Preface |
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xi | |
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1 | (16) |
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1.1 Typical hard brittle materials |
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1 | (2) |
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1.2 Micro- and nanoscale processing technologies for hard brittle materials |
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3 | (10) |
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1.3 Importance of nanoscale laser processing |
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13 | (2) |
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15 | (1) |
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16 | (1) |
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2 Fundamentals of laser processing |
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17 | (20) |
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17 | (1) |
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17 | (4) |
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21 | (8) |
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2.4 General applications of specific laser systems |
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29 | (3) |
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32 | (1) |
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33 | (2) |
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35 | (2) |
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3 Laser-material interactions |
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37 | (16) |
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37 | (1) |
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3.2 Light-matter interactions |
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37 | (3) |
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40 | (6) |
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46 | (1) |
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3.5 Post-irradiation subsurface structure |
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47 | (3) |
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50 | (2) |
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52 | (1) |
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4 Laser processing technologies |
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53 | (22) |
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53 | (1) |
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53 | (3) |
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4.3 Laser-assisted and combined processes |
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56 | (4) |
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60 | (1) |
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4.5 Laser-induced phase transformation |
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61 | (2) |
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4.6 Laser-induced surface modification |
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63 | (2) |
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65 | (1) |
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4.8 Laser micro- and nanostructuring |
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66 | (4) |
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70 | (5) |
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5 Micromachining of single-crystal diamond |
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75 | (18) |
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75 | (1) |
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5.2 Laser absorption in transparent SCD |
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76 | (1) |
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5.3 Nonthermal ablation of SCD by ultrashort pulses |
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76 | (1) |
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5.4 Thermally induced responses |
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77 | (6) |
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5.5 Irradiation responses of different types of SCD |
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83 | (2) |
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5.6 Micromachining of SCD tools |
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85 | (5) |
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90 | (2) |
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92 | (1) |
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6 Micromachining of microstructures on sapphire |
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93 | (16) |
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93 | (1) |
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6.2 Laser processing of sapphire |
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93 | (2) |
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6.3 Formation mechanism of tapered structures |
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95 | (9) |
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6.4 Machining of micropyramid structures |
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104 | (1) |
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6.5 Other changes to surface quality |
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104 | (3) |
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107 | (2) |
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7 Laser healing of microcracks in glass |
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109 | (14) |
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109 | (1) |
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7.2 Formation of cracks in mechanical processes |
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109 | (1) |
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7.3 Laser healing methods |
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110 | (2) |
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7.4 Laser response of individual cracks |
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112 | (7) |
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7.5 Healing a rough surface |
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119 | (1) |
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120 | (3) |
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8 Laser recovery of silicon single crystals |
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123 | (20) |
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123 | (1) |
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8.2 Improvement in surface quality |
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123 | (9) |
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132 | (5) |
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8.4 Laser recovery of curved surfaces |
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137 | (4) |
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141 | (1) |
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142 | (1) |
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9 Surface modification of silicon carbide |
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143 | (16) |
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143 | (1) |
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9.2 Change in atomic composition |
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143 | (2) |
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9.3 Change in surface roughness |
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145 | (2) |
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9.4 Deposition of oxide particles |
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147 | (2) |
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9.5 Effect of irradiation atmosphere |
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149 | (5) |
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9.6 Potential further applications |
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154 | (2) |
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156 | (3) |
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10 Modification of surface property of alumina sprayed coating |
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159 | (10) |
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159 | (1) |
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10.2 Phase transformation in granular materials |
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160 | (2) |
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10.3 Change in subsurface microstructure |
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162 | (2) |
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10.4 Change in surface hardness |
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164 | (2) |
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10.5 Further applications |
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166 | (1) |
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166 | (3) |
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11 Laser sintering of silicon powder and carbon nanofibers |
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169 | (12) |
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169 | (1) |
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11.2 Silicon-carbon composite anode fabrication |
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169 | (5) |
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11.3 Control of ciystallinity |
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174 | (1) |
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11.4 Application of film electrodes |
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175 | (2) |
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177 | (1) |
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11.6 Effect of laser type |
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177 | (1) |
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178 | (3) |
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12 Micropillar formation from silicon powder |
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181 | (16) |
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181 | (1) |
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12.2 Mechanism of micropillar formation |
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181 | (2) |
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12.3 Factors affecting pillar growth |
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183 | (4) |
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12.4 Pillar crystallinity and internal structure |
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187 | (1) |
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12.5 Application of micropillar electrodes |
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188 | (1) |
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12.6 Further possible applications |
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189 | (1) |
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12.7 Silicon nanoparticle generation |
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190 | (4) |
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194 | (3) |
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13 Surface nanostructuring of hard brittle materials |
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197 | (16) |
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197 | (1) |
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13.2 Simple nanostructures on silicon |
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197 | (4) |
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13.3 Laser-induced periodic surface structure formation |
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201 | (7) |
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13.4 Three-dimensional structures |
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208 | (2) |
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210 | (3) |
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213 | (12) |
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213 | (1) |
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14.2 Guidelines for the application of laser processing |
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214 | (2) |
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14.3 Future challenges in laser processing |
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216 | (5) |
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14.4 Extension to other classes of materials |
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221 | (1) |
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221 | (4) |
Index |
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225 | |