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Wide-Bandgap Electronic Devices: Volume 622 [Kõva köide]

Edited by (Kyoto University, Japan), Edited by , Edited by (University of Florida), Edited by
  • Formaat: Hardback, 522 pages, kaal: 864 g, Worked examples or Exercises
  • Sari: MRS Proceedings
  • Ilmumisaeg: 09-Apr-2001
  • Kirjastus: Materials Research Society
  • ISBN-10: 1558995307
  • ISBN-13: 9781558995307
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  • Formaat: Hardback, 522 pages, kaal: 864 g, Worked examples or Exercises
  • Sari: MRS Proceedings
  • Ilmumisaeg: 09-Apr-2001
  • Kirjastus: Materials Research Society
  • ISBN-10: 1558995307
  • ISBN-13: 9781558995307
Teised raamatud teemal:
Interest in wide-bandgap semiconductors for high-power/high-temperature electronics remains prominent. For such applications, SiC is by far the most mature semiconductor material. GaN and diamond, however, have also become prime candidates. While diamond has several advantages over the other two materials, producing large single crystals, as well as the inability to achieve n-type doping, have limited device fabrication. For GaN, recent advances in crystal growth and processing capabilities, as well as excellent transport properties, have yielded a great deal of device development, yet thermal conduction remains an issue. SiC has excellent thermal conductivity, high-breakdown voltages, and well-developed substrates and processing techniques. This book deals with a wide range of technical activity in the area of wide-bandgap high-power/high-temperature electronic devices and covers topics including the fabrication and performance of GaN-based and SiC-based devices, as well as issues related to growth, characterization, and processing of wide-bandgap materials. Several summaries of the current status of the field are provided.

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The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Preface xv Materials Research Symposium Proceedings xvi SiC DEVICES *SiC And GaN High-Voltage Power Devices 1(1) T. Paul Chow *Investigations Of Non-Micropipe X-Ray Imaged Crystal Defects In SiC Devices 2(1) Philip G. Neudeck Maria A. Kuczmarski Michael Dudley William M. Vetter Haibin B. Su Luann J. Keys Andrew J. Trunek PD/AIN/Si Or SiC Structure for Hydrogen Sensing Device 3(2) Flaminia Serina C. Huang G. W. Auner R. Naik S. Ng L. Rimai *Comprehensive Study Of The Electrothermal Operation Of SiC Power Devices Using A Fully Coupled Physical Transport Model 5(2) Martin Lades Winfried Kaindl Gerhard Wachutka Implanted Bipolar Technology In 4H-SiC 7(1) Nick G. Wright C. M. Johnson Anthony G. ONeill Alton Horsfall Sylvie Ortolland Kazuhiro Adachi Andrew P. Knights Paul G. Coleman Isothermal I-V Characteristics Of 4H-SiC p-n Diodes With Low Series Differential Resistivity At Avalanche Breakdown 8 Konstantin V. Vassilevski Konstantinos Zekentes Alexander V. Zorenko Leonid P. Romanov III-NITRIDE DEVICES-ELECTRONIC *Insulator/GaN Heterostructures Of Low Interfacial Density Of States 2(2) Minghwei Hong Hock M. Ng J. Kwo A. Refik Kortan Jim N. Baillargeon K. Alex Anselm Joe P. Mannaerts Alfred Y. Cho C. M. Lee Jen Inn Chyi T. Sheng Lay F. Ren C. R. Abernathy Stephen J. Pearton *AlGaN-Based Microwave Transmit and Receive Modules 4(1) John C. Zolper Polarization Induced 2DEG In MBE-Grown AlGaN/GaN HFETs: On The Origin, DC And RF Characterization 5(1) Ramakrishna Vetury I. P. Smorchkova Christopher R. Elsass Benjamin Heying Stacia Keller Umesh K. Mishra Potential Of GaN Gunn Devices For High Power Generation Above 200 GHz 6(1) Ridha Kamoua Yiming Zhu Yunji Corcoran Temperature Dependence and Current Transport Mechanisms In AlxGa1-xN Schottky Rectifiers 7(2) A. P. Zhang X. A. Cao G. Dang F. Ren J. Han J.-I. Chyi C.-M. Lee C.-C. Chuo T.E. Nee Fabrication Of Enhancement-Mode GaN-Based Metal-Insulator-Semiconductor Field Effect Transistor 9 P. Chen R. Zhang Y. G. Zhou S. Y. Xie Z. Y. Luo Z. Z. Chen W. P. Li S.L. Gu Y. D. Zheng III-NITRIDE DEVICES: ELECTRONIC AND PHOTONIC GaN pnp Bipolar Junction Transistors Operated To 250°C 2(1) A. P. Zhang G. Dang F. Ren J. Han C. Monier A. G. Baca X. A. Cao H. Cho C. R. Abernathy S. J. Pearton Current Gain Simulation Of Npn AlGaN/GaN Heterojunction Bipolar Transistors 3(3) C. Monier S. J. Pearton Albert G. Baca P. C. Chang L. Zhang J. Han R.J. Shul F. Ren J. LaRoche *Design And Performance Of Nitride-Based Ultraviolet LEDs 6(1) M. H. Crawford J. Han R. J. Shul M. A. Banas J. J. Figiel L. Zhang *Present Status Of III-Nitride Based Photodetectors 7(1) Eva Monroy Fernando Calle Jose Luis Pau Elias Munoz Franck Omnes Bernard Beaumont Pierre Gibart A Comparative Study Of AlGaN- And GaN-Based Lasing Structures For Near- And Deep-UV Applications 8 Sergiy Bidnyk Jack B. Lam Gordon G. Gainer Brian D. Little Yong-Hwang Kwon Jin-Joo Song Gary E. Bulman Hua-Shuang Kong GROWTH AND CHARACTERIZATION OF WIDE-BANDGAP MATERIALS Low Temperature Lateral Epitaxial Growth Of Silicon Carbide On Silicon 1(1) Chacko Jacob Juyong Chung Moon-Hi Hong Pirouz Pirouz Shigehiro Nishino SiC Epitaxial Growth On Porous SiC Substrates 2(1) Galyna Melnychuck Marina Mynbaeva Svetlana Rendakova Vladimir Dmitriev Stephen E. Saddow DLTS Study Of 3C-SiC Grown On Si Using Hexamethyldisilane 3(1) Masashi Kato Masaya Ichimura Eisuke Arai Yasuichi Masuda Yi Chen Shigehiro Nishino Yutaka Tokuda Non-Contact Characterization Of Recombination Processes In 4H-SiC 4(1) Kevin Matocha T.P. Chow R.J. Gutmann *GaN Based Quantum Dot Heterostructures 5(1) Michael A. Reshchikov Jie Cui Feng Yun Alison Baski Marshall I. Nathan Hadis Morkoc Lateral Polarity Heterostructures By Overgrowth Of Patterned AlxGa1-xN Nucleation Layers 6(2) Roman Dimitrov V. Tilak M. Murphy W. J. Schaff L. F. Eastman A. P. Lima C. Miskys O. Ambacher M. Stutzmann Single Crystal Growth Of Gallium Nitride Substrates Using A High-Pressure High-Temperature Process 8(1) Rajiv K. Singh Donald R. Gilbert Francis Kelly Robert Chodelka Reza Abbaschian Stephen J. Pearton Alexander Novikov Nikolay Patrin John Budai Lateral And Vertical Growth Study In The Initial Stages Of GaN Growth On Sapphire With ZnO Buffer Layers By Hydride Vapor Phase Epitaxy 9(1) Shulin Gu Rong Zhang Ling Zhang T. F. Kuech Improved Heteroepitaxial MBE GaN Growth With A Ga Metal Buffer Layer 10 Yihwan Kim Sudhir G. Subramanya Joachim Krueger Henrik Siegle Noad Shapiro Robert Armitage Henning Feick Eicke R. Weber Christian Kisielowski Yi Yang Franco Cerrina GROWTH AND CHARACTERIZATION OF III-NITRIDES *Measurement Of Transit Time And Carrier Velocity Under High Electric Field In III-Nitride P-I-N Diodes 1(1) Michael Wraback H. Shen J. C. Carrano T. Li J. C. Campbell Cathodoluminescence Of Lateral Epitaxial Overgrowth GaN: Dependencies On Excitation Conditions 2(2) G. S. Cargill III Eva Campo Lanping Yue J. Ramer M. Schurman I. T. Ferguson Photoconductivity Recombination Kinetics In GaN Films 4(2) Mira Misra Theodore D. Moustakas Effect Of Interface Manipulation For MBE Growth Of AIN On 6H-SiC 6(1) Koichi Naniwae Jeff Hartman Chris Petrich Robert F. Davis Robert J. Nemanich Characterization Of Thin GaN Layers Deposited By Hydride Vapor Phase Epitaxy (HVPE) On 6H-SiC Substrates 7(1) John T. Wolan Yaroslav Koshka S. E. Saddow Yu V. Melnik V. Dmitriev Real Time Observation And Characterization Of Dislocation Motion, Nitrogen Desorption And Nanopipe Formation In GaN 8(2) Eric A. Stach Christian F. Kisielowski William S. Wong Timothy Sands Nathan W. Cheung 2DEGs And 2DHGs Induced By Spontaneous And Piezoelectric Polarization In AlGaN/GaN Heterostructures 10(1) Oliver Ambacher Angela Link Stefan Hackenbuchner M. Stutzmann Roman Dimitrov Michael Murphy Joe Smart Jim R. Shealy Bruce Green William J. Schaff Les F. Eastman High Room-Temperature Hole Concentrations Above 1019 cm-3 In Mg-Doped InGaN/GaN Superlattices 11 Kazuhide Kumakura Toshiki Makimoto Naoki Kobayashi WIDE-BANDGAP DEVICES, MATERIALS, AND PROCESSING Pendeo Epitaxy Of 3C-SiC On Si Substrates 3(1) Geoffrey E. Carter Tsvetanka Zheleva Galyna Melnychuck Bruce Geil Kenneth Jones Stephen E. Saddow The Temperature Dependent Breakdown Voltage For 4H- and 6H-SiC Diodes 4(1) You-Sang Lee M. K. Han Y. I. Choi A Study Of Pt/AIN/6H-SiC MIS Structures For Device Applications 5(1) Margarita P. Thompson Gregory W. Auner Changhe Huang James N. Hilfiker Improved Sensitivity SiC Hydrogen Sensor 6(1) Claudiu Iulian Muntele Daryush Ila Eric K. Williams Iulia Cristina Muntele A. Leslie Evelyn David B. Poker Dale K. Hensley Hall Effect Measurements At Low Temperature Of Arsenic Implanted Into 4H-Silicon Carbide 7(2) J. Senzaki K. Fukuda Y. Ishida Y. Tanaka H. Tanoue N. Kobayashi T. Tanaka K. Arai The Formation And Characterization Of Epitaxial Titanium Carbide Contacts To 4H-SiC 9(2) Sang-Kwon Lee Erik Danielsson Carl-Mikael Zetterling Mikael Ostling Jens-Petter Palmquist Hans Hogberg Ulf Jansson Arsenic Incorporation In Gallium Nitride Grown By Metalorganic Chemical Vapor Deposition Using Dimethylhydrazine And Tertiarybutylarsenic 11(2) Steffen Kellermann Kim-Man Yu Eugene E. Haller Edith D. Bourret-Courchesne P-GaAs Base Regrowth For GaN HBTs And BJTs 13(1) Gerard Dang A. P. Zhang X. A. Cao F. Ren S. J. Pearton H. Cho W. S. Hobson J. Lopata J. M. Van Hove J. J. Klassen C. J. Polley A. M. Wowchack P. P. Chow D. J. King TEM Study Of High Quality GaN Grown By OMVPE Using An Intermediate Layer 14(1) Mourad Benamara Z. Liliental-Weber S. Kellermann W. Swider J. Washburn J. H. Mazur E. D. Bourret-Courchesne Transient Photoresponse From Co Schottky Barriers On AlGaN 15(1) Reinhard Schwarz Manfred Niehus L. Melo Pedro Brogueira Svetoslav Koynov Manfred Heuken Dirk Meister Bruno Karl Meyer Comparison Of Different Substrate Pre-Treatments On The Quality Of GaN Film Growth On 6H-, 4H-, And 3C-SiC 16(2) Ki Hoon Lee Moon-Hi Hong Kasif Teker Chacko Jacob Pirouz Pirouz Dislocations Produced By Indentation Deformation Of HPVE GaN Films 18(2) Moon-Hi Hong Pirouz Pirouz P. M. Tavernier David R. Clarke Formation And Characterization Of Oxides On GaN Surfaces 20(2) David Mistele Thomas Rotter Fritz Fedler Harald Klausing Olga K. Semchinova Jens Stemmer Jochen Aderhold Jurgen Graul Achievements And Characterizations Of GaN With Ga-Polarity In Radio-Frequency Plasma-Assisted Molecular Beam Epitaxy 22(1) Xu-Qiang Shen T. Ide S. H. Cho M. Shimizu S. Hara H. Okumura Nature Of Low-Frequency Excess Noise In n-Type Gallium Nitride 23(1) Changfei F. Zhu W. K. Fong B. H. Leung C. C. Cheng C. Surya Monte Carlo Based Calculation Of Transport Parameters For Wide-Bandgap Device Simulation 24(1) Enrico Bellotti Maziar Farahmand Hans-Erik Nilsson Kevin F. Brennan P. Paul Ruden Design Of AlGaN/GaN Heterojunction Bipolar Transistor Structures 25(1) Yumin Zhang Cheng Cai P. Paul Ruden Thermal Modeling Of III-Nitride Heterostructure Field Effect Transistors 26(2) T. Li P. Paul Ruden J. D. Albrecht M. G. Ancona R. Anholt Long Time-Constant Trap Effects In Nitride Heterostructure Field Effect Transistors 28(1) Xiaozhong Dang Peter M. Asbeck Edward T. Yu Karim S. Boutros Joan M. Redwing Short Gate Length AlGaN/GaN HEMTs 29(1) Oliver Breitschadel L. Kley H. Grabeldinger B. Kuhn F. Scholz H. Schweizer Plasma-Induced Damage And Passivation Of GaN In Electron Cyclotron Resonance Excited N2 Plasma Source 30(1) Jyh-Tsung Hsieh O. Breitschadel M. Rittner L. W. Fu H. Schweizer Ohmic Contact Formation Mechanism Of Pd-Based Contact To p-GaN 31(2) Dae-Woo Kim Joon Cheol Bae Woo Jin Kim Hong Koo Baik Chong Cook Kim Jung Ho Je Chang Hee Hong Channeling Defects In Group-III Nitrides During Dry Etching Processes 33(1) Oliver Breitschadel J. T. Hsieh B. Kuhn F. Scholz H. Schweizer Microstructure And Thermal Stability Of Transition Metal Nitrides And Borides On GaN 34(1) Jacek Bogdan Jasinski E. Kiminski Anna Piotrowska Adam Barcz Marcin Zielinski Lattice Parameters And Thermal Expansion Of Important Semiconductors And Their Substrates 35(1) Robert R. Reeber Kai Wang Reactive Ion Etching Of CVD Diamond In CF4/O2, O2 and O2/ Ar Plasmas 36 Patrick W. Leech Geoffrey K. Reeves Anthony S. Holland PROCESSING OF III-NITRIDE MATERIALS *Device Processing For GaN High Power Electronics 1(3) Stephen J. Pearton X. A. Cao H. Cho K. P. Lee C. Monier F. Ren G. Dang A. P. Zhang W. Johnson J. R. LaRoche B. P. Gila C. R. Abernathy R. J. Shul A. G. Baca J. Han J.-I. Chyi J. M. Van Hove Electric And Morphology Studies Of Ohmic Contacts On AlGaN/GaN 4(1) Vinayak Tilak R. Dimitrov M. Murphy B. Green J. Smart W. J. Schaff J. R. Shealy L. F. Eastman Inductively Coupled High-Density Plasma-Induced Etch Damage Of GaN MESFETs 5(4) Randy J. Shul L. Zhang A. G. Baca Christi G. Willison J. Han S. J. Pearton K. P. Lee F. Ren Surface Disordering And Nitrogen Loss In GaN Under Ion Bombardment 9 S. O. Kucheyev J. S. Williams C. Jagadish J. Zou M. Toth M. R. Phillips H. H. Tan G. Li S. J. Pearton SiC PROCESSING *The Materials Properties Of A Nickel Based Composite Contact To n-SiC For Pulsed Power Switching 2(1) Melanie W. Cole P. C. Joshi F. Ren C. W. Hubbard M. C. Wood M. H. Ervin Stable Ti/TaSi2/Pt Ohmic Contacts On n-Type 6H-SiC Epilayer At 600°C in Air 3(1) Robert S. Okojie David Spry Jeffery Krotine Carl Salupo Donald R. Wheeler High-Dose Titanium Ion Implantation Into Epitaxial Si/3C-SiC/Si Layer Systems For Electrical Contact Formation 4(2) Jorg K. N. Lindner Stephanie Wenzel Bernd Stritzker Characterization Of n-Type Layer By S+ Ion Implantation In 4H-SiC 6(1) Yasunori Tanaka Naoto Kobayashi Hajime Okumura Sadafumi Yoshida Masataka Hasegawa Masahiko Ogura Hisao Tanoue The Effects Of Post-Oxidation Anneal Conditions On Interface State Density Near The Conduction Band Edge and Inversion Channel Mobility For SiC MOSFETs 7(1) Gilyong Chung Chin-Che Tin John Robert Williams Kyle McDonald M. DiVentra S. T. Pantelides Len C. Feldman Robert A. Weller Effects Of Electrode Spacing On Reactive Ion Etching Of 4H-SiC 8(1) Janna R. Bonds Geoff E. Carter Jeffrey B. Casady James D. Scofield Deep RIE Process For Silicon Carbide Power Electronics And MEMS 9(1) Glenn Beheim Carl S. Salupo Silicon Carbide Die Attach Scheme For 500°C Operation 10 Liang-Yu Chen Gary W. Hunter Philip G. Neudeck Author Index Subject Index