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Microactuators: Electrical, Magnetic, Thermal, Optical, Mechanical, Chemical & Smart Structures 1998 ed. [Kõva köide]

  • Formaat: Hardback, 287 pages, kõrgus x laius: 235x155 mm, kaal: 636 g, 41 Illustrations, black and white; XII, 287 p. 41 illus., 1 Hardback
  • Sari: Electronic Materials: Science & Technology 4
  • Ilmumisaeg: 31-Dec-1997
  • Kirjastus: Springer
  • ISBN-10: 0792380894
  • ISBN-13: 9780792380894
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  • Formaat: Hardback, 287 pages, kõrgus x laius: 235x155 mm, kaal: 636 g, 41 Illustrations, black and white; XII, 287 p. 41 illus., 1 Hardback
  • Sari: Electronic Materials: Science & Technology 4
  • Ilmumisaeg: 31-Dec-1997
  • Kirjastus: Springer
  • ISBN-10: 0792380894
  • ISBN-13: 9780792380894
Teised raamatud teemal:
Describes the underlying principles and implementations of different actuation methods as listed in the title, combining the fundamentals with the latest reported actuators. The subject is important because sensors and actuators have taken the place of microprocessors and computers as the main bottleneck of information processing and control systems. Each chapter begins with a thorough explanation of the basic operation of the particular type of mechanism, which is followed by an implementation example and a literature survey. Chiefly for academic and industrial researchers, but can be used as a textbook for senior and graduate level courses. Annotation c. by Book News, Inc., Portland, Or.

Microactuators provides a comprehensive coverage of the emerging topic of microactuators that has attracted much attention in recent years. Largely owing to the microfabrication methods used in the microelectrics industry, microactuators are being developed at a very fast rate. Although there have been some excellent review articles covering parts of this important field, until now there has not been a single book devoted to its comprehensive coverage.
Microactuators covers the fundamentals of actuation in a textbook manner and it exposes the reader to some research examples. In combining fundamentals with the latest reported actuators, this book distinguishes itself from other monographs or textbooks.
The main intended audiences of Microactuators are academic and industrial researchers and graduate students interested in initiating projects in microactuators. It can also be used as a textbook for a senior/graduate level course in the general area of sensors and actuators.

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Springer Book Archives
Chapter 1 Actuator Performance and Preliminaries
1(36)
1.1 Introduction
1(2)
1.2 Performance Measures
3(7)
1.3 Actuation Means, Actuator Shells and Figure of Merit
10(9)
1.3.1 Deformable Shells
11(1)
1.3.2 Elastic Constants of Micromachined Structures
11(1)
1.3.3 Microcantilever Beams
12(2)
1.3.4 Microbridges
14(1)
1.3.5 Diaphragms
15(1)
1.3.6 Torsional Mirrors
16(2)
1.3.7 Pivoted/Rotational Shells
18(1)
1.3.8 Figure of Merit
19(1)
1.4 Microfabrication Methods
19(8)
1.4.1 Common Fabrication Steps
19(5)
1.4.2 Bulk Micromachining
24(2)
1.4.3 Surface Micromachining
26(1)
1.5 Microfabrication of Specific Devices
27(6)
1.5.1 Variable Capacitance Micromotor (VCM)
28(1)
1.5.2 Microcantilever Beam with Piezoelectric Actuator
29(2)
1.5.3 Flip-up Free-space Fresnel Microlenses
31(1)
1.5.4 LIGA
32(1)
1.6 References
33(4)
Chapter 2 Electrical Microactuators
37(58)
2.1 Introduction
37(1)
2.2 Electrostatic Microactuators
38(19)
2.2.1 Perpendicular Motion
39(2)
2.2.2 Lateral Motion
41(1)
2.2.3 Dielectric Slab
42(1)
2.2.4 Combination Perpendicular and Parallel Motions
43(2)
2.2.5 General Formulation
45(1)
2.2.6 Linear Electrostatic Micromotors
46(3)
2.2.7 Rotary Electrostatic Micromotors
49(5)
2.2.8 Resonant Structures: Comb-Drives
54(1)
2.2.9 Electro-Hydrodynamic Actuators
55(2)
2.3 Piezoelectric Actuators
57(8)
2.3.1 Linear Micromotors
62(1)
2.3.2 Rotational Micromotors
63(2)
2.3.3 Piezoelectric Resonant Structures
65(1)
2.4 Electro-Rheological Actuators
65(2)
2.5 Applications in Optics
67(11)
2.5.1 Free-Space Optics
67(6)
2.5.2 Integrated Optics
73(5)
2.6 Applications in Acoustics and Ultrasonics
78(1)
2.7 Applications in Fluidics
79(1)
2.8 Applications in Relays
80(1)
2.9 Applications in Scanning Probes and Microrobotics
81(4)
2.10 Applications in Surgery
85(1)
2.11 References
86(9)
Chapter 3 Magnetic Microactuators
95(32)
3.1 Introduction
95(2)
3.2 Magnetic Materials for Microactuators
97(8)
3.2.1 Diamagnetism
98(1)
3.2.2 Paramagnetism
98(1)
3.2.3 Ferromagnetism and Ferromagnets
99(3)
3.2.4 Antiferromagnetism
102(1)
3.2.5 Ferrimagnetism
102(1)
3.2.6 Magnetostriction
102(1)
3.2.7 Magnetoresistivity
103(1)
3.2.8 Molecular and Polymeric Magnets
104(1)
3.3 Force Laws
105(4)
3.4 Magnetization-Type Microactuators
109(9)
3.4.1 Thermo-Magnetic Microactuators
109(2)
3.4.2 Magnetostatic Microactuators
111(4)
3.4.3 Design of Magnetic Microactuators with Planar Coils
115(1)
3.4.4 Electromagnetic Microactuators
116(2)
3.5 Lorentz Force Actuator
118(2)
3.6 Magnetostrictive Microactuators
120(2)
3.7 Magnetic Levitation
122(1)
3.8 Fabrication of Magnetic Actuators
123(1)
3.9 References
124(3)
Chapter 4 Thermal and Phase-Transformation Microactuators
127(24)
4.1 Introduction
127(6)
4.2 Gas Expansion
133(5)
4.2.1 Thermopneumatic Micropump
134(2)
4.2.2 Thermal Inkjet Printhead
136(1)
4.2.3 Stirling Microengines
136(1)
4.2.4 Power MEMS and Microengines
137(1)
4.3 Solid Expansion
138(4)
4.4 Phase Transformation Microengines and Actuators
142(6)
4.4.1 Shape Memory Alloy
142(4)
4.4.2 Other Phase Transformation Actuators
146(2)
4.5 References
148(3)
Chapter 5 Optical Microactuators
151(28)
5.1 Introduction
151(1)
5.2 Electron-mediated Direct Optical Actuators
152(12)
5.2.1 Photoelectron Microactuator
152(5)
5.2.2 Photoconductivity Modulation Actuator
157(3)
5.2.3 Photodiode Microactuator
160(2)
5.2.4 Optically-modulated Gas Permittivity Microactuator
162(1)
5.2.5 Comparison of Direct Optical Microactuators
162(2)
5.3 Direct Optical Manipulation: Optical Twizers and Traps
164(1)
5.4 Opto-Thermal Actuators: Gas Expansion
165(4)
5.5 All-Optical Systems
169(1)
5.6 Fabrication Methods
170(6)
5.6.1 Waveguide Formation
170(5)
5.6.2 Anti-resonant Reflecting Optical Waveguides
175(1)
5.7 References
176(3)
Chapter 6 Mechanical and Acoustic Microactuators and Micropumps
179(18)
6.1 Introduction
179(1)
6.2 Solid Links and Other Mechanism
179(5)
6.2.1 Deformable Links and Levers
180(2)
6.2.2 Gear Boxes
182(1)
6.2.3 Bistable Diaphragms and Structures
183(1)
6.3 Ultrasonic and Acoustic Microactuators
184(9)
6.3.1 Ultrasonic Microcutter
184(1)
6.3.2 Bulk Acoustic Wave Pumps
185(2)
6.3.3 Inkjets
187(1)
6.3.4 Bulk Acoustic Wave Pumps
188(1)
6.3.5 Flexural and Lamb Wave Actuators and Pumps
188(1)
6.3.6 Surface Acoustic Wave Actuators and Pumps
189(4)
6.4 Fluidic Switches and Amplifiers
193(1)
6.5 References
194(3)
Chapter 7 Chemical and Biological Microactuators
197(22)
7.1 Introduction
197(1)
7.2 Conversion of Chemical Reactions to Electrical and Mechanical Energies
197(5)
7.2.1 Operation of Batteries
197(1)
7.2.2 Chemical Reactions in Microactuators
198(2)
7.2.3 Chemical Reactions in Living Organisms
200(2)
7.2.3 Chemical Reactions in Man-made Engines
202(1)
7.3 Biological Actuators: Muscle and Locomotion
202(8)
7.3.1 Locomotion and Mechanical Work in Biological Systems
202(2)
7.3.2 Different Types of Muscle
204(1)
7.3.3 Skeletal Muscle Structure and Work Cycle
205(5)
7.4 Chemical Jet in Beetles
210(3)
7.4.1 Squirting Action
211(1)
7.4.2 Surfactant Swimming
212(1)
7.4.3 Explosive Jets
213(1)
7.5 Combustion Engine: MEMS Microengines
213(1)
7.6 Conducting Polymer Actuators
214(1)
7.7 Gels
214(3)
7.8 References
217(2)
Chapter 8 Smart Structures
219(60)
8.1 Introduction
219(2)
8.2 Sensors
221(1)
8.3 Physical Sensors
222(19)
8.3.1 Electrical Sensing Means
223(8)
8.3.2 Magnetic Field Methods
231(1)
8.3.3 Optical Methods
232(9)
8.4 Chemical Sensors
241(17)
8.4.1 Electrical Gas and Chemical Sensors
243(3)
8.4.2 Guided-Optics Intrinsic Chemical Sensors
246(4)
8.4.3 Extrinsic Chemical Sensors
250(1)
8.4.4 Polymer Waveguide Chemical Sensors
251(1)
8.4.5 Surface Plasmon Chemical Sensors
252(1)
8.4.6 Indicator-Mediated Extrinsic Sensing
253(3)
8.4.7 Optical Biosensors
256(1)
8.4.8 Ultrasonic Gas and Chemical Sensors
257(1)
8.4.9 Intelligent Sensors
258(1)
8.5 Connections/Links and Wiring
258(5)
8.5.1 Optical Links
260(2)
8.5.2 Requirement on the Processing Unit/Intelligence
262(1)
8.6 Actuators
263(1)
8.7 Signal Processing/Computing
264(10)
8.7.1 Implicit Computation
266(1)
8.7.2 Explicit Computation
267(7)
8.8 References
274(5)
Subject Index 279