1 Introduction of High Power Semiconductor Lasers |
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1 | (28) |
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1.1 The Fundamental Principle of Semiconductor Lasers |
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1 | (4) |
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1 | (2) |
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1.1.2 Principle of Semiconductor Lasers |
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3 | (2) |
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5 | (6) |
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1.2.1 Gain Medium Structures |
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5 | (3) |
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8 | (3) |
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1.3 High Power Designs and Considerations |
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11 | (7) |
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1.3.1 Broad Emitting Area |
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13 | (1) |
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13 | (1) |
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1.3.3 Broadened Waveguide Design |
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14 | (1) |
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15 | (1) |
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15 | (1) |
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1.3.6 Tapered Lateral Structure |
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16 | (2) |
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1.4 Basic Characteristics and Parameters |
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18 | (8) |
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18 | (1) |
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19 | (3) |
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22 | (1) |
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23 | (1) |
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24 | (1) |
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25 | (1) |
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26 | (1) |
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26 | (3) |
2 Overview of High Power Semiconductor Laser Packages |
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29 | (24) |
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29 | (17) |
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2.1.1 Packaging Structure of Single Emitter Semiconductor Lasers |
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29 | (5) |
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2.1.2 Packaging Structure of Multi-emitter Semiconductor Lasers |
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34 | (1) |
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2.1.3 Packaging Structure of Single Bar Semiconductor Lasers |
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35 | (5) |
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2.1.4 Packaging Structure of Multi-bar Semiconductor Lasers |
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40 | (6) |
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2.2 Fiber-Coupled Packages |
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46 | (5) |
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2.2.1 Packaging Structure of Single Emitter Modules |
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46 | (1) |
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2.2.2 Packaging Structure of Multi-emitter Modules |
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46 | (1) |
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2.2.3 Packaging Structure of Single Bar Modules |
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47 | (2) |
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2.2.4 Packaging Structure of Multi-bar Modules |
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49 | (2) |
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51 | (2) |
3 Thermal Design and Management in High Power Semiconductor Laser Packaging |
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53 | (36) |
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3.1 Temperature Effect on Performances of High Power Semiconductor Lasers |
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53 | (5) |
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54 | (1) |
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55 | (1) |
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55 | (2) |
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57 | (1) |
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57 | (1) |
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3.2 Heat Generation Sources |
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58 | (4) |
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3.2.1 Heat Sources of Single Emitter Semiconductor Lasers |
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58 | (4) |
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3.2.2 Heat Sources of Semiconductor Laser Bars |
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62 | (1) |
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3.3 Thermal Modeling, Design and Analysis |
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62 | (20) |
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3.3.1 Finite Element Thermal Modeling and Design |
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62 | (3) |
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3.3.2 Thermal Design and Analysis of Single Emitter Semiconductor Lasers |
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65 | (4) |
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3.3.3 Thermal Design and Analysis of Conduction-Cooled Semiconductor Laser Bars |
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69 | (13) |
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3.4 Thermal Management Techniques |
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82 | (5) |
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3.4.1 Double-Sided Cooling |
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82 | (2) |
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3.4.2 Macro-channel Cooling |
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84 | (2) |
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3.4.3 Advanced Packaging Materials |
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86 | (1) |
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87 | (2) |
4 Thermal Stress in High Power Semiconductor Lasers |
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89 | (18) |
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4.1 Effects of Thermal Stress on Performances of High Power Semiconductor Lasers |
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89 | (5) |
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91 | (1) |
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92 | (1) |
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93 | (1) |
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93 | (1) |
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4.2 Analysis of Thermal Stress in High Power Semiconductor Lasers |
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94 | (3) |
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4.3 Thermal Stress Minimization |
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97 | (8) |
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97 | (2) |
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99 | (2) |
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4.3.3 Advanced Composite Materials |
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101 | (4) |
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105 | (2) |
5 Optical Design and Beam Shaping in High Power Semiconductor Lasers |
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107 | (48) |
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5.1 Optical Characteristics of Semiconductor Lasers |
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107 | (8) |
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109 | (1) |
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110 | (1) |
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111 | (4) |
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5.2 Beam Shaping and Fiber Coupling |
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115 | (24) |
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5.2.1 Single Emitter Semiconductor Lasers |
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115 | (2) |
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5.2.2 Single Bar Semiconductor Lasers |
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117 | (16) |
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5.2.3 Single Vertical Stack Semiconductor Lasers |
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133 | (6) |
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5.3 Beam Combining and Fiber Coupling Techniques |
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139 | (13) |
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5.3.1 Basic Beam Combining Principles |
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139 | (2) |
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5.3.2 Single Emitter-Based Beam Combining and Fiber Coupling |
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141 | (2) |
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5.3.3 Bar-Based Beam Combining and Fiber Coupling |
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143 | (5) |
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5.3.4 Stack-Based Beam Combining and Fiber Coupling |
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148 | (4) |
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152 | (3) |
6 Materials in High Power Semiconductor Laser Packaging |
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155 | (30) |
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155 | (17) |
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157 | (3) |
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160 | (6) |
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166 | (2) |
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168 | (4) |
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172 | (9) |
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173 | (3) |
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176 | (1) |
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177 | (1) |
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178 | (2) |
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180 | (1) |
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181 | (4) |
7 Packaging Process of High Power Semiconductor Lasers |
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185 | (42) |
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7.1 Incoming Material Inspection |
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186 | (3) |
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7.1.1 Main Inspection Items |
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186 | (1) |
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7.1.2 Appearance Inspection |
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186 | (1) |
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7.1.3 Physical Property Measurement |
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187 | (2) |
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189 | (5) |
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7.2.1 Ultrasonic Cleaning |
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190 | (1) |
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191 | (1) |
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192 | (2) |
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194 | (5) |
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7.3.1 Electron Beam Evaporation |
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196 | (1) |
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7.3.2 Thermal Evaporation |
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197 | (1) |
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7.3.3 Sputtering Deposition |
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197 | (1) |
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198 | (1) |
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199 | (3) |
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7.4.1 Indium Solder Deposition |
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199 | (2) |
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7.4.2 AuSn Solder Deposition |
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201 | (1) |
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202 | (6) |
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204 | (1) |
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205 | (3) |
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208 | (3) |
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208 | (2) |
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7.6.2 Current-Carrying Capability |
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210 | (1) |
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210 | (1) |
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211 | (1) |
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212 | (3) |
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7.8.1 Appearance Inspection |
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213 | (1) |
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7.8.2 Chip Facet Inspection |
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213 | (2) |
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7.8.3 Electrical Inspection |
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215 | (1) |
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7.9 BBI Test and ABI Test |
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215 | (3) |
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7.9.1 Laser Device Installation |
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216 | (1) |
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7.9.2 Inspection of Electric Short Circuit |
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217 | (1) |
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7.9.3 Diode Laser Cooling |
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217 | (1) |
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7.9.4 Measurement of Laser Device |
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217 | (1) |
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218 | (2) |
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220 | (5) |
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7.11.1 Overall Visual Inspection |
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221 | (1) |
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7.11.2 Chip Facet Inspection |
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222 | (2) |
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7.11.3 Overhang and Underhang Inspection |
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224 | (1) |
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7.11.4 TAP/FAC Inspection |
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225 | (1) |
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225 | (2) |
8 Testing and Characterization of High Power Semiconductor Lasers |
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227 | (60) |
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8.1 Light Power-Current-Voltage |
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227 | (13) |
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231 | (2) |
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233 | (4) |
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237 | (1) |
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8.1.4 Electrical-to-Optical Conversion Efficiency |
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238 | (1) |
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239 | (1) |
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8.2 Wavelength and Spectrum |
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240 | (7) |
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8.2.1 Measurement Method and Equipment |
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241 | (1) |
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8.2.2 Wavelength and Spectrum Characterization |
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241 | (6) |
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247 | (8) |
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8.3.1 Measurement Method and Equipment |
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248 | (1) |
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8.3.2 Typical Testing Results and Data Analysis |
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249 | (6) |
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255 | (6) |
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8.4.1 Measurement Method and Equipment |
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257 | (3) |
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8.4.2 Typical Testing Results and Analysis |
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260 | (1) |
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261 | (3) |
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8.5.1 Measurement Method and Equipment |
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262 | (1) |
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8.5.2 Typical Testing Results and Analysis |
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263 | (1) |
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264 | (4) |
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8.6.1 Scanning Near-Field Optical Microscope |
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264 | (1) |
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8.6.2 Direct Imaging Method |
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265 | (1) |
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8.6.3 Typical Testing Results and Analysis |
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266 | (2) |
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268 | (8) |
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8.7.1 Measurement Method and Equipment |
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270 | (3) |
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8.7.2 Far-Field Testing Data Analysis |
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273 | (3) |
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276 | (3) |
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8.8.1 Imaging Test Methods |
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276 | (2) |
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8.8.2 Typical Testing Results and Analysis |
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278 | (1) |
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8.9 Burn-in and Lifetime Testing |
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279 | (5) |
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279 | (2) |
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281 | (3) |
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284 | (3) |
9 Failure Analysis and Reliability Assessment in High Power Semiconductor Laser Packaging |
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287 | (28) |
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287 | (9) |
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288 | (1) |
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288 | (2) |
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9.1.3 Solder Joint Failure |
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290 | (2) |
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9.1.4 Micro-channel Cooler Corrosion |
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292 | (1) |
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9.1.5 Performance Instability |
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292 | (3) |
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295 | (1) |
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9.2 Approaches to Improve Reliability |
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296 | (13) |
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296 | (2) |
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298 | (3) |
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9.2.3 Indium-Free Packaging |
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301 | (2) |
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303 | (2) |
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9.2.5 Diffusion Barrier Design |
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305 | (1) |
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9.2.6 Thermal Stress Management |
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306 | (1) |
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9.2.7 Approaches to Reduce Optical Feedback |
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307 | (2) |
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309 | (4) |
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9.3.1 Distribution Functions in Reliability Analysis |
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309 | (3) |
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9.3.2 Life Estimation Method |
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312 | (1) |
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313 | (2) |
10 Applications of High Power Semiconductor Lasers |
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315 | (50) |
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10.1 Pumping Applications |
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315 | (24) |
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10.1.1 Pumping for Solid-State Lasers |
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317 | (2) |
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319 | (5) |
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324 | (3) |
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327 | (3) |
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10.1.5 Pumping for Fiber Lasers |
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330 | (9) |
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10.2 Material Surface Treatment |
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339 | (13) |
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10.2.1 Characteristics of High Power Semiconductor Laser (HPSL) in Material Surface Treatment |
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339 | (3) |
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10.2.2 The HPSL System and Optical Technology |
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342 | (5) |
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10.2.3 Applications of Direct HPSL in Surface Treatment |
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347 | (5) |
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352 | (9) |
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10.3.1 The Principle of Laser Hair Removal |
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352 | (3) |
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10.3.2 Semiconductor Laser Hair Removal System and Optical Design |
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355 | (3) |
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10.3.3 Semiconductor Lasers for Hair Removal |
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358 | (3) |
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361 | (4) |
11 Development Trend and Challenges in High Power Semiconductor Laser Packaging |
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365 | (32) |
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365 | (1) |
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11.2 Output Power Scaling |
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366 | (12) |
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11.2.1 Single Emitter and Bar |
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367 | (4) |
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11.2.2 Multiple Single-Emitter and Bar Modules |
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371 | (2) |
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373 | (1) |
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374 | (3) |
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377 | (1) |
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378 | (4) |
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379 | (1) |
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11.3.2 Beam Shaping and Fiber Coupling Technologies |
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380 | (2) |
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382 | (5) |
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11.4.1 Spectral Control for Laser Bars |
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382 | (2) |
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11.4.2 Spectral Control for Vertical Stacks |
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384 | (3) |
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387 | (2) |
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389 | (2) |
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390 | (1) |
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11.6.2 Nano-Scale Silver Paste |
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390 | (1) |
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391 | (2) |
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11.7.1 Pumping Applications |
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391 | (1) |
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11.7.2 Material Processing Applications |
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392 | (1) |
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11.7.3 Medical and Cosmetic Applications |
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392 | (1) |
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392 | (1) |
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393 | (4) |
Index |
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