|
1 A New Era of Old Electronics |
|
|
1 | (12) |
|
|
1 | (1) |
|
1.2 The Call for Energy-Efficiency |
|
|
2 | (1) |
|
1.3 Energy-Efficiency Limitations of CMOS |
|
|
3 | (4) |
|
|
3 | (2) |
|
1.3.2 Minimizing CMOS Energy Consumption |
|
|
5 | (2) |
|
1.3.3 Temporarily Averting the CMOS Power Crisis |
|
|
7 | (1) |
|
1.4 Micro-relays as an Energy-Efficient Technology |
|
|
7 | (2) |
|
1.4.1 Electromechanical Devices |
|
|
8 | (1) |
|
1.4.2 Energy Outlook for Micro-relays |
|
|
9 | (1) |
|
|
9 | (4) |
|
|
10 | (3) |
|
2 Design and Modeling of Micro-relay |
|
|
13 | (34) |
|
|
13 | (1) |
|
2.2 Relay Structure and Operation |
|
|
13 | (3) |
|
2.3 Design and Modeling of Mechanical Beams |
|
|
16 | (17) |
|
2.3.1 Mechanical Modeling of Cantilever Beams |
|
|
20 | (3) |
|
2.3.2 Mechanical Modeling of Fixed-fixed Beams |
|
|
23 | (2) |
|
2.3.3 Impact of Stress Gradient and Residual Stress |
|
|
25 | (7) |
|
2.3.4 Stress/Strain Gradient Free Beam Design |
|
|
32 | (1) |
|
2.4 Design and Modeling of Torsional Beam |
|
|
33 | (4) |
|
2.5 Dimple Support Design |
|
|
37 | (1) |
|
|
38 | (1) |
|
2.7 Dynamic Behavior of Micro-relays |
|
|
39 | (5) |
|
2.7.1 Effective Mass Model |
|
|
41 | (2) |
|
|
43 | (1) |
|
2.8 Relay Energy Consumption per Operation |
|
|
44 | (3) |
|
Appendix: Spring Constant of a Pinned-Pinned Beam |
|
|
44 | (2) |
|
|
46 | (1) |
|
3 Micro-relay Technologies |
|
|
47 | (22) |
|
|
47 | (1) |
|
3.2 Process Integration Considerations for Micro-relay Technology |
|
|
47 | (2) |
|
3.3 Berkeley Folded-Flexure Relay with Poly-Si0.4Ges Structure and Tungsten Contacts |
|
|
49 | (6) |
|
|
49 | (6) |
|
3.3.2 Dynamic Performance53 |
|
|
|
3.4 KAIST Titanium-Nitride Relay Technology |
|
|
55 | (2) |
|
3.5 Stanford Laterally Actuated Platinum-Coated Polysilicon Relay |
|
|
57 | (2) |
|
3.6 Sandia National Laboratories Laterally Actuated Ruthenium Relay |
|
|
59 | (2) |
|
3.7 Integrations with CMOS |
|
|
61 | (2) |
|
3.8 University of Pennsylvania Piezoelectric Aluminum Nitride Micro-relay |
|
|
63 | (6) |
|
|
68 | (1) |
|
4 Micro-relay Reliability |
|
|
69 | (12) |
|
|
69 | (1) |
|
|
69 | (1) |
|
|
70 | (2) |
|
4.4 Contact Surface Oxidation |
|
|
72 | (2) |
|
|
74 | (7) |
|
4.5.1 Contact Endurance Model |
|
|
74 | (2) |
|
4.5.2 Validation of the Contact Endurance Model |
|
|
76 | (2) |
|
4.5.3 Design Implications |
|
|
78 | (2) |
|
|
80 | (1) |
|
5 Optimization and Scaling of Micro-relays for Ultralow-Power Digital Logic |
|
|
81 | (22) |
|
|
81 | (1) |
|
5.2 Relay Energy-Delay Optimization |
|
|
82 | (6) |
|
5.2.1 Sensitivity Analysis |
|
|
84 | (1) |
|
5.2.2 Sensitivity to Supply Voltage (Vdd) |
|
|
85 | (1) |
|
5.2.3 Sensitivity to Actuation Area (A) |
|
|
86 | (1) |
|
5.2.4 Sensitivity to As-Fabricated Gap Thickness (g) |
|
|
87 | (1) |
|
5.2.5 Sensitivity to Beam Length (L) |
|
|
87 | (1) |
|
5.3 Relay Design Optimization |
|
|
88 | (8) |
|
5.3.1 Optimal Gap Thickness Ratio (gd/g) |
|
|
89 | (1) |
|
|
90 | (1) |
|
5.3.3 Optimal Actuation Area (A) and Supply Voltage (Vdd) |
|
|
91 | (1) |
|
5.3.4 Optimal Beam Length (L) |
|
|
92 | (1) |
|
5.3.5 Relay Design Optimization Procedure |
|
|
93 | (3) |
|
5.3.6 Energy-Efficiency Limit |
|
|
96 | (1) |
|
|
96 | (7) |
|
|
100 | (3) |
|
6 Integrated Circuit Design with Micro-relays |
|
|
103 | (34) |
|
|
103 | (1) |
|
6.2 Micro-relay Switching Characteristics |
|
|
104 | (2) |
|
6.2.1 DC Switching Characteristics of Micro-relays |
|
|
104 | (1) |
|
6.2.2 Dynamic Switching Characteristics of Micro-relays |
|
|
105 | (1) |
|
6.3 Micro-relays as a Circuit Building Block |
|
|
106 | (5) |
|
6.3.1 Micro-relays as a Digital Logic Element |
|
|
106 | (1) |
|
6.3.2 Micro-relays as an Analog Processing Element |
|
|
107 | (1) |
|
6.3.3 Secondary Effects in Micro-relays |
|
|
108 | (3) |
|
6.4 Circuit Modeling for Micro-relays |
|
|
111 | (5) |
|
|
111 | (1) |
|
6.4.2 Model Extensions for Simulation |
|
|
112 | (2) |
|
|
114 | (2) |
|
6.5 The Static Micro-relay Inverter (Buffer) |
|
|
116 | (7) |
|
6.5.1 Micro-relay Inverter Operation |
|
|
116 | (1) |
|
6.5.2 Static Behavior and Robustness of a Micro-relay Inverter |
|
|
117 | (3) |
|
6.5.3 Dynamic Switching Behavior of a Micro-relay Inverter |
|
|
120 | (3) |
|
6.6 Combinational Logic Design with Micro-relays |
|
|
123 | (5) |
|
6.6.1 Logic Styles for MEM Relays |
|
|
124 | (2) |
|
6.6.2 Pass-Transistor Logic Design with Micro-relays |
|
|
126 | (2) |
|
|
128 | (9) |
|
Appendix: Micro-relay Verilog-A Model |
|
|
128 | (6) |
|
|
134 | (3) |
|
7 Micro-relay Circuits for VLSI Applications |
|
|
137 | (44) |
|
|
137 | (1) |
|
7.2 Arithmetic Building Blocks |
|
|
137 | (14) |
|
7.2.1 Micro-relay Adder Design and Performance |
|
|
138 | (3) |
|
7.2.2 Micro-relay Multiplier Design and Performance |
|
|
141 | (9) |
|
|
150 | (1) |
|
7.3 Sequential Relay Circuits and Memory |
|
|
151 | (7) |
|
7.3.1 Static Latches and Flip-flops |
|
|
151 | (2) |
|
7.3.2 Dynamic Latches and Registers |
|
|
153 | (1) |
|
7.3.3 Pipelined Datapath Timing |
|
|
154 | (2) |
|
7.3.4 Relay Memory Circuits |
|
|
156 | (2) |
|
7.4 Synthesis of Relay Logic |
|
|
158 | (6) |
|
7.4.1 Tree-Based Relay Synthesis |
|
|
158 | (1) |
|
7.4.2 Relay Synthesis with Binary Decision Diagrams (BDD) |
|
|
159 | (5) |
|
7.5 Mixed-Signal Relay Circuits |
|
|
164 | (13) |
|
7.5.1 Clocking Generation |
|
|
164 | (2) |
|
7.5.2 A Micro-relay Digital-to-Analog Converter (DAC) |
|
|
166 | (2) |
|
7.5.3 Sub-mechanical Delay Data Transmission |
|
|
168 | (2) |
|
7.5.4 A Micro-relay Analog-to-Digital Converter (ADC) |
|
|
170 | (5) |
|
7.5.5 Sub-mechanical Bit Time Data Receiver |
|
|
175 | (2) |
|
|
177 | (4) |
|
|
177 | (4) |
Index |
|
181 | |