Authors |
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xi | |
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Chapter 1 The Driving Forces Behind Moore's Law and Its Impact on Technology |
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1 | (32) |
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1 | (11) |
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The Inevitable Demise of Dennard's Scaling Law |
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2 | (2) |
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Power Consumption in CMOS Inverters |
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4 | (5) |
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9 | (3) |
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Technical and Economic Factors Driving Moore's Law |
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12 | (4) |
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Technical Factors Driving Moore's Law |
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12 | (2) |
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Economic Factors Driving Moore's Law |
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14 | (2) |
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The Limitations of Moore's Law |
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16 | (4) |
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17 | (2) |
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Interconnects and Heat Generation |
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19 | (1) |
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19 | (1) |
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Next-Generation Technologies |
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20 | (6) |
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20 | (3) |
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23 | (3) |
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Future-Generation Technologies |
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26 | (1) |
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26 | (1) |
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26 | (1) |
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26 | (1) |
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27 | (1) |
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27 | (1) |
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28 | (5) |
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Chapter 2 The Economics of Semiconductor Scaling |
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33 | (34) |
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33 | (29) |
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The Economics of Geometric Scaling of Substrates and Dies |
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34 | (12) |
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The Wafer Manufacturing Industry |
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46 | (1) |
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The Move to 17.7 Inch (450 mm/18 Inch) Wafers |
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47 | (4) |
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The Economics of Device Scaling/Feature Scaling |
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51 | (3) |
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General Manufacturing Operating Costs |
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54 | (2) |
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Running a Foundry Optimally |
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56 | (3) |
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Considering Die and Wafer Yield to Keep Driving Moore's Law |
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59 | (2) |
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Integrated Circuits: A Complex Business |
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61 | (1) |
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62 | (1) |
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63 | (4) |
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Chapter 3 The Importance of Photolithography for Moore's Law |
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67 | (34) |
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67 | (3) |
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Photolithography Light Sources |
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70 | (3) |
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71 | (1) |
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72 | (1) |
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73 | (1) |
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Simplified Process Flow for Patterning Semiconductor Levels |
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73 | (2) |
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Basic Principles of Lithographic Imaging Systems |
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75 | (11) |
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Optical Lithography Resolution |
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80 | (1) |
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Optical Lithography f-Number and Numerical Aperture |
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81 | (1) |
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Optical Lithography Depth of Focus |
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82 | (2) |
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Optical Lithography Photomask Protection (Pellicles) |
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84 | (2) |
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86 | (5) |
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86 | (1) |
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87 | (1) |
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88 | (1) |
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89 | (1) |
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90 | (1) |
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90 | (1) |
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90 | (1) |
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Light-Sensitive Photoresist |
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91 | (6) |
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Positive Photoresist Patterning |
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95 | (1) |
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Negative Photoresist Patterning |
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96 | (1) |
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Completing the Patterning Process |
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97 | (1) |
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97 | (1) |
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98 | (3) |
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Chapter 4 Photolithography Enhancements |
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101 | (40) |
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101 | (1) |
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Photolithography Resolution-Enhancement Techniques |
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102 | (14) |
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Immersion Photolithography (Single Exposure) |
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102 | (5) |
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107 | (3) |
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Electron-Beam Lithography |
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110 | (6) |
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Advanced Photolithography Processing Techniques |
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116 | (12) |
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Pitch-Split Multiple Exposure Patterning |
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117 | (4) |
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121 | (2) |
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Directed Self-Assembly Patterning |
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123 | (5) |
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Optical Proximity Correction and Resolution Enhancement Techniques |
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128 | (3) |
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Material and Processing-Based Patterning Limitations |
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131 | (2) |
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Metrology-Based OPC Verification and Design Rule Checks |
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133 | (1) |
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134 | (1) |
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135 | (6) |
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Chapter 5 Future Semiconductor Devices: Exotic Materials, Alternative Architectures and Prospects |
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141 | (40) |
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141 | (7) |
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Optoelectronic Waveguides and Photonic Crystals |
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143 | (2) |
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145 | (2) |
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147 | (1) |
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Solid-State Quantum Computing |
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147 | (1) |
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Graphene-Based Electronic Circuits |
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148 | (2) |
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Optoelectronics: Waveguides and Photonic Crystals |
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150 | (5) |
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155 | (2) |
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157 | (3) |
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Solid-State Quantum Computing |
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160 | (16) |
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The Principles of Quantum Computing |
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160 | (3) |
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163 | (6) |
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Applications of Quantum Computing |
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169 | (1) |
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170 | (3) |
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173 | (1) |
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Quantum Codes and Quantum Cryptography |
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174 | (2) |
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176 | (1) |
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176 | (5) |
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Chapter 6 Microelectronic Circuit Thermal Constrictions Resulting from Moore's Law |
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181 | (34) |
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181 | (8) |
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CMOS Active and Passive Power Dissipation |
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189 | (2) |
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Aggressively Scaled CMOS Leakage Currents |
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191 | (1) |
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Subthreshold Leakage Current |
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192 | (3) |
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Reverse-Bias pn-Junction Leakage Current |
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195 | (2) |
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Gate Oxide Tunneling Leakage Currents |
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197 | (8) |
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The Schottky Barrier Height |
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200 | (2) |
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202 | (3) |
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Tunneling Field-Effect Transistors |
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205 | (2) |
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Hot-Carrier Injection From the Substrate to the Gate Oxide |
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207 | (2) |
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Gate-Induced Drain Leakage |
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209 | (1) |
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210 | (2) |
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212 | (3) |
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Chapter 7 Microelectronic Circuit Enhancements and Design Methodologies to Facilitate Moore's Law -- Part 1 |
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215 | (32) |
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215 | (6) |
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Microelectronic Circuit Component Footprints |
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221 | (1) |
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222 | (22) |
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The Impact of Transistor Scaling and Geometry on Noise |
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225 | (3) |
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Physical Layout Properties of the MOSFET |
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228 | (2) |
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Multiple-Finger Transistor Geometries |
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230 | (1) |
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Reduced Polysilicon Gate Resistance |
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231 | (1) |
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Reduced Drain and Source Area and Perimeter |
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232 | (2) |
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Improved MOS Transistor Frequency Response |
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234 | (1) |
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Improved Transistor Matching |
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234 | (1) |
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Transistor Layout Matching |
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235 | (1) |
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Common Centroid and Interdigitating Transistor Matching |
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236 | (5) |
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Shallow Trench Isolation Stress in Transistors |
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241 | (1) |
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Transistor Layout Checklist |
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241 | (3) |
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244 | (1) |
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245 | (2) |
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Chapter 8 Micro -- Part II |
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247 | (44) |
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247 | (3) |
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Integrated Resistor Optimizations |
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250 | (15) |
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Integrated Resistor Layout |
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250 | (1) |
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Resistance/Sheet Resistance of the Integrated Resistor |
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250 | (3) |
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Measurement of Layer Sheet Resistance and Contact Resistance |
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253 | (2) |
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Bridge Test Structure (Sheet Resistance) |
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255 | (1) |
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The Kelvin Structure (Contact Resistance) |
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256 | (1) |
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Integrated Resistor Parasitic Components |
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257 | (2) |
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Noise in Integrated Resistors |
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259 | (2) |
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Resistor Layout Optimizations and Matching |
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261 | (1) |
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Interdigitated Integrated Resistors |
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262 | (1) |
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Common-Centroid Integrated Resistors |
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263 | (1) |
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263 | (2) |
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MOS Capacitor Optimization |
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265 | (19) |
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Integrated Capacitor Layout |
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265 | (2) |
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MOS Capacitor Operating Regions |
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267 | (1) |
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268 | (1) |
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269 | (1) |
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Weak Inversion (Threshold of Inversion Condition) |
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270 | (2) |
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Capacitor Layout Optimizations |
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272 | (12) |
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284 | (2) |
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Integrated Circuit Inductor Layout |
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284 | (2) |
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286 | (2) |
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288 | (3) |
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Chapter 9 The Evolving and Expanding Synergy Between Moore's Law and the Internet-of-Things |
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291 | (34) |
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291 | (7) |
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The Limitations of the IoT |
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298 | (2) |
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M2M Communication and the IoT |
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300 | (2) |
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Remote Device Management Challenges |
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302 | (4) |
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IoT Core Energy Efficiency |
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306 | (7) |
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Energy-Efficient IoT Receivers |
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313 | (9) |
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Tuned RF Receiver Architecture |
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313 | (2) |
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The Superheterodyne RF Receiver Architecture |
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315 | (3) |
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Super-Regenerative Receivers |
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318 | (4) |
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322 | (1) |
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323 | (2) |
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Chapter 10 Technology Innovations Driven by Moore's Law |
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325 | (20) |
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325 | (17) |
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Nvidia Volta 12 nm Graphics Processing Units |
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327 | (1) |
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328 | (6) |
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Intel Corporation 10 nm Process Technology |
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334 | (3) |
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Samsung/Qualcomm 10 nm Transistors |
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337 | (1) |
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IBM Research 5 nm Transistors |
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338 | (2) |
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Wind River/Intel Corporation Industrial IoT Infrastructure |
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340 | (1) |
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Berkeley Lab 1 nm Carbon Nanotube |
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340 | (2) |
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342 | (2) |
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344 | (1) |
Index |
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345 | |