| Preface |
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v | |
| Organization Committee |
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vi | |
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Electroformed Diamond Tool Adaptable to Nanometer Grinding of Cemented Carbide |
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1 | (6) |
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Tool Deflection Modeling in Ball-End Milling of Sculptured Surface |
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7 | (6) |
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Multiscale Modeling Study on the Nanometric Cutting Process of CaF2 |
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13 | (6) |
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Ion Beam Figuring System for Ultra-Precise Optics |
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19 | (6) |
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Fabrication of PDMS Nano-Stamp by Replicating Si Nano-Moulds Fabricated by Interference Lithography |
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25 | (5) |
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Cu-Direct Laser Drilling of Blind Via-Hole in Multi-Layer PWBs: Process Visualization Using High-Speed Camera Images |
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30 | (6) |
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Investigation on Micro-Machining Characteristics and Phenomenon of Semiconductor Materials by Harmonics of Nd:YAG Laser |
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36 | (6) |
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Ultra Precision Machining of the Winston Cone Baffle for Space Observation Camera |
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42 | (6) |
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A Development of Dispenser for High-Viscosity Liquid and Pick and Place of Micro Objects Using Capillary Force |
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48 | (6) |
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Fabrication of Fine Mesh Filter Screen with Pulsed Laser |
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54 | (6) |
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Self-Assembly of Functional Particles on Optical Element for Sensitivity Improvement of Biochemical Sensor |
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60 | (6) |
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Development of CAPP/CAM System for Ultraprecision Micromachining - Process Planning Considering Setting Error |
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66 | (7) |
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Optimization of Nozzle Flushing Method for Smooth Debris Exclusion in Wire EDM |
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73 | (6) |
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Experimental Research on Smooth Surface Polishing Based on the Cluster Magnetorheological Effect |
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79 | (5) |
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Structural Effect of PVA Brush Nodule on Particle Removal Efficiency during Brush Scrubber Cleaning |
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84 | (6) |
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Trapping of Nano-Particles Using a Near-Field Optical Fiber Probe |
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90 | (6) |
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Determination Method of Locations and Postures of Cutting Tool for 5-Axis Machining Based on Intuition and Minimum Cusp Height |
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96 | (6) |
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Integrated Development of a Modularized ECM Manufacturing System Based on the Reconfigurable Manufacturing System Concept |
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102 | (6) |
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Back-Side Thinning of Silicon Carbide Wafer by Plasma Etching Using Atmospheric-Pressure Plasma |
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108 | (5) |
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Estimation System of Accurate Cutting Time Based on Actual Feedrate Identification |
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113 | (6) |
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Smoothing Mechanism of Reaction Sintered SiC in Plasma Assisted Polishing Using Ceria Abrasive |
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119 | (6) |
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Evaluation of Surface Roughness in High-Speed Shaping of Ni-P |
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125 | (5) |
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Selective Cell-Adhesion on Micro-Structured Fine Particles |
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130 | (6) |
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Development of a 3-DOF Mobile Positioning Mechanism with 6 Contact Points |
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136 | (6) |
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Application of 3D-CAD Random Model to Prediction of Ground Surfaces by Helical Scan Grinding |
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142 | (6) |
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EDM Properties of EC-PCD Manufactured Using Electrically Conductive Diamond Particles |
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148 | (6) |
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Development of a Feed Drive Simulator |
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154 | (6) |
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Increase in the Area of Structured Surface and its Effect on Sensitivity Improvement of Biochemical Sensing |
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160 | (6) |
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Robust Production Scheduling Using Autonomous Distributed Systems |
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166 | (4) |
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3D FEM Simulation of Micro Cutting for Prism Patterning on Nickel Plated Roll Die Using Lagrangian Method |
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170 | (6) |
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5-Axis Control Dexterous Ultraprecision Micromilling of Ruled Surface with Side Cutting Edge |
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176 | (5) |
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Research on the Support and Gravitational Deformation of Large Aperture Primary Mirror of Space Telescopes |
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181 | (5) |
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Chemical and Morphological Analysis of 4H-SiC Surface Processed by Plasma Assisted Polishing |
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186 | (6) |
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Characteristics of Excimer Laser Ablation for Three Dimensional Machining of PMMA |
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192 | (6) |
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Linewidth Enhancement in Direct Laser Writer by Using an Interference Phenomenon |
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198 | (5) |
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Study on Thermal and Strain Behaviour in Selective Laser Sintering Process |
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203 | (6) |
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Stress Analysis on Cannonballs during Collision onto Sea Surface |
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209 | (6) |
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Binder-Free Green Composite Using Bamboo Fibres Extracted with a Machining Centre: Influence of Moisture Absorption on Mechanical Properties |
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215 | (7) |
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Basic Performance Evaluation of Electro-Adhesive Film with Micro Mesh Sheet |
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222 | (6) |
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Development of Bridge Tooling for Fabricating Mold Inserts of Aspheric Optical Lens |
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228 | (6) |
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Investigation of Synchronous Accuracy of Dual Arm Motion of Industrial Robot |
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234 | (6) |
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Improvement of Grooving Performance of the Dicing Blade by Film Reinforcement |
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240 | (5) |
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Micro EDM by Stray-Capacitance-Coupled Electric Feeding |
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245 | (6) |
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Development of Focusing System for X-Ray Free Electron Laser |
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251 | (6) |
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Ultra Precision Grinding of Wafer Scale |
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257 | (6) |
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Study of Metals by Femtosecond Laser Processing for Electro-Optics Applications |
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263 | (6) |
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Experimental and Numerical Analysis of Polymer Deformation in Thermal Nanoimprint Lithography |
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269 | (6) |
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Experimental Verification of Machining Process of Ultrasonic Drilling |
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275 | (6) |
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Nano-Motion X-Y Stage by Pneumatic Servo Spherical Bearing Actuators |
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281 | (6) |
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New Tool Concepts for Ultra-Precision Grinding |
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287 | (6) |
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Chip Formation in Ultra-Precision Machining of Nitrocarburized Steels |
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293 | (6) |
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Investigation of Electrical Characteristics of Gold Nanowire under Tensile Test |
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299 | (6) |
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Design and Manufacture of Light Collimator with Narrow View Angle |
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305 | (6) |
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Study on Effect of Ultrasonic Vibration in Machining of Alumina Ceramic |
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311 | (6) |
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Development of a Magnified Mechanism for Fast Tool Servo System |
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317 | (4) |
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Development of Composite Abrasives for Various Materials |
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321 | (5) |
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Development of Novel Polishing System by Use of Acoustic Trap |
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326 | (6) |
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Design of Digital Filters for Si Wafer Surface Profile Measurement - Denoising by Total Variation |
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332 | (5) |
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Development of Operation Interface for Machine Tool Using 6-DOF Haptic Device - Guidance of Tool Movement Using Force Sense |
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337 | (6) |
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Binocular Robot Vision with Active Viewpoint for Sphere Measurement |
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343 | (6) |
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Study on Machining Accuracy in Micro-Endmilling |
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349 | (6) |
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Research on Removal Characteristic of the Optical Quartz with Atmospheric Pressure Plasma Jet |
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355 | (6) |
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Noncontact Figuring of Millimeter-Thick Elliptical Mirror Substrate by Numerically Controlled Local Wet Etching |
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361 | (6) |
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Investigation for High Speed Ultrasonic Cutting of Aluminum Alloy |
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367 | (6) |
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Design and Analysis of a Novel Sensing Cutting Tool for Precision Turning |
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373 | (5) |
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Correcting Distortion of Elliptical Trajectory for Maximizing Cutting Performance in Elliptical Vibration Cutting |
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378 | (6) |
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Modeling and Analysis of Material Removal Characteristics in Silicon Wafer Double Side Polishing |
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384 | (6) |
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Analysis of Tangential Position Error or Removal Function Error in Ultrasonic-Magnetorheological Combined Finishing |
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390 | (6) |
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Nanomanipulator Based on a High-Speed Atomic Force Microscopy |
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396 | (6) |
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Intelligent Fuzzy Ziegler-Nichols-Based Controller Design of a SPM System with Parameters Variation |
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402 | (6) |
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Single Point Diamond Turning of Calcium Fluoride Optics |
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408 | (6) |
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Fabrication of Freeform Micro Optics by Focused Ion Beam |
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414 | (6) |
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Kinematics and Dexterity Analysis for a Novel Hybrid Kinematic Machine |
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420 | (6) |
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Roll Stability Recovery Performance of Underwater Bluff-Body with Tilting Angle Variations |
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426 | (5) |
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Lubricated Friction Reduction by Spiral-Groove-Shape Nano-Texturing |
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431 | (6) |
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Ultrasonic Assisted Diamond Turning of Hardened Steel for Mould Manufacturing |
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437 | (6) |
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Research of a Novel Combined Metal-Fused Silica Resonator for Cylinder Shell Vibrating Gyroscopes |
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443 | (4) |
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A Novel Fabrication Process of Large Area Triangular Nanocavity Arrays by Bilayer Nanosphere Lithography |
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447 | (5) |
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Surface Observation of 4H-SiC (0001) Planarized by Catalyst-Referred Etching |
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452 | (5) |
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Finite Element Analysis of External, Middle and Inner Ear under Loads through Temporomandibular Joint |
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457 | (6) |
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Novel Diaphragm-Control Restrictor for Precision Hydrostatic-Bearing Spindle |
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463 | (6) |
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Precise and High Response Measuring Method of Meshing Force of Planetary Gear Mechanism |
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469 | (6) |
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Gloss Estimating Method of Finished Surface Machined by Ball Nose End-Milling under Constant Contact Angle with a Five-Axis Controlled Machining Center |
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475 | (6) |
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Simulation of Ultra-Precision Machining for Microstructured Surface Based on FTS |
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481 | (6) |
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Surface Polishing of 2-Inch 4H-SiC Wafer Using Fe Abrasive Particles |
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487 | (5) |
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Shape Reproduction of Object with Many-Colored Surface by Photometric Stereo Method |
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492 | (6) |
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A Study on Pulse Generator for Micro WEDM of Polycrystalline Diamond |
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498 | (6) |
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The Improvement of Removal Function in Local Wet Etching by Using Eccentric Rotation System |
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504 | (6) |
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Investigation of Rotational-Axis and Linear-Axis Operation Based on Power Consumption with Desktop Five-Axis Controlled Machine Tools |
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510 | (6) |
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Small Holes Fabrication on Soda Glass by Self-Elastic Polycrystalline Diamond Tool |
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516 | (6) |
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A Study on Surface Roughness of Curved Silicon Crystal Spectrometer Fabricated by Plasma Chemical Vaporization Machining |
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522 | (5) |
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A Geometry-Based Method for Prediction of Shot-Peening Coverage |
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527 | (6) |
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Remote Internal Diameter Measurement of Ring Gauge Based on a Low-Coherence Tandem Scheme |
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533 | (6) |
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Autonomous Decentralized FMS and Its Efficient AGVs Control |
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539 | (6) |
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Finite Element Analysis on a 250 kN.m-Type Rotary Drilling Rig for Foundation of Geological Construction |
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545 | (6) |
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Study on the Effect of Rake Angle on Cutting Forces in Ultra-Precision Machining |
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551 | (6) |
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Experimental Research on Adjusting Cell Position and Orientation with Micro-Fluid |
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557 | (6) |
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Theoretical Study of Optical Vibration and Circulation of a Microsphere |
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563 | (6) |
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Micro Polishing of Tungsten Carbide Using Magnetostrictive Vibrating Polisher |
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569 | (6) |
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Relationship between Thermal Influence and Magnetic Characteristics in Electrical Discharge Machining of Magnetic Materials |
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575 | (5) |
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Laser Trapping Using a Fiber Axicon Microlens |
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580 | (5) |
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Chemically Etched Single Mode Fiber Tip for High Lateral Resolution Imaging in Optical Coherence Tomography |
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585 | (6) |
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Micro-Ball Endmilling of Tungsten Carbide for Micro-Molding and Prototyping Applications |
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591 | (4) |
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Study on Tool-Path Generation for Ultra-Precision Machining of Optical Lens Array |
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595 | (5) |
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Development, Integration and Qualification of a Measurement System for Accurate and Fast Placements of Flipchips |
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600 | (6) |
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Development of a High-Speed Nanoprofiler Using Normal Vector Tracing |
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606 | (6) |
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Optical Fiber Oxygen Sensor Based on Ru (II) Complex and Porous Silica Nanoparticles Embedded in Sol-Gel Matrix |
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612 | (6) |
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Research on Unbalance Signal Extraction under the Constraints of Low Operation Speed and Limited Acquisition Time |
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618 | (6) |
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Optimal Design of Microneedlcs Inserts into Skin by Numerical Simulation |
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624 | (5) |
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High Precision Grinding of Large Fresnel Lens Mold |
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629 | (5) |
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3D FE-Based Modelling and Simulation of the Micro Milling Process |
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634 | (6) |
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Generation and Control of Wide-Field Three-Dimensional Structured Illumination for Advanced Microscopic Imaging |
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640 | (5) |
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Nonlinear Dynamics of Tool Vibration in Micro-Cutting |
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645 | (6) |
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Cutting Characteristics of Lanthanum Base Metallic Glass in Single Point Diamond Turning |
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651 | (6) |
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| Keyword Index |
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657 | (6) |
| Author Index |
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663 | |
