This microfiche constitutes the final report produced from the IEEE International Integrated Reliability Workshop, which took part in 1999....Loe edasi...
(Ilmumisaeg: 01-Jan-2000, Paperback / softback, Kirjastus: American Society for Testing & Materials, ISBN-13: 9780803126152)
Contains papers from a January 1999 conference held in San Jose, California, describing concepts and metrology of Gate Dielectric Integrity (GDI) and discussing its applications for material and device processes and tool qualification. Topics include...Loe edasi...
