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E-raamat: Biomechanical Microsystems: Design, Processing and Applications

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Biomechanical Microsystems: Design, Processing and ApplicationsSuurem pilt
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This book presents the most important aspects of analysis of dynamical processes taking place on the human body surface. It provides an overview of the major devices that act as a prevention measure to boost a person‘s motivation for physical activity. A short overview of the most popular MEMS sensors for biomedical applications is given. The development and validation of a multi-level computational model that combines mathematical models of an accelerometer and reduced human body surface tissue is presented. Subsequently, results of finite element analysis are used together with experimental data to evaluate rheological properties of not only human skin but skeletal joints as well. Methodology of development of MOEMS displacement-pressure sensor and adaptation for real-time biological information monitoring, namely “ex vivo” and “in vitro” blood pulse type analysis, is described. Fundamental and conciliatory investigations, achieved knowledge and scientific experience about biologically adaptive multifunctional nanocomposite materials, their properties and synthesis compatibility, periodical microstructures, which may be used in various optical components for modern, productive sensors‘ formation technologies and their application in medicine, pharmacy industries and environmental monitoring, are presented and analyzed. This book also is aimed at research and development of vibrational energy harvester, which would convert ambient kinetic energy into electrical energy by means of the impact-type piezoelectric transducer. The book proposes possible prototypes of devices for non-invasive real-time artery pulse measurements and micro energy harvesting.

1 Introduction
1(6)
1.1 Implantable Biomedical Sensors
1(1)
1.2 Non-invasive Sensors and Application Areas
2(1)
1.3 Importance of Blood Pressure and Radial Pulse Diagnosis
3(1)
1.4 Obesity as the 21st Century Plague
4(3)
2 Development of Microsystems Multi Physics Investigation Methods
7(64)
2.1 Application of Time Averaged Holography for Micro-Electro-Mechanical System Performing Non-linear Oscillations
7(20)
2.1.1 Phenomenological Model of MEMS Cantilever
9(6)
2.1.2 FEM Analysis of MEMS Cantilever Performing Chaotic Oscillations
15(1)
2.1.3 The Structure of Digital Data Processing
16(2)
2.1.4 The Mathematical Model of the Optical Measurement
18(3)
2.1.5 Vibration-Assisted Spring-Loaded Micro Spray System. Design and Principle of Operation
21(2)
2.1.6 Theoretical Substantiation of Possibilities for the Batcher Functioning
23(2)
2.1.7 Experimental Analysis of the Spring
25(2)
2.2 Numerical-Experimental Method for Evaluation of Geometrical Parameters of Periodical Microstructure
27(13)
2.2.1 Concept of Indirect Method for Evaluation of Geometrical Parameters of Periodical Microstructure
28(1)
2.2.2 Evaluation of Geometrical and Optical Parameters of Periodical Microstructure
29(5)
2.2.3 Evaluation of Geometrical Parameters with High Aspect Ratio
34(3)
2.2.4 Investigation of Microstructures of High Aspect Ratio
37(3)
2.3 Polycarbonate as an Elasto-Plastic Material Model for Simulation of the Microstructure Hot Imprint Process
40(31)
2.3.1 Theoretical Background for Finite Element Model of Hot Imprint Process
40(10)
2.3.2 Finite Element Model of Hot Imprint Process
50(8)
2.3.3 Hot Imprint Process Simulation Results
58(8)
2.3.4 Finite Element Model Verification
66(1)
References
67(4)
3 MEMS Applications for Obesity Prevention
71(64)
3.1 Capacitive MEMS Accelerometers for Human Body Dynamics Measurements Structural Parameter Identification
71(19)
3.1.1 Data Filtering Technique
72(2)
3.1.2 Methodology for Human Body Acceleration Signal Analysis
74(2)
3.1.3 Acceleration Measurement Device Attachment Location Considerations
76(1)
3.1.4 Methodology for Validation of the Operation of the Acceleration Measurement Device
77(5)
3.1.5 Accelerometer Model and Its Validation
82(8)
3.2 Identification of Human Body Rheological Properties for Evaluation of the Obesity Level
90(45)
3.2.1 Obesity as the 21st Century Catastrophy
90(1)
3.2.2 Methodology for Qualitative Analysis of Human Body Surface Tissue Movement
91(1)
3.2.3 Methodology for Quantitative Analysis of Human Body Surface Tissue Impact Towards Acceleration Measurements
92(16)
3.2.4 Qualitative Analysis of Human Body Surface Tissue Movement During Vertical Jump
108(1)
3.2.5 Quantitative Analysis of Human Body Surface Tissue Impact Towards Acceleration Measurements
109(6)
3.2.6 Multi-level Computational Model
115(1)
3.2.7 Reduced Human Body Surface Tissue Rheological Model and Its Validation
116(7)
3.2.8 Reduced Human Body Surface Tissue Rheological Model Analysis
123(9)
References
132(3)
4 MOEMS-Assisted Radial Pulse Measurement System Development
135(76)
4.1 Validation of Noninvasive MOEMS-Assisted Radial Pulse Analysis System
135(6)
4.1.1 Importance of Blood Pressure and Radial Pulse Diagnosis
135(1)
4.1.2 Metrology of Arterial Blood Pressure
136(2)
4.1.3 Radial Pulse Diagnosis
138(1)
4.1.4 Radial Pulse Characteristics
139(2)
4.2 Micro Membrane Design
141(11)
4.2.1 Evaluation of Residual Stresses
141(2)
4.2.2 Three Dimensional Finite Element Model of Micro-membrane
143(2)
4.2.3 Square Membrane Modeling
145(4)
4.2.4 Circular Membrane Modeling
149(3)
4.3 Micro Membrane Fabrication and Experimentation
152(37)
4.3.1 Determination of Primary Data for Analyzed Objects
153(1)
4.3.2 Deposition of Silicon Dioxide and Polysilicon
154(2)
4.3.3 Formation of Micro Membranes
156(8)
4.3.4 Results of Fabrication, Micro Hardness and Surface Morphology Tests
164(6)
4.3.5 Radial Pulse Analysis Through Application of Fabricated Micro-objects
170(19)
4.4 Modeling and Simulation of Radial Artery Under Influence of Pulse
189(9)
4.4.1 Computational Fluid Dynamics (CFD)
190(1)
4.4.2 Characteristics of Arteries
191(1)
4.4.3 Characteristics of Blood
191(2)
4.4.4 Computational Fluid Structure Interaction (FSI) Modeling for Blood Flow in Radial Artery
193(5)
4.5 Moire Method Application for Artery Surface Deformations Analysis
198(6)
4.5.1 Mathematical Representation of the Projected Image
199(2)
4.5.2 Double-Exposure Projection Moire
201(1)
4.5.3 Two Dimensional Example
202(1)
4.5.4 Application of Whole-Field Projection Moire for the Registration of Radial Blood Flow Pulses
203(1)
4.6 Proposed Prototype of Wrist Watch-like Radial Pulse Analysis Sensor
204(7)
4.6.1 Prototype Design
204(1)
4.6.2 Proposed Prototype Geometry
205(3)
References
208(3)
5 Microsystems for the Effective Technological Processes
211(67)
5.1 Periodical Microstructures Based on Novel Piezoelectric Material for Biomedical Applications
211(19)
5.1.1 Synthesis and Formation of PZT Coating
213(2)
5.1.2 Characterization Methods
215(1)
5.1.3 Dynamic Investigations of PZT Coatings
215(3)
5.1.4 Structure and Chemical Composition of PZT Composite Material
218(2)
5.1.5 Surface Morphology of Novel Cantilever Type Piezoelectric Elements
220(2)
5.1.6 Piezoelectric Properties
222(3)
5.1.7 Calculation of Module of Elasticity
225(2)
5.1.8 Periodical Microstructure and SPR
227(3)
5.2 Development of Complex 3D Microstructures Based on Computer Generated Hologram
230(16)
5.2.1 The Creation and Formation of the Periodical Microstructure on the Basis of Computer Generated Hologram
236(6)
5.2.2 Gerchberg-Saxton Algorithm for Design of Computer Generated Hologram
242(4)
5.3 High-Frequency Excitation for Thermal Imprint of Microstructures into a Polymer
246(32)
5.3.1 Methods of Microstructure Replication
246(6)
5.3.2 Materials, Experimental Setup and Methodology
252(9)
5.3.3 Investigation of Mechanical Hot Imprint Process
261(17)
References 278
Prof. Vytautas Ostasevicius is currently a Director of the Institute of Mechatronics at Kaunas University of Technology, Kaunas, Lithuania. His research interest are on microsystems dynamics, biomechanical systems research and innovative devices for health development. 

Dr. Giedrius Janusas is currently an associated professor at Kaunas University of Technology, Kaunas, Lithuania. His research interest are on biomechanical systems, MEMS, PZT composite materials, periodic microstructures and holography. 

Prof. Arvydas Palevicius is currently a professor at Kaunas University of Technology, Kaunas, Lithuania. His research interest are on microsystems engineering, biomechanical systems, PZT composite materials and photonics. 

Dr. Rimvydas Gaidys is currently a professor at Kaunas University of Technology, Kaunas, Lithuania. His research interest are on mathematical models, optimization and simulation of coupled physical problems. 





Dr.Vytautas Jurenas is currently a chief researcher at Kaunas University of Technology, Kaunas, Lithuania. His research interest are on piezomechanics, dynamics and control of structural vibration.
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