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Chapter 1 Actuator Performance and Preliminaries |
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1 | (36) |
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1 | (2) |
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3 | (7) |
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1.3 Actuation Means, Actuator Shells and Figure of Merit |
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10 | (9) |
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11 | (1) |
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1.3.2 Elastic Constants of Micromachined Structures |
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11 | (1) |
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1.3.3 Microcantilever Beams |
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12 | (2) |
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14 | (1) |
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15 | (1) |
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16 | (2) |
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1.3.7 Pivoted/Rotational Shells |
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18 | (1) |
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19 | (1) |
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1.4 Microfabrication Methods |
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19 | (8) |
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1.4.1 Common Fabrication Steps |
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19 | (5) |
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1.4.2 Bulk Micromachining |
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24 | (2) |
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1.4.3 Surface Micromachining |
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26 | (1) |
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1.5 Microfabrication of Specific Devices |
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27 | (6) |
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1.5.1 Variable Capacitance Micromotor (VCM) |
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28 | (1) |
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1.5.2 Microcantilever Beam with Piezoelectric Actuator |
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29 | (2) |
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1.5.3 Flip-up Free-space Fresnel Microlenses |
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31 | (1) |
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32 | (1) |
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33 | (4) |
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Chapter 2 Electrical Microactuators |
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37 | (58) |
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37 | (1) |
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2.2 Electrostatic Microactuators |
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38 | (19) |
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2.2.1 Perpendicular Motion |
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39 | (2) |
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41 | (1) |
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42 | (1) |
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2.2.4 Combination Perpendicular and Parallel Motions |
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43 | (2) |
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2.2.5 General Formulation |
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45 | (1) |
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2.2.6 Linear Electrostatic Micromotors |
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46 | (3) |
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2.2.7 Rotary Electrostatic Micromotors |
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49 | (5) |
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2.2.8 Resonant Structures: Comb-Drives |
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54 | (1) |
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2.2.9 Electro-Hydrodynamic Actuators |
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55 | (2) |
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2.3 Piezoelectric Actuators |
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57 | (8) |
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62 | (1) |
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2.3.2 Rotational Micromotors |
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63 | (2) |
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2.3.3 Piezoelectric Resonant Structures |
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65 | (1) |
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2.4 Electro-Rheological Actuators |
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65 | (2) |
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2.5 Applications in Optics |
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67 | (11) |
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67 | (6) |
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73 | (5) |
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2.6 Applications in Acoustics and Ultrasonics |
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78 | (1) |
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2.7 Applications in Fluidics |
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79 | (1) |
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2.8 Applications in Relays |
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80 | (1) |
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2.9 Applications in Scanning Probes and Microrobotics |
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81 | (4) |
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2.10 Applications in Surgery |
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85 | (1) |
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86 | (9) |
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Chapter 3 Magnetic Microactuators |
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95 | (32) |
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95 | (2) |
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3.2 Magnetic Materials for Microactuators |
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97 | (8) |
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98 | (1) |
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98 | (1) |
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3.2.3 Ferromagnetism and Ferromagnets |
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99 | (3) |
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102 | (1) |
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102 | (1) |
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102 | (1) |
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103 | (1) |
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3.2.8 Molecular and Polymeric Magnets |
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104 | (1) |
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105 | (4) |
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3.4 Magnetization-Type Microactuators |
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109 | (9) |
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3.4.1 Thermo-Magnetic Microactuators |
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109 | (2) |
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3.4.2 Magnetostatic Microactuators |
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111 | (4) |
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3.4.3 Design of Magnetic Microactuators with Planar Coils |
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115 | (1) |
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3.4.4 Electromagnetic Microactuators |
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116 | (2) |
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3.5 Lorentz Force Actuator |
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118 | (2) |
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3.6 Magnetostrictive Microactuators |
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120 | (2) |
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122 | (1) |
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3.8 Fabrication of Magnetic Actuators |
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123 | (1) |
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124 | (3) |
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Chapter 4 Thermal and Phase-Transformation Microactuators |
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127 | (24) |
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127 | (6) |
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133 | (5) |
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4.2.1 Thermopneumatic Micropump |
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134 | (2) |
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4.2.2 Thermal Inkjet Printhead |
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136 | (1) |
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4.2.3 Stirling Microengines |
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136 | (1) |
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4.2.4 Power MEMS and Microengines |
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137 | (1) |
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138 | (4) |
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4.4 Phase Transformation Microengines and Actuators |
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142 | (6) |
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142 | (4) |
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4.4.2 Other Phase Transformation Actuators |
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146 | (2) |
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148 | (3) |
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Chapter 5 Optical Microactuators |
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151 | (28) |
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151 | (1) |
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5.2 Electron-mediated Direct Optical Actuators |
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152 | (12) |
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5.2.1 Photoelectron Microactuator |
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152 | (5) |
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5.2.2 Photoconductivity Modulation Actuator |
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157 | (3) |
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5.2.3 Photodiode Microactuator |
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160 | (2) |
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5.2.4 Optically-modulated Gas Permittivity Microactuator |
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162 | (1) |
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5.2.5 Comparison of Direct Optical Microactuators |
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162 | (2) |
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5.3 Direct Optical Manipulation: Optical Twizers and Traps |
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164 | (1) |
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5.4 Opto-Thermal Actuators: Gas Expansion |
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165 | (4) |
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169 | (1) |
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170 | (6) |
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5.6.1 Waveguide Formation |
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170 | (5) |
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5.6.2 Anti-resonant Reflecting Optical Waveguides |
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175 | (1) |
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176 | (3) |
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Chapter 6 Mechanical and Acoustic Microactuators and Micropumps |
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179 | (18) |
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179 | (1) |
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6.2 Solid Links and Other Mechanism |
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179 | (5) |
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6.2.1 Deformable Links and Levers |
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180 | (2) |
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182 | (1) |
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6.2.3 Bistable Diaphragms and Structures |
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183 | (1) |
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6.3 Ultrasonic and Acoustic Microactuators |
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184 | (9) |
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6.3.1 Ultrasonic Microcutter |
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184 | (1) |
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6.3.2 Bulk Acoustic Wave Pumps |
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185 | (2) |
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187 | (1) |
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6.3.4 Bulk Acoustic Wave Pumps |
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188 | (1) |
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6.3.5 Flexural and Lamb Wave Actuators and Pumps |
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188 | (1) |
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6.3.6 Surface Acoustic Wave Actuators and Pumps |
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189 | (4) |
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6.4 Fluidic Switches and Amplifiers |
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193 | (1) |
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194 | (3) |
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Chapter 7 Chemical and Biological Microactuators |
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197 | (22) |
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197 | (1) |
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7.2 Conversion of Chemical Reactions to Electrical and Mechanical Energies |
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197 | (5) |
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7.2.1 Operation of Batteries |
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197 | (1) |
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7.2.2 Chemical Reactions in Microactuators |
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198 | (2) |
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7.2.3 Chemical Reactions in Living Organisms |
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200 | (2) |
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7.2.3 Chemical Reactions in Man-made Engines |
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202 | (1) |
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7.3 Biological Actuators: Muscle and Locomotion |
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202 | (8) |
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7.3.1 Locomotion and Mechanical Work in Biological Systems |
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202 | (2) |
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7.3.2 Different Types of Muscle |
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204 | (1) |
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7.3.3 Skeletal Muscle Structure and Work Cycle |
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205 | (5) |
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7.4 Chemical Jet in Beetles |
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210 | (3) |
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211 | (1) |
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7.4.2 Surfactant Swimming |
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212 | (1) |
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213 | (1) |
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7.5 Combustion Engine: MEMS Microengines |
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213 | (1) |
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7.6 Conducting Polymer Actuators |
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214 | (1) |
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214 | (3) |
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217 | (2) |
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Chapter 8 Smart Structures |
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219 | (60) |
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219 | (2) |
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221 | (1) |
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222 | (19) |
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8.3.1 Electrical Sensing Means |
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223 | (8) |
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8.3.2 Magnetic Field Methods |
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231 | (1) |
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232 | (9) |
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241 | (17) |
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8.4.1 Electrical Gas and Chemical Sensors |
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243 | (3) |
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8.4.2 Guided-Optics Intrinsic Chemical Sensors |
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246 | (4) |
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8.4.3 Extrinsic Chemical Sensors |
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250 | (1) |
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8.4.4 Polymer Waveguide Chemical Sensors |
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251 | (1) |
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8.4.5 Surface Plasmon Chemical Sensors |
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252 | (1) |
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8.4.6 Indicator-Mediated Extrinsic Sensing |
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253 | (3) |
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256 | (1) |
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8.4.8 Ultrasonic Gas and Chemical Sensors |
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257 | (1) |
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8.4.9 Intelligent Sensors |
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258 | (1) |
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8.5 Connections/Links and Wiring |
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258 | (5) |
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260 | (2) |
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8.5.2 Requirement on the Processing Unit/Intelligence |
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262 | (1) |
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263 | (1) |
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8.7 Signal Processing/Computing |
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264 | (10) |
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8.7.1 Implicit Computation |
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266 | (1) |
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8.7.2 Explicit Computation |
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267 | (7) |
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274 | (5) |
Subject Index |
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279 | |