Preface |
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xi | |
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Design at Resonance of Mechanical Microsystems |
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1 | (44) |
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1 | (2) |
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Single-Degree-of-Freedom Systems |
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3 | (19) |
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3 | (2) |
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Forced Response---the Resonance |
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5 | (5) |
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Loss Mechanisms in Mechanical Microresonators |
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10 | (12) |
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Multiple-Degree-of-Freedom Systems |
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22 | (11) |
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Approximate Methods for Resonant Frequencies Calculation |
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22 | (4) |
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Eigenvalues, Eigenvectors, and Mode Shapes |
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26 | (4) |
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30 | (3) |
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Mechanical-Electrical Analogies for Microsystems |
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33 | (3) |
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Laplace Transforms, Transfer Functions, and Complex Impedances |
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36 | (9) |
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42 | (3) |
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Basic Members: Lumped- and Distributed-Parameter Modeling and Design |
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45 | (60) |
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45 | (2) |
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Lumped-Parameter Modeling and Design |
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47 | (44) |
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Lumped-Parameter Stiffnesses and Compliances |
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47 | (8) |
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Lumped-Parameter Inertia Properties |
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55 | (3) |
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Constant-Cross-Section Members |
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58 | (13) |
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Variable-Cross-Section Members |
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71 | (20) |
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Distributed-Parameter Modeling and Design |
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91 | (14) |
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91 | (7) |
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98 | (3) |
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Thin Plates and Membranes |
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101 | (3) |
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104 | (1) |
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Microhinges and Microcantilevers: Lumped-Parameter Modeling and Design |
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105 | (62) |
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105 | (2) |
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Compliance Transforms by Reference Frame Translation |
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107 | (4) |
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Compliances in Opposite-End Reference Frames |
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108 | (2) |
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Compliances in Arbitrarily Translated Reference Frames |
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110 | (1) |
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Micromembers Formed of Two Compliant Segments |
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111 | (34) |
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115 | (11) |
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Filleted Microcantilevers |
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126 | (8) |
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134 | (8) |
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Circularly Notched Microcantilevers |
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142 | (3) |
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145 | (5) |
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Rectangular Microcantilevers |
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146 | (2) |
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Trapezoid Microcantilevers |
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148 | (2) |
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Sandwiched Microcantilevers (Multimorphs) |
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150 | (12) |
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Microcantilevers of Equal-Length Layers |
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150 | (7) |
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Microcantilevers of Dissimilar-Length Layers |
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157 | (5) |
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Resonant Microcantilever Arrays |
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162 | (5) |
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164 | (3) |
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Microbridges: Lumped-Parameter Modeling and Design |
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167 | (60) |
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167 | (2) |
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Microbridges of Constant Cross Section |
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169 | (9) |
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Bending Resonant Frequency |
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169 | (6) |
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Torsion Resonant Frequency |
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175 | (3) |
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Sandwiched Microbridges (Multimorphs) |
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178 | (7) |
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Multimorph Microbridges of Equal-Length Layers |
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178 | (4) |
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Multimorph Microbridges of Dissimilar-Length Layers |
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182 | (3) |
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Microbridges of Variable Cross Section |
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185 | (37) |
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185 | (1) |
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Generic Formulation for Single-Profile (Basic Shape) Microbridges |
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186 | (5) |
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Serially Compounded Microbridges |
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191 | (31) |
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Resonator Microbridge Arrays |
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222 | (5) |
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225 | (2) |
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Resonant Micromechanical Systems |
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227 | (66) |
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227 | (1) |
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Beam-Type Microresonators |
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227 | (31) |
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Resonant Frequency Models for Microcantilevers |
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228 | (9) |
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Resonant Frequency Models for Microbridges |
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237 | (8) |
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Other Examples of Beam-Type Microresonators |
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245 | (13) |
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Spring-Type Microresonators |
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258 | (3) |
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Transduction in Microresonators |
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261 | (10) |
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Electrostatic Transduction |
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262 | (4) |
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Electromagnetic Transduction |
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266 | (3) |
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Piezoelectric and Piezomagnetic Transduction |
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269 | (2) |
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271 | (8) |
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279 | (5) |
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284 | (9) |
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289 | (4) |
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Microcantilever and Microbridge Systems for Mass Detection |
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293 | (44) |
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293 | (6) |
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General Model of Point-Mass Addition Detection by Means of the Resonance Shift Method |
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299 | (4) |
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Mass Detection by Means of Microcantilevers |
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303 | (16) |
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Constant-Cross-Section Microcantilevers |
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304 | (11) |
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Variable-Cross-Section Microcantilevers |
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315 | (4) |
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Mass Detection by Means of Microbridges |
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319 | (8) |
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Constant-Cross-Section Microbridges |
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320 | (5) |
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Variable-Cross-Section Microbridges |
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325 | (2) |
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Mass Detection by Means of Partially Compliant, Partial-Inertia Microdevices |
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327 | (10) |
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328 | (3) |
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331 | (4) |
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335 | (2) |
Index |
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337 | |