Preface |
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ix | |
Acknowledgements |
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xi | |
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1 | (11) |
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1.1 Moore's Law and the Power Crisis |
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1 | (1) |
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1.2 Novel Device Architectures |
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2 | (3) |
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1.3 High Mobility Channel Materials |
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5 | (2) |
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1.4 Two-Dimensional (2-D) Materials |
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7 | (1) |
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8 | (4) |
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9 | (3) |
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2 First-principles Calculations for Si Nanostructures |
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12 | (29) |
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2.1 Band Structure Calculations |
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12 | (19) |
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2.1.1 Si Ultrathin-body Structures |
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12 | (5) |
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17 | (3) |
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2.1.3 Strain Effects on Band Structures: From Bulk to Nanowire |
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20 | (11) |
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2.2 Tunneling Current Calculations Through Si/SiO2/Si Structures |
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31 | (10) |
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2.2.1 Atomic Models of Si (001)/SiO2/Si (001) Structures |
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32 | (1) |
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2.2.2 Current-voltage Characteristics |
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33 | (2) |
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2.2.3 SiO2 Thickness Dependences |
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35 | (3) |
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38 | (3) |
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3 Quasi-ballistic Transport in Si Nanoscale MOSFETs |
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41 | (44) |
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3.1 A Picture of Quasi-ballistic Transport Simulated using Quantum-corrected Monte Carlo Simulation |
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41 | (14) |
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3.1.1 Device Structure and Simulation Method |
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42 | (2) |
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3.1.2 Scattering Rates for 3-D Electron Gas |
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44 | (2) |
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3.1.3 Ballistic Transport Limit |
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46 | (4) |
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3.1.4 Quasi-ballistic Transport |
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50 | (1) |
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3.1.5 Role of Elastic and Inelastic Phonon Scattering |
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51 | (4) |
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3.2 Multi-sub-band Monte Carlo Simulation Considering Quantum Confinement in Inversion Layers |
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55 | (9) |
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3.2.1 Scattering Rates for 2-D Electron Gas |
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56 | (2) |
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3.2.2 Increase in Dac for SOI MOSFETs |
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58 | (1) |
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3.2.3 Simulated Electron Mobilities in Bulk Si and SOI MOSFETs |
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59 | (2) |
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3.2.4 Electrical Characteristics of Si DG-MOSFETs |
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61 | (3) |
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3.3 Extraction of Quasi-ballistic Transport Parameters in Si DG-MOSFETs |
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64 | (5) |
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3.3.1 Backscattering Coefficient |
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64 | (2) |
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66 | (1) |
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3.3.3 Gate and Drain Bias Dependences |
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67 | (2) |
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3.4 Quasi-ballistic Transport in Si Junctionless Transistors |
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69 | (7) |
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3.4.1 Device Structure and Simulation Conditions |
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70 | (1) |
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3.4.2 Influence of SR Scattering |
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71 | (3) |
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3.4.3 Influence of II Scattering |
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74 | (1) |
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3.4.4 Backscattering Coefficient |
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75 | (1) |
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3.5 Quasi-ballistic Transport in GAA-Si Nanowire MOSFETs |
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76 | (9) |
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3.5.1 Device Structure and 3DMSB-MC Method |
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76 | (1) |
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3.5.2 Scattering Rates for 1-D Electron Gas |
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77 | (2) |
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3.5.3 ID -- VG Characteristics and Backscattering Coefficient |
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79 | (2) |
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81 | (4) |
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4 Phonon Transport in Si Nanostructures |
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85 | (27) |
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4.1 Monte Carlo Simulation Method |
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87 | (4) |
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4.1.1 Phonon Dispersion Model |
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87 | (1) |
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4.1.2 Particle Simulation of Phonon Transport |
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88 | (1) |
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4.1.3 Free Flight and Scattering |
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89 | (2) |
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4.2 Simulation of Thermal Conductivity |
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91 | (11) |
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4.2.1 Thermal Conductivity of Bulk Silicon |
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91 | (3) |
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4.2.2 Thermal Conductivity of Silicon Thin Films |
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94 | (4) |
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4.2.3 Thermal conductivity of silicon nanowires |
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98 | (2) |
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4.2.4 Discussion on Boundary Scattering Effect |
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100 | (2) |
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4.3 Simulation of Heat Conduction in Devices |
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102 | (10) |
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102 | (1) |
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4.3.2 Simple 1-D Structure |
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103 | (3) |
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106 | (3) |
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109 | (3) |
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5 Carrier Transport in High-mobility MOSFETs |
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112 | (39) |
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5.1 Quantum-corrected MC Simulation of High-mobility MOSFETs |
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112 | (12) |
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5.1.1 Device Structure and Band Structures of Materials |
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112 | (2) |
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5.1.2 Band Parameters of Si, Ge, and III-V Semiconductors |
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114 | (1) |
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5.1.3 Polar-optical Phonon (POP) Scattering in III-V Semiconductors |
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115 | (1) |
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5.1.4 Advantage of UTB Structure |
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116 | (3) |
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5.1.5 Drive Current of III-V, Ge and Si n-MOSFETs |
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119 | (5) |
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5.2 Source-drain Direct Tunneling in Ultrascaled MOSFETs |
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124 | (1) |
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5.3 Wigner Monte Carlo (WMC) Method |
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125 | (13) |
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5.3.1 Wigner Transport Formalism |
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126 | (3) |
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5.3.2 Relation with Quantum-corrected MC Method |
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129 | (2) |
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131 | (2) |
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5.3.4 Description of Higher-order Quantized Subbands |
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133 | (1) |
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5.3.5 Application to Resonant-tunneling Diode |
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133 | (5) |
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5.4 Quantum Transport Simulation of III-V n-MOSFETs with Multi-subband WMC (MSB-WMC) Method |
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138 | (13) |
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138 | (1) |
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5.4.2 POP Scattering Rate for 2-D Electron Gas |
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139 | (1) |
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5.4.3 ID -- VG Characteristics for InGaAs DG-MOSFETs |
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139 | (4) |
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5.4.4 Channel Length Dependence of SDT Leakage Current |
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143 | (1) |
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5.4.5 Effective Mass Dependence of Subthreshold Current Properties |
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144 | (3) |
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147 | (4) |
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6 Atomistic Simulations of Si, Ge and III-V Nanowire MOSFETs |
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151 | (40) |
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6.1 Phonon-limited Electron Mobility in Si Nanowires |
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151 | (17) |
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6.1.1 Band Structure Calculations |
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152 | (9) |
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6.1.2 Electron-phonon Interaction |
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161 | (1) |
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162 | (6) |
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6.2 Comparison of Phonon-limited Electron Mobilities between Si and Ge nanowires |
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168 | (5) |
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6.3 Ballistic Performances of Si and InAs Nanowire MOSFETs |
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173 | (8) |
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174 | (1) |
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6.3.2 Top-of-the-barrier Model |
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174 | (3) |
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6.3.3 ID -- VG Characteristics |
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177 | (1) |
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6.3.4 Quantum Capacitances |
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178 | (1) |
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6.3.5 Power-delay-product |
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179 | (2) |
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6.4 Ballistic Performances of InSb, InAs, and GaSb Nanowire MOSFETs |
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181 | (10) |
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182 | (1) |
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6.4.2 ID -- VG Characteristics |
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182 | (4) |
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6.4.3 Power-delay-product |
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186 | (1) |
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Appendix A Atomistic Poisson Equation |
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187 | (1) |
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Appendix B Analytical Expressions of Electron-phonon Interaction Hamiltonian Matrices |
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188 | (1) |
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189 | (2) |
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7 2-D Materials and Devices |
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191 | (56) |
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191 | (7) |
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7.1.1 Fundamental Properties of Graphene, Silicene and Germanene |
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192 | (5) |
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7.1.2 Features of 2-D Materials as an FET Channel |
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197 | (1) |
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7.2 Graphene Nanostructures with a Bandgap |
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198 | (17) |
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7.2.1 Armchair-edged Graphene Nanoribbons (A-GNRs) |
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199 | (4) |
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7.2.2 Relaxation Effects of Edge Atoms |
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203 | (2) |
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7.2.3 Electrical Properties of A-GNR-FETs Under Ballistic Transport |
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205 | (4) |
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7.2.4 Bilayer Graphenes (BLGs) |
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209 | (5) |
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7.2.5 Graphene Nanomeshes (GNMs) |
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214 | (1) |
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7.3 Influence of Bandgap Opening on Ballistic Electron Transport in BLG and A-GNR-MOSFETs |
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215 | (6) |
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7.3.1 Small Bandgap Regime |
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217 | (2) |
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7.3.2 Large Bandgap Regime |
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219 | (2) |
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7.4 Silicene, Germanene and Graphene Nanoribbons |
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221 | (2) |
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7.4.1 Bandgap vs Ribbon Width |
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222 | (1) |
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7.4.2 Comparison of Band Structures |
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222 | (1) |
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7.5 Ballistic MOSFETs with Silicene, Germanene and Graphene nanoribbons |
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223 | (5) |
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7.5.1 ID -- VG Characteristics |
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223 | (1) |
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7.5.2 Quantum Capacitances |
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224 | (1) |
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7.5.3 Channel Charge Density and Average Electron Velocity |
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225 | (1) |
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7.5.4 Source-drain Direct Tunneling (SDT) |
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226 | (2) |
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7.6 Electron Mobility Calculation for Graphene on Substrates |
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228 | (8) |
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229 | (1) |
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7.6.2 Scattering Mechanisms |
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229 | (2) |
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231 | (1) |
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7.6.4 Electron Mobility Considering Surface Optical Phonon Scattering of Substrates |
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232 | (2) |
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7.6.5 Electron Mobility Considering Charged Impurity Scattering |
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234 | (2) |
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236 | (11) |
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7.7.1 Atomic Model for Germanane Nanoribbon Structure |
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237 | (1) |
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7.7.2 Band Structure and Electron Effective Mass |
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238 | (2) |
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240 | (2) |
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Appendix A Density-of-states for Carriers in Graphene |
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242 | (1) |
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242 | (5) |
Index |
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247 | |