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Practical Optical Dimensional Metrology [Pehme köide]

  • Formaat: Paperback / softback, 228 pages, kaal: 413 g
  • Sari: Tutorial Texts
  • Ilmumisaeg: 30-Jan-2019
  • Kirjastus: SPIE Press
  • ISBN-10: 1510622934
  • ISBN-13: 9781510622937
Teised raamatud teemal:
Practical Optical Dimensional MetrologySuurem pilt
  • Formaat: Paperback / softback, 228 pages, kaal: 413 g
  • Sari: Tutorial Texts
  • Ilmumisaeg: 30-Jan-2019
  • Kirjastus: SPIE Press
  • ISBN-10: 1510622934
  • ISBN-13: 9781510622937
Teised raamatud teemal:
Püsilink: https://www.kriso.ee/db/9781510622937.html
Märksõnad:
Combining the literature and his own experience with optical dimensional metrology, Harding offers practical advice on how to select and use different techniques to measure various dimensions of optics. He begins with basic, working explanations of how each of the optical measurement methods works. Then he moves to applications, explaining assumptions and suggesting methods for measurement from the relatively coarse centimeter scale down to very fine nanometer scale. Subsequent chapters survey such aspects as optimizing the measurement of gaps, three-dimensional metrology for printed electronics, and industrial surface finish method comparison for fine finish measurements. Annotation ©2019 Ringgold, Inc., Portland, OR (protoview.com)
Preface xi
1 Introduction to Metrology
1(6)
1.1 Basic Terms
1(2)
1.2 Methods of Optical Metrology
3(2)
References
5(2)
2 Light-Intensity-based Metrology
7(16)
2.1 Light, Optics, and Machine Vision Technology
7(13)
2.1.1 Lighting methods for machine vision
9(3)
2.1.2 Optical components for machine vision
12(8)
2.2 Where to Use Intensity-based Methods
20(1)
2.3 Sources of Errors
20(1)
References
20(3)
3 Triangulation and Shift-based Metrology
23(32)
3.1 Stereo Imaging
23(3)
3.1.1 Photogrammetry
23(2)
3.1.2 Optical flow
25(1)
3.2 Active Triangulation
26(6)
3.2.1 Point gages
26(3)
3.2.2 Structured-line-of-light gages
29(2)
3.2.3 Line triangulation gage limitations
31(1)
3.3 3D Phase-based Measurements
32(19)
3.3.1 Phase shift analysis
32(4)
3.3.2 Structured-light triangulation
36(1)
3.3.3 Triangulation gage pros and cons
37(1)
3.3.4 Moire contouring
38(4)
3.3.4.1 Moire contouring pros and cons
42(1)
3.3.5 Interferometry (laser- or white-light-based)
43(5)
3.3.5.1 Interferometry pros and cons
48(1)
3.3.6 Holography (including shearography and speckle methods)
48(3)
3.3.6.1 Holography and speckle pros and cons
51(1)
3.4 Summary of Triangulation and Phase Shift Methods
51(1)
References
51(4)
4 Focus-based Optical Metrology
55(28)
4.1 Introduction to Focus-based Methods
55(2)
4.2 Point-based Distance Measurement
57(13)
4.2.1 Conoscopic imaging
57(2)
4.2.1.1 Conoscopic sensor pros and cons
59(2)
4.2.2 Confocal imaging
61(4)
4.2.2.1 Confocal imaging pros and cons
65(1)
4.2.3 Chromatic confocal imaging
66(3)
4.2.3.1 Chromatic confocal method pros and cons
69(1)
4.3 Area-based Focus Metrology Methods
70(10)
4.3.1 Depth from focus
71(2)
4.3.2 Structured-pattern, focus-based methods
73(2)
4.3.2.1 Depth from focus pros and cons
75(1)
4.3.3 Depth from defocus
76(2)
4.3.3.1 Depth from defocus pros and cons
78(1)
4.3.4 Image-focus-based measurement method summary
79(1)
4.4 Focus-based Metrology Summary
80(1)
References
80(3)
5 Light-Characteristic-based Dimensional Measurements
83(14)
5.1 Introduction to Light Characteristics
83(2)
5.2 Polarization-based Dimensional Metrology
85(6)
5.2.1 Ellipsometry
86(2)
5.2.1.1 Ellipsometry limitations
88(1)
5.2.2 Photo-elastic methods
88(1)
5.2.2.1 Photo-elasticity pros and cons
89(1)
5.2.3 Pixelated polarization masks
90(1)
5.2.3.1 Pixelated polarization mask pros and cons
91(1)
5.3 Light-Scatter-based Measurements
91(2)
5.3.1 Light scattering pros and cons
93(1)
5.4 Color-based Measurements
93(1)
5.4.1 Color-based measurement pros and cons
94(1)
References
94(3)
6 Portable and Hybrid Gages
97(20)
6.1 Introduction to Portable and Hybrid Gages
97(1)
6.2 Measurement of Large Structures
98(9)
6.2.1 Point trackers
99(2)
6.2.1.1 Point tracker pros and cons
101(1)
6.2.2 Handheld area scanners
102(2)
6.2.2.1 Handheld area scanner pros and cons
104(1)
6.2.3 Laser radar
104(3)
6.2.3.1 Laser radar pros and cons
107(1)
6.3 Measurement of Mid- to Large-Size Durable Assets
107(5)
6.3.1 Laser-based tracker systems
108(1)
6.3.1.1 Laser-based tracker system pros and cons
109(1)
6.3.2 Robot/gantry-mounted scanners
110(1)
6.3.2.1 Robot/gantry-mounted scanner pros and cons
111(1)
6.4 High-Precision Hybrid Systems
112(2)
6.5 Summary of Hybrid Gages
114(1)
References
114(3)
7 Finding the Right Technology for the Application
117(22)
7.1 Introduction
117(2)
7.2 Low-Precision Applications <10 mm
119(3)
7.2.1 Limitations of low-precision optical methods
120(2)
7.3 Large Objects and Assemblies <1 mm
122(3)
7.3.1 Limitations of large-part optical methods
123(2)
7.4 General Manufacturing Applications <0.1 mm
125(3)
7.4.1 Limitations of general manufacturing optical methods
126(2)
7.5 Precision Manufactured Parts <0.01 mm
128(3)
7.5.1 Limitations of method for precision manufactured parts
128(3)
7.6 Micro-feature Metrology <0.001 mm
131(3)
7.6.1 Limitations of micro-feature metrology methods
131(3)
7.7 Nano-features <0.0001 mm
134(3)
7.7.1 Limitations of nano-feature metrology methods
134(3)
7.8 Summary of Application Comparisons
137(2)
8 Part Location
139(18)
8.1 Part Location Applications
139(1)
8.2 Large Parts Measured to <10-mm Resolution
140(6)
8.2.1 Machine vision
141(1)
8.2.2 Stereo imaging
142(1)
8.2.3 Triangulation laser line
143(2)
8.2.4 Phase shift 3D
145(1)
8.2.5 Laser radar
146(1)
8.2.6 Large-part pickup summary
146(1)
8.3 Composite Layup Monitoring
146(8)
8.3.1 Lighting enhancement methods
148(2)
8.3.2 Structured light
150(4)
8.3.3 Tape layup summary
154(1)
8.4 Part Location Summary of Options
154(1)
References
154(3)
9 Optimized Measurement of Gaps
157(16)
9.1 The Application <0.1 mm
157(3)
9.2 Elimination of Methods that Are Not Suitable
160(1)
9.3 Laser Line Triangulation
161(1)
9.4 3D Triangulation
162(1)
9.5 Chromatic Confocal Method
163(1)
9.6 Comparison Tests
164(3)
9.7 Comparison of Methods
167(4)
9.8 Summary of Options
171(1)
References
171(2)
10 Measurement of Small Holes
173(12)
10.1 The Application <0.01 mm
173(1)
10.2 Laser Line Structured Light (Static)
174(2)
10.3 Scanning-Laser-Line or Multiple-Laser-Line Probe
176(1)
10.4 Phase-Shifted Structured Light
176(1)
10.5 Conoscopic Point Probe
177(2)
10.6 Confocal Point Probe
179(1)
10.7 Digital Optical Comparator (2D)
180(2)
10.8 Depth from Focus Microscopy
182(1)
10.9 Depth from Defocus Microscopy
183(1)
10.10 Summary of Options
183(1)
References
184(1)
11 Three-Dimensional Metrology for Printed Electronics
185(12)
11.1 The Application <0.001 mm
185(1)
11.2 Laser Line Structured Light (Static)
186(2)
11.3 Phase-Shifted Structured Light
188(2)
11.4 Confocal Point Probes
190(1)
11.5 Depth from Focus or Defocus Microscopy
191(1)
11.6 Artifact-based Verification
192(1)
11.7 Conclusions
193(1)
References
194(3)
12 Industrial Surface Finish Method Comparison for Fine Finish Measurements
197(16)
12.1 The Application <0.0001 mm
197(2)
12.2 Interferometry
199(2)
12.3 Focus-based Systems
201(2)
12.4 Confocal Systems
203(3)
12.5 Scatter-based Systems
206(2)
12.6 Comparison of Methods
208(1)
12.7 Summary of Options
209(1)
References
210(3)
Index 213