9780780372764
  • Formaat: Paperback / softback, 379 pages, kõrgus x laius x paksus: 229x165x19 mm, kaal: 680 g
  • Ilmumisaeg: 01-Dec-2002
  • Kirjastus: I.E.E.E.Press
  • ISBN-10: 078037276X
  • ISBN-13: 9780780372764
Organizers iii
International Programme Committee iv
Foreword v
Contents vi
Materials and technologies I
Diamond and cubic boron nitride: Synthesis and electronic applications
Invited talk
1(12)
I. Bello
W. J. Zhang
K. M. Chan
C. Y. Chan
Y. Wu
F. Meng
C. W. Lam
J. Liu
W. Y. Luk
The effect of polyamide fixation on thermal performance of GaAs cantilever based MEMS: A 3D numerical analysis with DEETEN
13(14)
E. Burian
T. Lalinsky
Materials and technologies II
A promising lead-free material for flip-chip bumps: Sn-Cu-RE
Invited talk
17(10)
C. M. Lawrence Wu
Chip size packages with wafer-level ball attach and their reliability
27(4)
L. Cergel
Li Wetz
B. Keser
J. White
Deep reactive ion etching of silicon using an aluminum etching mask
31(4)
Wei-Chih Wang
J. N. Ho
P. Reinhall
Optical properties investigations of organic Alq3 layers doped by DCM
35(4)
J. Jakabovic
T. C. Wong
O. Lengyel
J. Kovac
C. S. Lee
S. T. Lee
Liquid phase silylation of Shipley SPR500A-series resists using top surface imaging
39(4)
K. Arshak
M. Mihov
A. Arshak
D. McDonagh
D. Sutton
S. B. Newcomb
POSTERS I - Materials and technologies
Formation of YBa2Cu3O7-x/MgO and YBa2Cu3O7-x/Si thin films by laser pulse crystallization and annealing
43(4)
B. K. Kotlyarchuk
V. K. Savchuk
Ti Zr dielectric layers deposited by hot target reactive magnetron sputtering
47(4)
J. Domaradzki
E. Prociow
D. Kaczmarek
Investigations of structural and electronic properties of TiO2-doped layers deposited by hot target reactive magnetron sputtering method
51(4)
E. Prociow
J. Domaradzki
D. Kaczmarek
Sn/Pd/GaAs ohmic contacts with reactive metals
55(4)
P. Machac
Synthesis and investigation of nanocrystalline SiC properties in sensor applications
59(4)
O. A. Agueev
N. N. Moskovchenko
L. A. Svetlichnaya
Set-up for combinatorial electrochemical synthesis and high-throughput investigation of organic semiconductor polymers for electronic devices
63(4)
V. Kulikov
Q. Hao
D. Donoval
V. M. Mirsky
PECVD nitrogen doped a-SiC:H films: Properties
67(4)
J. Huran
I. Hotovy
A. P. Kobzev
N. I. Balalykin
Charge properties of MIS structures Ni--DyxOy--n-Si (100)
71(4)
N. V. Babushkina
S. A. Malyshev
L. I. Romanova
A. L. Chizh
D. V. Zhygulin
Design of strain gauge structure
75(4)
M. Husak
P. Kulha
J. Jakovenko
Z. Vyborny
Electron emission from diamond layer on tungsten wire measured in cylindrical electrode system configuration
79(4)
J. Janik
F. Balon
A. Kromka
V. Dubravcova
M. Kadlecikova
P. Krepsova
Studies of dielectric characteristics of spin-coated polyimide films
83(4)
L. Matay
Thermal resistance of the semiconductor structures for a photomixing device
87(4)
J. Darmo
F. Schafer
A. Forster
P. Kordos
R. Gusten
InGaAs/InP avalanche photodiodes with a thin multiplication layer
91(4)
D. Hasko
F. Uherek
F. Mika
Interactions between phases and thermal stability of TiBx(ZrBx)--n-SiC 6H contacts
95(4)
N. S. Boltovets
V. N. Ivanov
S. K. Abdizhaliev
R. V. Konakova
Ya. Ya. Kudrik
P. M. Lytvyn
O. S. Lytvyn
V. V. Milenin
O. E. Rengevych
E. F. Venger
S. I. Vlaskina
Numerical simulation of parameters of ZnCdHgTe films and ZnCdHgTe-based heterostructures
99(4)
G Khlyap
P. Sydorchuk
Raman spectroscopy of SixGe1-x compositional and temperature dependence
103(4)
M. Lorenc
J. Sik
Physical and structural characterization of NiO films for gas detection
107(4)
J. Kremmer
I. Hotovy
V. Rehacek
J. Siroky
L. Spiess
J. Schawohl
Some possibilities for determining the depth of the p-n junction and profiles of semiconductor layers
111(14)
L. Hulenyi
R. Kinder
RF structures and devices
Resonant tunnelling diodes for digital circuit applications
Invited talk
115(10)
W. Prost
Microwave GaAs Schottky diode
125(4)
P. Machac
V. Jenicek
J. Pangrac
K. Hoffmann
Generation of 460 GHz radiation by photomixing in low-temperature-grown MBE GaAs
129(4)
M. Mikulics
F. Siebe
A. Fox
M. Marso
A. Forster
H. Stuer
F. Schafer
R. Gusten
P. Kordos
Terahertz Bloch oscillations in semiconductor superlattices
133(4)
H. Moravcova
J. Voves
Modeling and characterization I
Microstructure of indium-tin-oxide films deposited on glass substrates
137(4)
P. Sutta
Q. Jackuliak
Breakdown mechanisms limiting the operation of double doped PHEMTs scaled into sub-100 nm dimensions
141(4)
K. Kalna
A. Asenov
Role of minority carrier extraction in performance of radiation detectors based on semi-insulating GaAs
145(4)
F. Dubecky
B. Zat'ko
V. Necas
M. Sekacova
J. Huran
P. Bohacek
C. Ferrari
P. Kordos
A. Forster
Photoluminescence characterisation of bismuth-doped GaSb
149(4)
M. Kucera
J. Novak
Investigation of 4H-SiC diode with RuO2 Schottky contact by DLTS
153(4)
L'. Stuchlikova
L. Harmatha
D. Buc
U. Helmersson
Q. Wahab
Characterization of delta-doped GaAs grown by MOVPE
157(18)
P. Gurnik
P. Beno
R. Srnanek
M. Tlaczala
B. Sciana
L. Harmatha
Nanotechnology
Epitaxy -- Close and away from thermodynamic equilibrium
Invited talk
161(14)
H. Sitter
Optical gain in GalnNAs/GaAs multi-quantum well structures
175(4)
J. Kvietkova
M. Hetterich
D. Saez de Jauregui
A. Yu. Egorov
H. Riechert
Photoconductive terahertz emitter with an integrated semiconductor Bragg mirror
179(4)
J. Darmo
T. Muller
G. Strasser
K. Unterrainer
T. Le
G. Tempea
A. Stingl
MOVPE growth of 1220 nm (In,Ga)(As,P)/InP LED structures
183(4)
R. Kudela
M. Kucera
D. Gregusova
V. Cambel
J. Novak
Modeling and characterization II
Modeling of the inverse base width modulation effect in SiGe base HBT for circuit simulation
187(4)
T. Pesic
N. Jankovic
J. Karamarkovic
Strain and composition in thin SiGe buffer layers with high Ge content studied by micro-Raman spectroscopy
191(4)
T. S. Perova
K. Lyutovich
D. Potapova
C. P. Parry
E. Kasper
R. A. Moore
Chemical beveling of Si/SiGe structures for structure and material analysis by Raman spectroscopy
195(4)
R. Srnanek
R. Kinder
D. Donoval
L. Peternai
I. Novotny
J. Geurts
D. S. Mc Phail
R. Chater
A. Nemcsics
Evaluation of δ-layer depth profiles detected on beveled semiconductor structures by micro Raman spectroscopy
199(4)
B. Rheinlander
R. Srnanek
J. Kovac
Auger investigations of GaAs sputtered with low-energy Ar+ ions at glancing incidence
203(4)
R. Kosiba
G. Ecke
J. Breza
J. Liday
GMR signal of Co-Ag layered structures in dynamic conditions of measurement
207(4)
V. AC
S. Luby
E. Majkova
R. Senderak
B. Anwarzai
POSTERS II -- Modeling and characterization
New numerical power IGBT model and simulation of its electrical characteristics
211(4)
Ly. Benbahouche
S. Latrech
C. Gontrand
An analytical heterojunction diode model including the electron transport inside the depletion layer and the breakdown
215(4)
M. Horak
Heat transfer modeling in metal-semiconductor structures
219(4)
G. Khlyap
P. Sydorchuk
Modelling of the photodiode in various microwave applications
223(4)
A. L. Chizh
S. A. Malyshev
A 0.35 μm CMOS linear differential amplifier independent of threshold voltage
227(4)
C. Popa
Profiling of a GaAs atructure using the probe method
231(4)
R. Kinder
R. Srnanek
J. Walachova
L. Hulenyi
M. Tlaczala
B. Sciana
D. Radziewicz
Stimulation of diamond growth on optically transparent non-conductive substrates
235(4)
M. Kadlecikova
J. Breza
M. Vesely
V. Luptakova
F. Balon
A. Vojackova
J. Kral
J. Janik
A. Kromka
Coplanar waveguide modeling based on scattering parameter measurements
239(4)
M. Klasovity
M. Tomaska
RF power transistor design in standard digital CMOS technology
243(4)
M. Tomaska
M. Krnac
R. Vazny
Carrier noise in mode-locked fibre grating external cavity lasers
247(4)
N. Dogru
M. S. Ozyazici
Crosstalk analysis in CMOS integrated circuits
251(4)
J. Novak
J. Foit
Comparison of nonvolatile memory cells for molybdenum gate analog BeCMOS process
255(16)
H. Ronkainen
K. Theqvist
Submicrometer structures
CMOS scaling to 25 nm gate lengths
Invited talk
259(12)
S. Kubicek
K. De Meyer
Process steps for a double gate MOSFET with vertical layout
271(4)
St. Trellenkamp
J. Moers
A. van der Hart
P. Kordos
H. Luth
Thin low-temperature gate oxides for vertical field-effect transistors
275(4)
M. Goryll
J. Moers
St. Trellenkamp
L. Vescan
M. Marso
P. Kordos
H. Luth
ZrO2 and ZrO2/Y2O3 gate dielectrics prepared by evaporation and annealing processes
279(4)
M. Johansson
M. Y. A. Yousif
A. Sareen
P. Lundgren
S. Bengtsson
U. Sodervall
GaN structures
Photoenhanced wet etching of gallium nitride on submicrometer scale
283(4)
J. Skriniarova
A. van der Hart
H. P. Bochem
A. Fox
P. Kordos
High-performance AlGaN/GaN HEMTs on silicon substrates
287(4)
P. Javorka
A. Alam
A. Fox
M. Marso
M. Heuken
P. Kordos
RF small-signal and power characterization of AlGaN/GaN HEMTs
291(4)
A. Fox
M. Marso
P. Javorka
P. Kordos
MSM diodes based on an AlGaN/GaN HEMT layer structure for varactor and photodiode application
295(4)
M. Marso
J. Bernat
M. Wolter
P. Javorka
A. Fox
P. Kordos
Investigation of current collapse in doped and undoped AlGaN/GaN HEMTs
299(4)
M. Wolter
P. Javorka
M. Marso
R. Carius
M. Heuken
H. Luth
P. Kordos
Analysis of I-V measurements on Pt/Au-GaN Schottky contacts in a wide temperature range
303(14)
D. Donoval
V. Kulikov
P. Beno
J. Racko
Chemical sensors
Interfacing chemistry with microdevices: Potential and challenges of chemical microsensors
Invited talk
307(10)
B. Mizaikoff
Ch. Kranz
Impedance measurements of chemical gas sensors
317(4)
F. Vyslouzil
M. Vrnata
V. Myslik
M. Kovanda
R. Frycek
M. Jelinek
Thin films for electrochemical sensoric interfaces
321(4)
A. Jakubec
V. Rehacek
I. Novotny
R. Ivanic
V. Tvarozek
Ch. Knedlik
V. Breternitz
L. Spiess
Novel ratio conductance electrochemical sensor based on thin film asymmetric microelectrodes
325(4)
E. Vavrinsky
V. Tvarozek
I. Novotny
Z. Reznicek
D. Nikolelis
Modeling and characterization III
Macromodeling of fluidic damping effects in microdevices
329(4)
G. Wachutka
G. Schrag
R. Sattler
Automatic order reduction of thermo-electric models for MEMS: Arnoldi versus Guyan
333(4)
T. Bechtold
E. B. Rudnyi
J. G. Korvink
Hysteresis effects due to eddy currents in the integer quantum Hall regime probed by an SET-electrometer
337(4)
T. Klaffs
D. Presnov
V. A. Krupenin
J. Huls
J. Weis
F. J. Ahlers
Current-voltage characteristics of Schottky diodes: Topology and relationships between relevant parameters
341(4)
F. Srobar
O. Prochazkova
EKV compact model extension for HV lateral DMOS transistors
345(4)
N. Hefyene
J. M. Sallese
C. Anghel
A. M. Ionescu
S. F. Frere
R. Gillon
Failure mechanism of power DMOS transistors under UIS stress conditions
349(14)
A. Icaza-Deckelmann
G. Wachutka
J. Krumrey
F. Hirler
Sensors
New trends in thin film silicon solar cell technology
Invited talk
353(10)
M. Zeman
Manufacturing of pixel detectors at Tesla SEZAM
363(6)
M. Frys
S. Kapsia
Z. Spetik
V. Jurka
V. Vrba
Volume shrinking in micro-fluidic self-assembly
369(4)
J. Lienemann
A. Greiner
J. G. Korvink
Superior-order curvature-corrections CMOS smart temperature sensor
373(4)
C. Popa
Author index 377