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Stress Management for 3D ICS Using Through Silicon Vias 2011 ed. [Pehme köide]

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Scientist and engineers as well as graduate students in the fields of This conference will be of interest to anyone involved in Physics, Electrical Engineering, Materials Science and Engineering, Reliability and Quality Management, both in industry and academia. One current challenge to micro- and nanoelectronics is the understanding of stress-related phenomena in 3D IC integration. Stresses arising in 3D TSV interconnects and in the surrounding materials due to thermal mismatch, microstructure changes or process integration can lead to performance reduction, reliability-limiting degradation and failure of microelectronic products. Understanding stress-related phenomena in new materials used for 3D integration and packaging, particularly using through silicon vias and microbumps, is critical for future microelectronic products. Management of mechanical stress is one of the key enablers for the successful implementation of 3D-integrated circuits using through silicon vias (TSVs). The potential stress-related impact of the 3D integration process on the device characteristics must be understood and shared, and designers need a solution for managing stress. The Proceedings summarize new research results and advances in basic understanding of stress-induced phenomena in 3D IC integration. Modelling and simulation capabilities as well as materials characterization are demonstrated to evaluate the effect of stress on product performance.
Preface 1(4)
WHITE PAPERS
TechTuning: Stress management for 3D Through-Silicon-Via stacking technologies
5(16)
Riko Radojcic
Matt Nowak
Mark Nakamoto
Multi-scale environment for simulation and materials characterization in stress management for 3D IC TSV-based technologies---Effect of stress on the device characteristics
21(32)
Valeriy Sukharev
Ehrenfried Zschech
MULTI-SCALE MODELING
3D TCAD modeling for stress management in Through Silicon Via (TSV) stacks
53(14)
Xiaopeng Xu
Aditya Karmarkar
Characterization of deformation properties of metals in 3D ICs
67(12)
Olaf Wittler
Raul Mroßko
Saskia Huber
Lukasz Dowhan
Klaus-Dieter Lang
MULTI-SCALE MATERIALS PARAMETERS
Determination of thermal and mechanical properties of packaging materials for the use in FEM-simulations
79(25)
Mike Roellig
Bjoern Boehme
Karsten Meier
Rene Metasch
Multi-scale mechanical probing techniques to investigate the stability of BEOL layer stacks with sub-100nm structures
104(17)
Holm Geisler
Matthias U. Lehr
Alexander Platz
Ulrich Mayer
Petra Hofmann
Hans-Jurgen Engelmann
Nanoindentation study of elastic anisotropy of Cu single crystals and grains in TSVs
121(10)
Kong Boon Yeap
Ude D. Hangen
Dierk Raabe
Ehrenfried Zschech
MULTI-SCALE STRESS CHARACTERIZATION
X-ray strain measurements in strained silicon devices
131(7)
Alex Dommann
Antonia Neels
Raman spectroscopy analysis of mechanical stress near Cu-TSVs
138(15)
Ingrid De Wolf
TSV: PROCESS CHARACTERIZATION AND FAILURE ANALYSIS
Stress-induced delamination of through silicon via structures
153(15)
Suk-Kyu Ryu
Kuan-Hsun Lu
Jay Im
Rui Huang
Paul S. Ho
NanoXCT---A high-resolution technique for TSV characterization
168(7)
Sven Niese
Peter Krueger
Ehrenfried Zschech
Author Index 175