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Surface Processing: Laser, Lamp, Plasma, Volume 82 [Kõva köide]

Edited by (University College London, UK), Edited by (Germany), Edited by (Groupe de Physique des Solides, Universités Paris VII and Paris VI, Paris, France)
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Surface Processing: Laser, Lamp, Plasma, Volume 82Suurem pilt
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Püsilink: https://www.kriso.ee/db/9780080436104.html
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This book contains both the invited and the contributed papers presented at the Symposium "Surface Processing: Laser, Lamp, Plasma" held during the annual Spring Meeting of the European Materials Research Society in Strasbourg, France, June 16-19 1998. Surface processing of materials using laser, lamp or plasma is one of the most active fields of research in Europe and, as such, requires to be periodically reviewed at International Conference level.
This year, the expanded surface processing symposium lasted for 3.5 days and, as an international forum, addressed not only fundamental questions in the field but also progress and new perspectives in various applications.
The major subjects discussed during the meeting included fundamental process studies, modelling of growth mechanisms and surface modification, characterization of synthesised or modified materials, material modification at a nanometric scale, development of in-situ analytical techniques and applications towards device fabrication.
About 200 papers were presented by some 120 participants.


This book contains both the invited and the contributed papers presented at the Symposium "Surface Processing: Laser, Lamp, Plasma" held during the annual Spring Meeting of the European Materials Research Society in Strasbourg, France, June 16-19 1998. Surface processing of materials using laser, lamp or plasma is one of the most active fields of research in Europe and, as such, requires to be periodically reviewed at International Conference level.

This year, the expanded surface processing symposium lasted for 3.5 days and, as an international forum, addressed not only fundamental questions in the field but also progress and new perspectives in various applications.

The major subjects discussed during the meeting included fundamental process studies, modelling of growth mechanisms and surface modification, characterization of synthesised or modified materials, material modification at a nanometric scale, development of in-situ analytical techniques and applications towards device fabrication.

About 200 papers were presented by some 120 participants.
Preface vii Conference Organization viii Size, shape anisotropy, and distribution of Cu nanocrystals prepared by pulsed laser deposition 1(5) R. Serna C.N. Afonso J.M. Ballesteros A. Naudon D. Babonneau A.K. Petford-Long Work function variation during UV laser-induced oxide removal 6(6) C.S. Beleznai D. Vouagner J.P. Girardeau-Montaut Spatio-energetical characteristics of laser plasma in cross-beam pulsed laser deposition 12(5) A. Tselev A. Gorbunov W. Pompe In-situ monitoring by reflective high energy electron diffraction during pulsed laser deposition 17(7) D.H.A. Blank G.J.H.M. Rijnders G. Koster H. Rogalla Laser-induced crystallization of amorphous silicon-carbon alloys studied by Raman microspectroscopy 24(5) C. Plama M.C. Rossi C. Sapia E. Bemporad Photodefined etching of n + layers diffused on p-type silicon substrates 29(6) R.S. Videria R.M. Gamboa J.M. Alves J.M. Serra A.M. Vallera Pulsed KrF laser annealing of RF sputtered ZnS:Mn thin films 35(5) E.A. Mastio W.M. Cranton C.B. Thomas E. Fogarassy S. de Unamuno Thickness dependent properties of La0.67Ca0.33MnO3 thin films 40(4) R.B. Praus B. Leibold G.M. Gross H.-U. Habermeier On the origin of the different velocity peaks of particles sputtered from surfaces by laser pulses or charged-particle beams 44(8) A. Miotello R. Kelly Expansion dynamics of Bi atoms produced by laser ablation of Bi and BGO targets 52(5) J. Gonzalo J.M. Ballesteros C.N. Afonso Chemical etching of thin SiOxCyHz films by post-deposition exposure to oxygen plasma 57(5) C. Vallee A. Granier K. Aumaille C. Cardinaud A. Goullet N. Coulon G. Turban Effects of plasma on excimer lamp based selective activation processes for electroless plating 62(6) D.J. Macauley P.V. Kelly K.F. Mongey G.M. Crean Pulsed laser deposition of multicomponent metal and oxide films 68(7) M. Ozegowski K. Meteva S. Metev G. Sepold Sensitized implantation of fluorescent molecules in a polymer film by near-infrared laser irradiation: comparison with direct ultraviolet-laser implantation 75(7) H. Fukumura H. Banjo H. Masuhara N. Ichinose S. Kawanishi Microprinting and microetching of diffractive structures using ultrashort laser pulses 82(5) I. Zergioti S. Mailis N.A. Vainos A. Ikiades C.P. Grigoropoulos C. Fotakis Photopolymerization by evanescent waves: characterization of photopolymerizable formulation for photolithography with nanometric resolution 87(6) A. Espanet G. Dos Santos C. Ecoffet D.J. Lougnot Modifications of polyether-etherketone surface after 193 nm and 248 nm excimer laser radiation 93(4) P. Laurens B. Sadras F. Decobert F. Arefi J. Amouroux Monte Carlo simulation of the laser-induced plasma-plume expansion under vacuum and with a background gas 97(5) F. Garrelie A. Catherinot Modeling of velocity and surface temperature of the moving interface during laser ablation of polyimide and poly(methyl methacrylate) 102(5) H. Schmidt J. Ihlemann K. Luther J. Troe Sub-micron grating formation in Ta2O5-waveguides by femotsecond UV-laser ablation 107(4) F. Beinhorn J. Ihlemann P. Simon G. Marowsky B. Maisenholder J. Edlinger D. Neuschafer D. Anselmetti High density plasma etching of NiFe, NiFeCo and NiMnSb-based multilayers for magnetic storage elements 111(6) K.B. Jung J. Hong H. Cho J.A. Caballero J.R. Childress S.J. Pearton M. Jenson A.T. Hurst Jr. Microstructure and X-ray analysis on LaCaMnO thin film 117(6) G.M. Gross R.B. Praus B. Leibold H.-U. Habermeier Utilisation of Cu(hfac)tmvs precursor gas in LCVD integrated circuit repair system 123(7) S. Leppavuori J. Remes H. Moilanen Excimer laser ablation of molten metals as followed by ultrafast photography 130(5) Z. Toth B. Hopp T. Smausz Z. Kantor F. Ignacz T. Szorenyi Z. Bor UV laser polishing of thick diamond films for IR Windows 135(5) S. Gloor W. Luthy H.P. Weber S.M. Pimenov V.G. Ralchenko V.I. Konov A.V. Khomich Laser cleaning of silicon surface with deposition of different liquid films 140(5) Y.F. Lu Y. Zhang Y.H. Wan W.D. Song Effects of cobalt thin films on the a-Si crystallisation induced by excimer laser irradiation 145(5) P. Mengucci G. Barucca E. DAnna M. Jergel S. Luby E. Majkova M. Martino Thin film deposition by magnetic field-assisted pulsed laser assembly 150(5) C. de Julian Fernandez J.L. Vassent D. Givord Nitriding with ion beam from Hall-type source 155(4) M. Bacal J.P. Peyre Laser-assisted CVD of boron carbide at atmospheric pressure 159(6) J.C. Oliveria P. Paiva M.N. Oliveria O. Conde Deposition of Teflon-polymer thin films by synchrotron radiation photodecomposition 165(4) T. Katoh Y. Zhang UV laser surface processing of metallic alloys: comparison of experimental and numerical results 169(5) G. Nicolas a. Yanez A. Ramil J.C. Alvarez E. Saavedra A. Garcia-Beltran C. Molpeceres M. Autric J.L. Ocana Excimer laser irradiation induced formation of diamond-like carbon layer on graphite 174(5) A. Mechler P. Heszler Z. Kantor T. Szorenyi Z. Bor Liquid crystal films grown by pulsed laser deposition 179(5) J. Gonzalo P.E. Dyer H.V. Snelling M. Hird Ion time-of-flight study of laser ablation of silver in low pressure gases 184(4) T.N. Hansen J. Schou J.G. Lunney Unusual growth of pulsed laser deposited bismuth films on Si(100) 188(7) A. Dauscher M.O. Boffoue B. Lenoir R. Martin-Lopez H. Scherrer Epitaxial MnO thin films grown by pulsed laser deposition 195(4) W. Neubeck L. Ranno M.B. Hunt C. Vettier D. Givord A new process to manufacture thin SiGe and SiGeC epitaxial films on silicon by ion implantation and excimer laser annealing 199(7) P. Boher J.L. Stehle E. Fogarassy Polymer replication of 3D microstructures employing a high content fluorine separation layer 206(6) A. Braun J. Meinhardt K. Zimmer B. Hobelbarth F. Bigl Laser-induced thermal degradation and ablation of polymers: bulk model 212(6) N. Arnold N. Bityurin D. Bauerle Evidence for volume boiling during laser ablation of single crystalline targets 218(6) V. Cracium D. Craciun Plasma immersion ion implantation for shallow junctions in silicon 224(4) I. Pinter A.H. Abdulhadi Zs. Makaro N.Q. Khanh M. Adam I. Barsony J. Poortmans S. Sivoththaman H.-Z. Song G.J. Adriaenssens Influence of substrate temperature on magnetotransport properties of thin films of La0.7-Sr0.3MnO3 228(5) L. Ranno A. Llobet M.B. Hunt J. Pierre Characteristics of the microstructures of alumina-based refractory materials treated with CO2 and diode lasers 233(7) L. Bradley L. Li F.H. Stott In-situ measurements of excimer laser irradiated zinc sulphide films on silicon 240(4) D. Sands P. Key J. Hoyland Stability, enhancement of elastic properties and structure of multilayered amorphous carbon films 244(6) S. Logothetidis M. Gioti C. Charitidis P. Patsalas J. Arvanitidis J. Stoemenos XeF excimer laser ablation of metallic targets probed by energy-selective time-of-flight mass spectrometry 250(6) S. Amoruso V. Berardi R. Bruzzese R. Velotta N. Spinelli X. Wang On the role of ambient oxygen in the formation of lead titanate pulsed laser deposition thin films 256(5) N. Chaoui E. Millon J.F. Muller P. Ecker W. Bieck H.N. Migeon The production of the new cubic FeN phase by reactive magnetron sputtering 261(5) L. Rissanen P. Schaaf M. Neubauer K.-P. Lieb J. Keinonen T. Sajavaara Laser nitriding of iron: influence of the spatial laser intensity distribution 266(5) F. Landry P. Schaaf M. Neubauer K.-P. Lieb Reaction products in light-induced microstructuring of Cu with Cl2 271(4) H. Raaf N. Schwentner Pulsed laser deposition from solid and molten metals 275(5) T. Szorenyi Z. Kantor Z. Toth P. Heszler On the dynamics of laser-induced etching of tungsten-SiO2-composites 280(5) H. Schieche K. Piglmayer Infrared absorption analysis of organosilicon/oxygen plasmas in a microwave multipolar plasma excited by distributed electron cyclotron resonance 285(7) P. Raynaud T. Amilis Y. Segui Modelling of laser produced plasma and time-of-flight experiments in UV laser ablation of aluminium targets 292(7) S. Amoruso Investigation of laser plasma for solid element composition microanalysis 299(3) V. Detalle J.L. Lacour P. Mauchien A. Semerok Laser ablation efficiency of metal samples with UV laser nanosecond pulses 302(4) B. Salle C. Chaleard V. Detalle J.L. Lacour P. Mauchien C. Nouvellon A. Semerok Stoichiometry study of laser produced plasma by optical emission spectroscopy 306(5) C. Nouvellon C. Chaleard J.L. Lacour P. Mauchien Experimental investigations of laser ablation efficiency of pure metals with femto, pico and nanosecond pulses 311(4) A. Semerok C. Chaleard V. Detalle J.-L. Lacour P. Mauchien P. Meynadier C. Nouvellon B. Salle P. Palianov M. Perdrix G. Petite UV intensity measurement of 308 nm excimer lamp using chemical actinometer 315(5) J.-Y. Zhang H. Esrom I.W. Boyd Growth of tantalum pentoxide film by pulsed laser deposition 320(5) J.-Y. Zhang Q. Fang I.W. Boyd Nonlinear optical properties of metallic surfaces 325(5) F.P. Lohner A.A. Villaeys Patterned surfaces in p-type silicon by photodefined etching 330(5) M.C. Martins R.M. Gamboa J. Maia Alves J.M. Serra A.M. Vallera TiN growth on Si(100) by pulsed laser deposition using homogenized KrF excimer laser beam 335(5) K. Obata K. Sugioka H. Takai K. Midorikawa SIO2 thin film preparation using dielectric barrier discharge-driven excimer lamps 340(4) N. Takezoe A. Yokotani K. Kurosawa W. Sasaki T. Igarashi H. Matsuno Zirconium oxide films deposited by reactive pulsed laser ablation 344(6) C. Flamini A. Giardini Guidoni R. Teghil V. Marotta Near-threshold laser-induced sputtering of aluminum surface by UV and IR irradiation 350(4) V.S. Burakov A.F. Bokhonov M.I. Nedelko N.V. Tarasenko UV etching accompanied by modifications. Surface etching 354(5) N. Bityurin UV laser induced interfacial synthesis of CN-BCN layers on diamond films in borazine and ammonia 359(5) M.V. Ugarov V.P. Ageev A.V. Karabutov E.N. Loubnin S.M. Pimenov V.I. Konov A. Bensaoula Enhanced free carrier generation in boron nitride films by pulsed laser radiation 364(6) V. Ageev S. Klimentov M. Ugarov E. Loubnin A. Bensaoula N. Badi A. Tempez D. Starikov Reactive ion etching of CoSi2 in a CF4/Ar plasma 370(6) G. Beddies M. Falke S. Teichert B. Gebhardt H.-J. Hinneberg WC-Co cutting tool surface modifications induced by pulsed laser treatment 376(7) E. Cappelli S. Orlando F. Pinzari A. Napoli S. Kaciulis Characterization of Si-rich a-Sil-xNx: H alloys deposited by laser-CVD 383(5) N. Banerji J. Serra S. Chiussi F. Lusquinos B. Leon M. Perez-Amor Diode laser modification of ceramic material surface properties for improved wettability and adhesion 388(6) J. Lawrence L. Li J.T. Spencer Modeling and dynamic simulation of ultraviolet induced growing interfaces 394(7) J. Flicstein E. Guillonneau S. Pata L.S. Kee Chun J.F. Palmier C. Daguet J.L. Courant Kinetic study of 222 nm excimer lamp induced decomposition of palladium-acetate films 401(7) Z. Geretovszky I.W. Boyd Pulsed laser deposition-an alternative route to the growth of magnetic thin films 408(5) A.G. Jenner J.P. Hayes L.A. Stone H.V. Snelling R.D. Greenough DUV laser-induced deposition of a-C:H from CH2I2 at room temperature 413(5) M. Lindstam M. Boman K. Piglmayer A comparative study of the effects of laser wavelength on laser removal of chlorinated rubber 418(6) M.J.J. Schmidt L. Li J.T. Spencer P.H. Key Growth of microcrystalline β-SiC films on silicon by ECR plasma CVD 424(5) S.J. Toal H.S. Reehal N.P. Barradas C. Jeynes Enhancement of diamond nucleation on silicon substrates in pulsed laser assisted hot filament CVD 429(5) Q. Wang R. Schliesing H. Zacharias V. Buck Excimer laser-induced modification in PMMA/Ni-acetylacetonate films for selective metallization 434(5) K. Kolev A. Jadin S. Benbakoura L.D. Laude Dynamics of laser pulse-induced melts in Ni-P visualized by high-speed transmission electron microscopy 439(5) T. Nink F. Galbert Z.L. Mao O. Bostanjoglo The use of liquid precursors in plasmachemical technology of obtaining a-SiC:H thin films 444(5) L.A. Ivashchenko G.V. Rusakov V.I. Ivashchenko Deposition of nanostructured Cr2O3 on amorphous substrates under laser irradiation of the solid-liquid interface 449(6) S.I. Dolgaev N.A. Kirichenko G.A. Shafeev Light-enhanced electroless Cu deposition on laser-treated polyimide surface 455(6) G.A. Shafeev P. Hoffmann Laser writing of glassy carbon features on Si from liquid toluene 461(4) G.A. Shafeev A.V. Simakin A.A. Lyalin E.D. Obraztsova V.D. Frolov PLD of HgCdTe on two kinds of Si substrate 465(6) M. Kuzma G. Wisz E. Sheregii T.Ya. Gorbach P.S. Smertenko S.V. Svechnikov R. Ciach A. Rakowska Laser implantation of molecular aggregates into poly (methyl methacrylate) 471(6) M. Goto N. Ichinose S. Kawanishi H. Fukumura Thermal behaviour of Co/Si/W/Si multilayers under high intensity excimer laser pulses 477(5) E. Majkova S. Luby A. Anopchenko M. Jergel A. Luches M. Martino P. Mengucci G. Majni Laser-induced deformation on hard disk surface 482(7) D.M. Liu Y.F. Lu Y. Yuan W.J. Wang T.S. Low T.S. Wee K.T. Chang J.K. Goh Fast ICCD imaging of KrF excimer laser induced titanium plasma plumes for silicon metallization 489(5) M.H. Hong Y.F. Lu T.M. Ho L.W. Lu T.S. Low Carbon nitride thin films deposited by nitrogen-ion-assisted KRF excimer ablation of graphite 494(5) L.Y. Feng R.Z. Min N.H. Qiao H.Z. Feng D.S.H. Chan L.T. Seng C.S. Yin K. Gamani C. Geng L. Kun Patterning of silicon-differences between nanosecond and femtosecond laser pulses 499(4) M. Weingartner R. Elschner O. Bostanjoglo Ion beam analysis of pulsed laser deposited Ti:sapphire 503(4) P.H. Key J. Kral M.J.J. Schmidt Study of particles ejected after pulsed laser ablation of a graphite target 507(5) B. Angleraud F. Garrelie F. Tetard A. Catherinot Laser-induced desorption of various tungsten oxides on polycrystalline W surfaces 512(5) Cs. Beleznai D. Vouagner J.P. Girardeau-Montaut L. Nanai Characterization of the photoelectric effect on K+-implanted W samples 517(5) D. Vouagner Cs. Beleznai J.P. Girardeau-Montaut Reactive pulsed laser ablation and deposition of thin indium tin oxide films for solid state compact sensors 522(5) R. Teghil V. Marotta A.G. Guidoni T.M. Di Palma C. Flamini Pulsed laser ablation and deposition of bioactive glass as coating material for biomedical applications 527(6) L. D Alessio R. Teghil M. Zaccagnino I. Zaccardo D. Ferro V. Marotta On the growth of LiF films by Pulsed Laser Deposition 533(5) A. Perea J. Gonzalo C.N. Afonso S. Martelli R.M. Montereali Characterization of modifications observed on nitrides after an UV laser exposure 538(5) G. Nicolas G. Vacquier M. Autric L. Yaghdjian Deposition of SiC and AIN thin films by laser ablation 543(6) J. Meinschien F. Falk H. Hobert H. Stafast Laser deposition of YBaCuO thin films: stress measurements and microstructure investigations 549(3) R.J. Gaboriaud F. Pailloux An XPS and XRD study of physical and chemical homogeneity of Pb(Zr,Ti)O3 thin films obtained by pulsed laser deposition 552(5) P. Verardi F. Craciun L. Mirenghi M. Dinescu V. Sandu Electroless metallization of carbon substrates 557(6) E. Touchais-Papet M. Charbonnier M. Romand Enhanced magnetoresistance behaviour in CeO2 buffered LaCaMnO films on Si 563(6) W. Zhang X. Wang I.W. Boyd Preparation dependence of the magnetic behaviour in La-Ca-Mn-O films 569(5) W. Zhang X. Wang M. Elliott W. Herrenden-Harkerand I.W. Boyd Crossed Beam Pulsed Laser Deposition of cryolite thin films 574(7) L. Lambert F. Grangeon M. Autric The oxidation of surface layers during reactive ion etching of GaAs in CF2Cl2 + O2 and O2 plasmas 581(6) A. Grigonis A. Galdikas M. Silinskas Vacuum ultraviolet annealing of thin films grown by pulsed laser deposition 587(6) V. Craciun D. Craciun P. Andreazza J. Perriere I.W. Boyd Growth of thin transparent titanium nitride layers by reactive laser ablation 593(6) V. Craciun D. Craciun C. Ghica L. Trupina C. Flueraru N. Nastase Analysis of thickness profiles of pulsed laser deposited metal films 599(6) Z. Kantor T. Szorenyi Z. Toth A. Simon L. Gombos Epitaxial growth of dielectric SrTiO3 thin films by pulsed laser deposition 605(4) T. Yu Y.-F. Chen Z.-G. Liu N.-B. Ming X.-S. Wu Acoustic property of PbTiO3/SrTiO3 multilayer structures prepared by MOCVD and PLD methods 609(4) T. Yu Y.-F. Chen Y.-Y. Zhu Z.-G. Liu N.-B. Ming X.-S. Wu UV-laser-induced etching and metal seeding on polymers: a surface characterization 613(4) J. Bekesi K. Kordas Cs. Beleznai K. Bali R. Vajtai L. Nanai Pulsed laser deposition of lithium niobate: a parametric study 617(5) D. Ghica C. Ghica M. Gartner V. Nelea C. Martin A. Cavaleru I.N. Mihailescu Atmospheric pressure excimer lamp-assisted photoselective activation process for electroless plating 622(5) D.J. Macauley P.V. Kelly K.F. Mongey G.M. Crean Author index 627(9) Subject index 636