Preface |
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xi | |
1. An Introduction to Microscopy |
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1 | (26) |
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1.1 Limitations of the Human Eye |
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2 | (3) |
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1.2 The Light-Optical Microscope |
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5 | (4) |
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9 | (2) |
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1.4 The Transmission Electron Microscope |
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11 | (6) |
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1.5 The Scanning Electron Microscope |
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17 | (2) |
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1.6 Scanning Transmission Electron Microscope |
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19 | (2) |
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1.7 Analytical Electron Microscopy |
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21 | (1) |
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1.8 Scanning-Probe Microscopes |
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21 | (6) |
2. Electron Optics |
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27 | (30) |
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2.1 Properties of an Ideal Image |
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27 | (3) |
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2.2 Imaging in Light Optics |
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30 | (4) |
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2.3 Imaging with Electrons |
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34 | (7) |
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2.4 Focusing Properties of a Thin Magnetic Lens |
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41 | (2) |
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2.5 Comparison of Magnetic and Electrostatic Lenses |
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43 | (1) |
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2.6 Defects of Electron Lenses |
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44 | (13) |
3. The Transmission Electron Microscope |
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57 | (36) |
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58 | (9) |
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3.2 Electron Acceleration |
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67 | (3) |
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3.3 Condenser-Lens System |
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70 | (5) |
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75 | (3) |
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78 | (10) |
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88 | (5) |
4. TEM Specimens and Images |
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93 | (32) |
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4.1 Kinematics of Scattering by an Atomic Nucleus |
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94 | (2) |
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4.2 Electron-Electron Scattering |
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96 | (1) |
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4.3 The Dynamics of Scattering |
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97 | (4) |
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4.4 Scattering Contrast from Amorphous Specimens |
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101 | (5) |
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4.5 Diffraction Contrast from Polycrystalline Specimens |
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106 | (2) |
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108 | (1) |
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4.7 Electron-Diffraction Patterns |
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108 | (4) |
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4.8 Diffraction Contrast within a Single Crystal |
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112 | (3) |
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4.9 Phase Contrast in the TEM |
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115 | (4) |
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4.10 TEM Specimen Preparation |
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119 | (6) |
5. The Scanning Electron Microscope |
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125 | (30) |
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5.1 Operating Principle of the SEM |
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125 | (4) |
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5.2 Penetration of Electrons into a Solid |
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129 | (2) |
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5.3 Secondary-Electron Images |
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131 | (6) |
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5.4 Backscattered-Electron Images |
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137 | (2) |
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5.5 Other SEM Imaging Modes |
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139 | (4) |
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5.6 SEM Operating Conditions |
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143 | (4) |
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5.7 SEM Specimen Preparation |
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147 | (2) |
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5.8 The Environmental SEM |
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149 | (2) |
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5.9 Electron-Beam Lithography |
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151 | (4) |
6. Analytical Electron Microscopy |
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155 | (22) |
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6.1 The Bohr Model of the Atom |
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155 | (3) |
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6.2 X-ray Emission Spectroscopy |
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158 | (3) |
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6.3 X-Ray Energy-Dispersive Spectroscopy |
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161 | (4) |
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6.4 Quantitative Analysis in the TEM |
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165 | (2) |
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6.5 Quantitative Analysis in the SEM |
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167 | (1) |
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6.6 X-Ray Wavelength-Dispersive Spectroscopy |
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167 | (2) |
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6.7 Comparison of XEDS and XWDS Analysis |
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169 | (2) |
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6.8 Auger Electron Spectroscopy |
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171 | (1) |
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6.9 Electron Energy-Loss Spectroscopy |
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172 | (5) |
7. Recent Developments |
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177 | (14) |
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7.1 Scanning Transmission Electron Microscopy |
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177 | (3) |
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7.2 Aberration Correction |
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180 | (2) |
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7.3 Electron-Beam Monochromators |
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182 | (2) |
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184 | (4) |
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7.5 Time-Resolved Microscopy |
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188 | (3) |
Appendix: Mathematical Derivations |
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191 | (4) |
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191 | (2) |
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A.2 Impact Parameter in Rutherford Scattering |
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193 | (2) |
References |
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195 | (2) |
Index |
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197 | |