| Basic Principals of the RF Capacitive Discharge | |
| Excitation of an RF Discharge | |
| Electron Motion in an Oscillating Electric Field | |
| Electrodynamic Plasma Characteristics and Interaction with Oscillating Field | |
| Electron Production and Loss: Plasma Maintenance | |
| A Simplified Model of the RF Discharge | |
| Constant Positive Plasma Potential | |
| Stochastic Heating of Electrons | |
| RF Discharge Modes | |
| Moderate-Pressure RF Discharge | |
| Space Charge Sheaths | |
| Experimental Current-Voltage Characteristics | |
| CVC and Normal Current Densities in the a-Discharge (Theory and Numerical Simulation) | |
| The a-g Transition Parameters | |
| The y-Discharge | |
| The a-g Transition at Moderate and Low Pressures | |
| Coexistence of Two RF Modes in the Gap | |
| High-Pressure RF Capacitive Discharges | |
| RF Discharge with Coated Electrodes | |
| Low-Pressure RF Discharges and Asymmetry Effects | |
| Self-Bias in an Asymmetric Capacitively Coupled Discharge | |
| Correlations Between Plasma and Sheath Parameters in an Ambipolar Diffusion-Controlled Discharge | |
| Sheath Dynamics and Current Anharmonicity in an Asymmetric Discharge | |
| Current Anharmonicity in Asymmetric and Symmetric Discharges | |
| Battery Effect in an Asymmetric Discharge | |
| Plasma 'Nontransparency' and Fast Electron Response to RF Field and 'Oscillationless' Sheath Ions | |
| The Floating Potential | |
| The a-Sheath | |
| The Energy Spectrum of Ions Bombarding the Electrode Surface | |
| RF Discharge in Electronegative Gases | |
| Smooth a-g Transition and the g Mode | |
| Some Aspects of Stochastic Heating of Electrons | |
| Numerical Simulation of Low-Pressure RF Discharges | |
| Magnetron RF Discharge | |
| Experimental Methods and Measurements | |
| Voltage Measurements and Current-Voltage Characteristics | |
| Probe Measurement of Constant Space and Plasma Potentials | |
| Active DC Probing of an RF Discharge | |
| A Method for Studying the Transverse Discharge Structure | |
| Optical Methods for the Study of Spatial Discharge Structure | |
| Laser-Induced Fluorescence and Laser-Optogalvanic Spectroscopy | |
| Excitation and Control of an RF Discharge | |
| Application of RF Capacitive Discharges for Gas Laser Excitation and Plasma Technology | |
| RF Discharge and Gas Lasers: A Brief History | |
| Arguments in Favor of RF Laser Excitation | |
| Frequency Dependence of Discharge and Active Laser Medium Parameters | |
| Selection of Designs and Parameters of Transverse RF-Excited CO2 Lasers with Diffusional Cooling | |
| Optical Resonators of Waveguide and Slab RF CO2 Lasers | |
| High Flowrate CO2 Lasers Excited by RF and Combined RF-DC Discharges | |
| Lasers with Alternative Active Media | |
| Magnetic Stabilization of Slab Discharges | |
| Plasmachemical Technology | |
| References | |
| Index |
