The completely revised Third Edition to the bestselling Microlithography: Science and Technology provides a balanced treatment of theoretical and operational considerations, from fundamental principles to advanced topics of nanoscale lithog...Loe edasi...
Optical lithography drives modern microchip fabrication through advanced high-NA extreme-ultraviolet techniques that shape image quality inside resist layers. The text gradually unfolds the complexities of image formation with mathematics, examples,...Loe edasi...
Proceedings of SPIE offer access to the latest innovations in research and technology and are among the most cited references in patent literature....Loe edasi...
The completely revised Third Edition to the bestselling Microlithography: Science and Technology provides a balanced treatment of theoretical and operational considerations, from fundamental principles to advanced topics of nanoscale lithog...Loe edasi...
This work details the modalities, mechanisms, technologies, applications, and materials on which Scanning Probe Lithography can be performed. It provides an overview of this simple and cost-effective technique, which can be performed in any lab or fa...Loe edasi...
Proceedings of SPIE offer access to the latest innovations in research and technology and are among the most cited references in patent literature....Loe edasi...
Lin introduces optical lithography to newcomers to the field who are looking for a career in technology, to seasoned professionals interested in knowing more about the technology, and to managers and executives interested in broadening the compan...Loe edasi...
This book provides a systematic description and analysis of laser heat-mode lithography, addressing the basic principles, lithography system, manipulation of feature size, grayscale lithography, resist thin films, and pattern transfer, while also...Loe edasi...
Like the bestselling original, this second edition of Microlithography is a self-contained text detailing both elementary and advanced aspects of submicron microlithography, offering a balanced treatment of theoretical and operating practices. Reflec...Loe edasi...
This book provides a systematic description and analysis of laser heat-mode lithography, addressing the basic principles, lithography system, manipulation of feature size, grayscale lithography, resist thin films, and pattern transfer, while also...Loe edasi...
This text is intended to serve as an introduction to the science of microlithography, but also covers several subjects in depth, making it useful to the experienced lithographer as well. Topics directly related to manufacturing tools are addressed,...Loe edasi...
The main objective of this book is to give proficient people a comprehensive review of up-to-date global improvements in hypothetical and experimental evidences, perspectives and prospects of some newsworthy instrumentation and its numerous technolo...Loe edasi...
(Ilmumisaeg: 18-Nov-2016, Hardback, Kirjastus: Elsevier / The Lancet, ISBN-13: 9780081003541)
These developments in both the industrial and the academic lithography arenas have led to the proliferation of numerous novel approaches to resist chemistry and ingenious extensions of traditional photopolymers. Currently most texts in this area f...Loe edasi...
Proceedings of SPIE offer access to the latest innovations in research and technology and are among the most cited references in patent literature....Loe edasi...
Proceedings of SPIE offer access to the latest innovations in research and technology and are among the most cited references in patent literature....Loe edasi...
Proceedings of SPIE offer access to the latest innovations in research and technology and are among the most cited references in patent literature....Loe edasi...
Proceedings of SPIE offer access to the latest innovations in research and technology and are among the most cited references in patent literature....Loe edasi...
Proceedings of SPIE offer access to the latest innovations in research and technology and are among the most cited references in patent literature....Loe edasi...
Proceedings of SPIE offer access to the latest innovations in research and technology and are among the most cited references in patent literature....Loe edasi...
Proceedings of SPIE offer access to the latest innovations in research and technology and are among the most cited references in patent literature....Loe edasi...
Proceedings of SPIE offer access to the latest innovations in research and technology and are among the most cited references in patent literature....Loe edasi...
