| Preface |
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xv | |
| Acknowledgments |
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xix | |
| List of Figures |
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xxi | |
| List of Tables |
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xxxix | |
| List of Symbols |
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xli | |
| List of Abbreviations |
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xlv | |
| Part I: Introduction to Electromagnetism |
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3 | (4) |
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2 The Microscopic Maxwell Equations |
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7 | (10) |
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2.1 Definition of the Electric Field |
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7 | (1) |
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2.2 Definition of the Magnetic Field |
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8 | (1) |
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2.3 The Microscopic Maxwell Equations in Integral and Differential Form |
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9 | (3) |
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12 | (5) |
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2.4.1 Conservation of Charge - The Continuity Equation |
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12 | (1) |
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2.4.2 Conservation of Energy - Poynting's Theorem |
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13 | (1) |
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2.4.3 Conservation of Linear Momentum - The Electromagnetic Field Tensor |
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14 | (1) |
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2.4.4 Angular Momentum Conservation |
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15 | (2) |
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3 Potentials and Fields and the Lagrangian |
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17 | (6) |
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3.1 The Scalar and Vector Potential |
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17 | (2) |
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19 | (1) |
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3.3 Lagrangian for an Electromagnetic Field Interacting with Charges and Currents |
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19 | (4) |
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4 The Macroscopic Maxwell Equations |
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23 | (22) |
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4.1 Constitutive Equations |
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23 | (1) |
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4.2 Boltzmann Transport Equation |
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24 | (2) |
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26 | (3) |
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29 | (1) |
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30 | (1) |
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4.6 Currents in Semiconductors |
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31 | (5) |
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36 | (1) |
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37 | (4) |
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41 | (4) |
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5 Wave Guides and Transmission Lines |
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45 | (24) |
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47 | (2) |
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49 | (1) |
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49 | (1) |
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5.4 Transmission Line Theory - S Parameters |
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50 | (4) |
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5.5 Classical Ghosts Fields |
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54 | (2) |
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5.6 The Static Approach and Dynamic Parts |
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56 | (2) |
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58 | (1) |
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59 | (10) |
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6 Energy Calculations and the Poynting Vector |
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69 | (4) |
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69 | (1) |
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70 | (3) |
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7 From Macroscopic Field Theory to Electric Circuits |
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73 | (14) |
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73 | (5) |
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78 | (2) |
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7.3 Inclusion of Time Dependence |
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80 | (7) |
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87 | (10) |
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89 | (1) |
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90 | (1) |
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91 | (3) |
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94 | (1) |
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95 | (1) |
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95 | (2) |
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9 The Geometry of Electrodynamics |
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97 | (10) |
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9.1 Gravity as a Gauge Theory |
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98 | (6) |
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9.2 The Geometrical Interpretation of Electrodynamics |
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104 | (3) |
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107 | (10) |
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113 | (4) |
| Part II: Discretization Methods for Sources and Fields |
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11 The Finite Difference Method |
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117 | (4) |
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12 The Finite Element Method |
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121 | (8) |
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121 | (1) |
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122 | (7) |
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13 The Finite Volume Method and Finite Surface Method |
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129 | (58) |
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13.1 Differential Operators in Cartesian Grids |
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132 | (2) |
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13.2 Discretized Equations |
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134 | (1) |
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13.3 The No-Ghost Approach |
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134 | (5) |
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13.4 Current Continuity Equation |
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139 | (2) |
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13.5 Computational Details of the Hole Transport Equation |
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141 | (10) |
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144 | (7) |
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13.6 Computational Details of the Electron Transport Equation |
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151 | (5) |
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152 | (4) |
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13.7 The Poisson Equation |
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156 | (6) |
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13.8 Maxwell-Ampere Equation |
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162 | (2) |
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13.9 Using Gauge Conditions to Decrease Matrix Fill-In |
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164 | (8) |
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165 | (1) |
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166 | (2) |
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168 | (2) |
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13.9.4 Maxwell-Ampere System |
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170 | (1) |
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13.9.5 "Standard" Implementation |
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171 | (1) |
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13.9.6 Decoupling Implementation |
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171 | (1) |
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13.10 The Generalized Coulomb Gauge |
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172 | (2) |
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13.10.1 Implementation Details of the Ampere-Maxwell System |
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173 | (1) |
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174 | (5) |
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13.11.1 Boundary Conditions for the EV System |
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176 | (1) |
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13.11.2 Implementation Details of the EV System |
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177 | (2) |
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13.11.3 Solution Strategy of the EV System |
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179 | (1) |
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13.12 The Scharfetter-Gummel Discretization |
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179 | (4) |
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13.12.1 The Static and Dynamic Parts |
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181 | (2) |
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13.13 Using Unstructured Grids |
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183 | (4) |
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14 Finite Volume Method and the Transient Regime |
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187 | (42) |
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14.1 The Electromagnetic Drift-Diffusion Solver in the Time Domain |
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188 | (3) |
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191 | (3) |
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14.3 Semiconductor Treatment |
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194 | (3) |
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14.4 Implementation of Numerical Methods for Solving the Equations |
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197 | (1) |
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14.5 Spatial Discretization |
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197 | (1) |
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14.6 Discretization of Gauss' Law |
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198 | (1) |
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14.7 Boundary Conditions for Gauss' Discretized Law |
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199 | (3) |
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14.8 Discretization of the Maxwell-Ampere System |
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202 | (5) |
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14.9 Boundary Conditions for the Maxwell-Ampere Equation |
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207 | (4) |
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14.10 Generalized Boundary Conditions for the Maxwell-Ampere Equation |
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211 | (2) |
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14.11 Discretization of the Gauge Condition |
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213 | (1) |
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14.12 Temporal Discretization |
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214 | (1) |
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215 | (1) |
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14.14 State-Space Matrices and Linking Harmonic to Transient Analysis |
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216 | (5) |
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14.15 A Technical Detail: Link Orientations |
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221 | (1) |
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222 | (4) |
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14.16.1 Scaling the Poisson Equation |
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222 | (1) |
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14.16.2 Scaling the Current-Continuity Equations |
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223 | (1) |
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14.16.3 Scaling the Maxwell-Ampere Equation |
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224 | (2) |
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226 | (3) |
| Part III: Applications |
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229 | (52) |
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229 | (4) |
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229 | (1) |
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15.1.2 Square Coaxial Cable |
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229 | (2) |
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231 | (2) |
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15.2 S-Parameters, Y-Parameters, Z-Parameters |
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233 | (2) |
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15.3 A Simple Conductive Rod |
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235 | (4) |
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15.4 Strip Line above a Conductive Plate |
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239 | (8) |
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246 | (1) |
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247 | (1) |
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15.6 Simulations with Opera - VectorFields |
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247 | (9) |
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256 | (2) |
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15.8 Inductor with Grounded Guard Ring |
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258 | (7) |
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15.9 Inductor with Narrow Winding above a Patterned Semiconductor Layer |
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265 | (15) |
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280 | (1) |
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16 Evaluation of Coupled Inductors |
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281 | (14) |
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16.1 Scaling Rules for the Maxwell Equations |
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282 | (1) |
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283 | (2) |
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285 | (3) |
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16.3.1 Boundary Conditions |
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287 | (1) |
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16.4 Scattering Parameters |
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288 | (2) |
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16.5 Application to Compute the Coupling of Inductors |
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290 | (5) |
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17 Coupled Electromagnetic-TCAD Simulation for High Frequencies |
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295 | (22) |
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17.1 Review of A-V Formulation |
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298 | (2) |
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17.1.1 A-V Formulation of the Coupled System |
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298 | (2) |
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17.2 Origin of the High-Frequency Breakdown of the A-V Solver |
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300 | (1) |
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301 | (7) |
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17.3.1 Redundancy in Coupled System |
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303 | (1) |
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17.3.2 Issues of Material Properties |
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304 | (1) |
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17.3.3 Boundary Conditions |
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305 | (1) |
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17.3.4 Implementation Details |
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306 | (1) |
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17.3.5 Matrix Permutation |
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307 | (1) |
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308 | (8) |
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17.4.1 Accuracy of E-V Solver |
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308 | (3) |
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311 | (3) |
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17.4.3 Performance Comparisons |
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314 | (2) |
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316 | (1) |
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18 EM-TCAD Solving from 0-100 THz |
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317 | (10) |
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317 | (2) |
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319 | (1) |
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18.3 Simplified EV Schemes |
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320 | (1) |
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18.4 Combination of AV and EV Solvers |
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321 | (1) |
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18.5 Numerical Experiments |
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321 | (4) |
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18.6 Best Practices for Iterative Solving |
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325 | (2) |
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19 Large Signal Simulation of Integrated Inductors on Semi-Conducting Substrates |
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327 | (14) |
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19.1 Need for Mimetic Formulation |
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328 | (1) |
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329 | (3) |
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19.3 Application to An Octa-Shaped Inductor |
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332 | (7) |
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339 | (2) |
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20 Inclusion of Lorentz Force Effects in TCAD Simulations |
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341 | (12) |
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20.1 Steady-State Equations |
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342 | (2) |
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20.2 Discretization of the Lorentz Current Densities |
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344 | (3) |
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20.3 Static Skin Effects in Conducting Wires |
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347 | (1) |
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20.4 Self-Induced Lorentz Force Effects in Metallic Wires |
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348 | (1) |
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20.5 Self-Induced Lorentz Force Effects in Silicon Wires |
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349 | (1) |
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349 | (2) |
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351 | (2) |
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21 Self-Induced Magnetic Field Effects, the Lorentz Force and Fast-Transient Phenomena |
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353 | (26) |
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21.1 Time-Domain Formulation of EM-TCAD Problem |
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356 | (2) |
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21.2 Inclusion of the Lorentz Force |
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358 | (2) |
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21.3 Discretization of the Lorentz Current Densities |
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360 | (6) |
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366 | (11) |
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377 | (2) |
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22 EM Analysis of ESD Protection for Advanced CMOS Technology |
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379 | (16) |
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22.1 Simulation of a Metallic Wire |
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380 | (3) |
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22.2 In-depth Simulation of the Full ESD Structure |
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383 | (4) |
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22.3 Negative Stress with Active Diode |
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387 | (2) |
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389 | (2) |
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22.5 Comparison with TLP Measurements |
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391 | (1) |
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392 | (3) |
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23 Coupled Electromagnetic-TCAD Simulation for Fast-Transient Systems |
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395 | (14) |
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23.1 Time-Domain A-V formulation |
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397 | (3) |
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23.2 Analysis of Fast-Transient Breakdown |
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400 | (2) |
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23.3 Time-Domain E-V Formulation |
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402 | (2) |
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404 | (3) |
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407 | (2) |
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24 A Fast Time-Domain EM-TCAD Coupled Simulation Framework via Matrix Exponential with Stiffness Reduction |
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409 | (28) |
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24.1 Time-Domain Formulation of EM-TCAD Problem |
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411 | (4) |
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24.2 Time-Domain Simulation with Matrix Exponential Method |
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415 | (5) |
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24.3 Error Control and Adaptivity |
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420 | (1) |
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24.4 E-V Formulation of EM-TCAD for MEXP Method |
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421 | (3) |
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424 | (7) |
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24.6 Validity Proof of Regularization with Differentiated Gauss' Law |
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431 | (1) |
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24.7 Fast Computation of Mx in E-V Formulation |
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432 | (1) |
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433 | (4) |
| Part IV: Advanced Topics |
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25 Surface-Impedance Approximation to Solve RF Design Problems |
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437 | (18) |
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25.1 Surface Impedance Approximation |
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437 | (3) |
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25.2 Formulation of the BISC in Potentials |
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440 | (2) |
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25.3 Scaling Considerations |
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442 | (2) |
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25.4 One-Dimensional Test Example |
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444 | (11) |
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26 Using the Ghost Method for Floating Domains in Electromagnetic Field Solvers |
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455 | (22) |
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456 | (2) |
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458 | (1) |
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26.3 Example 1: Metal Blocks Embedded in Insulator |
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459 | (1) |
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26.4 Example 2: A Transformer System |
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460 | (2) |
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462 | (1) |
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26.6 High-Frequency Problems |
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462 | (6) |
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26.7 Floating Semiconductor Regions |
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468 | (9) |
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27 Integrating Factors for Discretizing the Maxwell-Ampere Equation |
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477 | (26) |
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27.1 Review of the Scharfetter-Gummel Discretization |
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478 | (1) |
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479 | (2) |
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481 | (1) |
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27.4 Discretization of the Curl-Curl Operator |
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482 | (2) |
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27.5 Discretization of the Divergence Operator |
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484 | (5) |
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27.6 Discretization of Poisson-Type Operators |
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489 | (1) |
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490 | (1) |
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27.8 High-Frequency Maxwell Equations |
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491 | (2) |
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27.9 Integrating Factors for Unstructured Grids |
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493 | (1) |
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27.10 Implementation Details |
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494 | (1) |
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27.11 Effect of the Inclusion of the Integrating Factor |
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495 | (1) |
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27.12 Simulation Set Up and Results |
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495 | (6) |
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501 | (2) |
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28 Stability Analysis of the Transient Field Solver |
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503 | (60) |
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28.1 Impact of the Gauge Condition |
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509 | (4) |
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28.2 Magnetic Neumann Boundary Conditions |
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513 | (1) |
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28.3 Results for Larger Values of the Conductance |
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513 | (5) |
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28.4 Yet Another Experiment |
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518 | (1) |
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28.5 Inductor Experiments |
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518 | (6) |
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28.6 Results for a Metal Loop |
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524 | (2) |
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28.7 Results for a Twisted Bar |
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526 | (4) |
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530 | (4) |
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28.9 Returning to the Original Problem |
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534 | (4) |
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28.10 Revisiting the Equations |
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538 | (5) |
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28.11 Redoing the Corner Structure |
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543 | (6) |
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28.12 Simple Test Structure for the Stability Problem |
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549 | (6) |
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28.13 Results for a Single Line |
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555 | (3) |
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28.14 Some Theoretical Considerations |
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558 | (1) |
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28.15 The Impact of the Meshing |
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559 | (2) |
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Summary of Stability Study |
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561 | (2) |
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29 Summary of the Numerical Techniques |
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563 | (12) |
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563 | (3) |
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566 | (1) |
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29.3 Spatial Discretization |
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567 | (8) |
| References |
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575 | (10) |
| Index |
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585 | (10) |
| About the Author |
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595 | |