Foreword |
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xi | |
Preface |
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xiii | |
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xv | |
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xvii | |
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1 | (14) |
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1.1 The Birth of the Transistor |
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1 | (1) |
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1.2 The Metal-Oxide--Semiconductor Field-Effect Transistor |
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1 | (1) |
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1.3 Moore's Law, Limits of CMOS Scaling, and Alternative MOSFET Structures |
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2 | (2) |
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1.3.1 Scaling in Bulk MOSFETs |
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2 | (1) |
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1.3.2 Silicon-on-Insulator MOSFETs |
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3 | (1) |
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1.4 The Junctionless Concept |
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4 | (5) |
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1.4.1 Working Principle of Junctionless MOSFETs |
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4 | (2) |
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1.4.2 Diversity in Junctionless Architectures |
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6 | (3) |
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1.5 Short-Channel Effects in Junctionless FETs |
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9 | (1) |
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1.6 Mobility in Junctionless FETs |
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10 | (1) |
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1.7 The Critical Aspect of Random Dopant Fluctuation |
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11 | (3) |
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1.7.1 Random Dopant Fluctuations in Junctionless FETs |
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12 | (2) |
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14 | (1) |
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2 Review on Modeling Junctionless FETs |
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15 | (14) |
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2.1 Modeling Junctionless Double-Gate MOSFETs |
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15 | (10) |
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2.1.1 Full Depletion Approximation |
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15 | (2) |
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2.1.2 Enhanced Depletion Approximation |
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17 | (1) |
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2.1.3 Surface Potential-based Approach |
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17 | (2) |
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2.1.4 Simplified Current Model Involving Pinch-Off |
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19 | (1) |
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2.1.5 Semiempirical Charge-based Approach |
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20 | (1) |
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2.1.6 Analytical Approach based on Conventional Inversion-Mode MOSFETs |
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20 | (1) |
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2.1.7 Parabolic Approximation and Full-Range Drain Current |
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20 | (1) |
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2.1.8 Gaussian Distribution of Mobile Charge Density |
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21 | (1) |
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2.1.9 Simple Model to Estimate Junctionless FET Performances |
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22 | (1) |
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2.1.10 Explicit Drain Current Model Relying on Charge-based Approach |
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23 | (1) |
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2.1.11 Modeling of Quantum Mechanical Effects |
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23 | (1) |
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2.1.12 Short-Channel Effects in Subthreshold |
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24 | (1) |
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2.1.13 Transcapacitance Modeling |
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25 | (1) |
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2.1.14 Modeling Asymmetry in Junctionless Double-Gate MOSFETs |
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25 | (1) |
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2.2 Modeling Junctionless Nanowire MOSFETs |
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25 | (3) |
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2.2.1 Short-Channel Effects in the Subthreshold |
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27 | (1) |
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2.2.2 Transcapacitance Modeling in Junctionless Nanowire FETs |
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27 | (1) |
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2.2.3 Quantum Mechanical Effects in Junctionless Nanowire FETs |
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28 | (1) |
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28 | (1) |
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3 The EPFL Charge-based Model of Junctionless Field-Effect Transistors |
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29 | (31) |
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3.1 Charge-based Modeling of Junctionless Double-Gate Field-Effect Transistors |
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29 | (21) |
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3.1.1 Recalling Basics of Semiconductor Statistics |
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29 | (3) |
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3.1.2 Approximate Solution of the Poisson--Boltzmann Equation in Junctionless Double-Gate MOSFET |
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32 | (3) |
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3.1.3 Introduction of Symmetric Gate Capacitances |
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35 | (1) |
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3.1.4 Derivation of Explicit Voltage--Charge Relationships |
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36 | (2) |
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3.1.5 Analytical versus Numerical Simulations |
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38 | (3) |
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3.1.6 Threshold Voltage in Junctionless FETs |
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41 | (1) |
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3.1.7 Derivation of the Channel Current |
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41 | (3) |
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3.1.8 Evaluation of the Charge Integral |
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44 | (1) |
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3.1.9 General Treatment of the Current in Junctionless Double-Gate MOSFETs |
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45 | (1) |
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3.1.10 Simulation Results |
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46 | (4) |
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3.2 A Common Core Model for Junctionless Nanowires and Symmetric DG FETs |
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50 | (5) |
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3.2.1 Analysis of Electrostatics in Junctionless Nanowire FETs |
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50 | (3) |
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3.2.2 Derivation of the Current in a Junctionless Nanowire |
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53 | (1) |
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53 | (2) |
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3.3 Explicit Model for Long-Channel Gate-All-Around Junctionless MOSFETs |
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55 | (3) |
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3.3.1 Approximated Solution in Depletion |
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57 | (1) |
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3.3.2 Approximated Solution in Accumulation Mode |
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58 | (1) |
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3.3.3 Approximated Solution in Weak Accumulation Mode |
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58 | (1) |
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58 | (2) |
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4 Model-Driven Design-Space of Junctionless FETs |
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60 | (16) |
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4.1 Off-Current and Inversion Layer in Junctionless FETs |
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60 | (1) |
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4.2 Electrostatics in Junctionless Double-Gate MOSFET including Minority Carriers |
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61 | (14) |
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4.2.1 Role of the Channel Potential |
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64 | (1) |
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4.2.2 Estimation of the Critical Potentials |
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65 | (4) |
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4.2.3 Minimum Mobile Charge Density |
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69 | (1) |
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4.2.4 Estimation of On/Off-Current Ratio in Long-Channel Junctionless FETs |
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69 | (4) |
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4.2.5 Rail-to-Rail Supply Voltage Benchmark |
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73 | (2) |
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75 | (1) |
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5 Generalization of the Charge-based Model: Accounting for Inversion Layers |
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76 | (10) |
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5.1 Electrostatics including Minority Carriers |
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76 | (6) |
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5.1.1 Coexistence of Depletion and Inversion: General Treatment |
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78 | (2) |
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5.1.2 Charge--Voltage Relationships |
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80 | (1) |
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5.1.3 Inversion Layer-Induced Capacitance in Junctionless Double-Gate MOSFET |
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81 | (1) |
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5.2 Simulations and Model Assessments |
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82 | (3) |
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5.2.1 Impact of Hole Layer on Drain Current |
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83 | (2) |
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85 | (1) |
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6 Predicted Performances of Junctionless FETs |
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86 | (6) |
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6.1 Device Scaling Principle |
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86 | (2) |
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6.2 Considerations on Intrinsic-Delay Scaling |
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88 | (3) |
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91 | (1) |
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7 Short-Channel Effects in Symmetric Junctionless Double-Gate FETs |
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92 | (16) |
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7.1 Electrostatics in Short-Channel Junctionless DG MOSFETS in the Subthreshold |
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92 | (6) |
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7.1.1 Approximate Solution of the Potential Distribution |
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93 | (1) |
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7.1.2 Assessment of the Center Potential with Regard to Numerical Simulations |
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94 | (4) |
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7.2 Subthreshold Current, Subthreshold Swing, and DIBL |
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98 | (9) |
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7.2.1 The Minimum Potential |
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98 | (2) |
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7.2.2 Channel Current in Subthreshold |
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100 | (3) |
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7.2.3 Subthreshold Swing in Junctionless FETs |
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103 | (1) |
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7.2.4 DIBL in Junctionless FETs |
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104 | (3) |
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107 | (1) |
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8 Modeling AC Operation in Symmetric Double-Gate and Nanowire JL FETs |
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108 | (31) |
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8.1 Transcapacitance Matrix in Symmetric Double-Gate FETs |
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108 | (2) |
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110 | (6) |
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8.2.1 Expressing dy versus dVch |
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111 | (1) |
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8.2.2 Expressing Qm(y)dVch |
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112 | (1) |
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8.2.3 Expressing y/LG versus Qm(y) |
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112 | (4) |
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8.3 Special Case of a Channel Uniformly Depleted/Accumulated |
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116 | (3) |
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8.3.1 Channel in Depletion Mode |
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116 | (2) |
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8.3.2 Channel in Accumulation Mode |
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118 | (1) |
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8.4 Analytical Expressions for the Local Charge Derivatives |
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119 | (2) |
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8.5 Simulations and Discussion |
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121 | (3) |
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8.6 Cubic Approximation of Qm(y) and Transcapacitances |
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124 | (6) |
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124 | (2) |
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126 | (1) |
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8.6.3 Evaluation of Flat-Band Position along the Hybrid Channel |
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127 | (1) |
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8.6.4 Evaluation of the Transcapacitances |
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127 | (3) |
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8.7 Transcapacitances in Gate-All-Around Junctionless Nanowire FETs |
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130 | (2) |
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8.7.1 Equivalent Parameters Definition |
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130 | (1) |
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131 | (1) |
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8.8 A Simplified Approach to Transcapacitance Modeling in Junctionless Nanowire FETs |
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132 | (6) |
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8.8.1 Channel in Depletion Mode |
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133 | (2) |
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8.8.2 Channel in Accumulation Mode |
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135 | (3) |
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138 | (1) |
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9 Modeling Asymmetric Operation of Double-Gate Junctionless FETs |
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139 | (16) |
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9.1 General Considerations in Asymmetric Junctionless Double-Gate FETs |
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139 | (3) |
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9.2 Analysis Restricted to Depletion or Accumulation |
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142 | (6) |
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9.2.1 Potential Extremum Inside the Channel |
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142 | (3) |
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9.2.2 Extremum Potential Outside the Channel |
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145 | (1) |
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9.2.3 The Iterative Solution |
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146 | (1) |
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146 | (2) |
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9.3 Coexistence of Depletion and Accumulation |
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148 | (2) |
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9.3.1 Modeling Depleted--Accumulated Channels |
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148 | (1) |
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9.3.2 Simplifying Assumptions |
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149 | (1) |
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9.3.3 Assessment of Continuity at the Transition Coordinates |
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149 | (1) |
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9.4 Derivation of the Current |
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150 | (1) |
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151 | (2) |
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9.5.1 Potential Induced Asymmetry |
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151 | (1) |
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9.5.2 Structural Asymmetry |
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151 | (1) |
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9.5.3 Approximate Expression for the Current |
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151 | (2) |
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153 | (1) |
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153 | (2) |
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10 Modeling Noise Behavior in Junctionless FETs |
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155 | (9) |
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10.1 Thermal-Noise Modeling |
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155 | (4) |
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10.2 Induced Gate Noise in Junctionless FET |
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159 | (2) |
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10.3 Cross-Correlation Noise in Junctionless FETs |
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161 | (2) |
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163 | (1) |
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11 Carrier Mobility Extraction Methodology in JL and Inversion-Mode FETs |
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164 | (10) |
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11.1 Y Function and Mobility Extraction in Junctionless FETs |
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164 | (2) |
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11.2 Model-Independent Mobility-Extraction Method in Junctionless FETs |
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166 | (5) |
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166 | (3) |
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11.2.2 Mobility Extraction in Double-Gate Junctionless FETs |
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169 | (1) |
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11.2.3 A Simplified Approach |
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170 | (1) |
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11.3 Extending the Method to Inversion-Mode FETs |
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171 | (1) |
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172 | (1) |
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173 | (1) |
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12 Revisiting the Junction FET: A Junctionless FET with an ∞ Gate Capacitance |
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174 | (9) |
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12.1 Principle Operation of the JFET |
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174 | (1) |
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12.2 Charge-based Modeling of Double-Gate JFETs |
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175 | (2) |
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12.2.1 Charge--Voltage and Pinch-Off Voltage in Double-Gate JFETs |
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175 | (1) |
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12.2.2 Channel Current in Double-Gate JFETs |
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176 | (1) |
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177 | (1) |
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12.3 Modeling Small Signals in JFETs |
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177 | (5) |
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177 | (2) |
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12.3.2 Transcapacitances in JFET |
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179 | (2) |
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181 | (1) |
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182 | (1) |
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13 Modeling Junctionless FET with Interface Traps Targeting Biosensor Applications |
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183 | (14) |
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13.1 Principle of Semiconductor-based Field-Effect Biosensors |
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183 | (2) |
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13.2 Modeling Surface Traps in Junctionless FETs |
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185 | (12) |
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13.2.1 General Considerations for Interface Traps |
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185 | (1) |
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13.2.2 Modeling Trapped Charges at the Semiconductor/Insulator Interface in Junctionless FETs |
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186 | (6) |
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13.2.3 Current Derivation |
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192 | (1) |
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13.2.4 The Case of Continuous Energy-Trap Distribution |
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193 | (2) |
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195 | (2) |
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Appendix A Design-Space of Twin-Gate Junctionless Vertical Slit FETs |
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197 | (3) |
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A.1 Design-Space of Twin-Gate Junctionless Vertical Slit FETs |
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197 | (3) |
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197 | (1) |
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A.1.2 Electrostatics in Junctionless VeSFET and Design-Space |
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197 | (3) |
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Appendix B Transient Off-Current in Junctionless FETs |
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200 | (3) |
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Appendix C Derivatives of Mobile Charge Density with Respect to VGS and VDS |
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203 | (1) |
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Appendix D Global Charge Density at Drain in Depletion Mode |
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204 | (2) |
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Appendix E Global Charge Density at Drain in Accumulation Mode |
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206 | (2) |
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Appendix F The EPFL Junctionless MODEL |
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208 | (7) |
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F.1 The EPFL-Junctionless Model Modules |
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208 | (1) |
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F.2 Source Code Modules and Library |
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209 | (1) |
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F.3 DC Implementation in Junctionless FETs |
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210 | (1) |
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F.4 AC Implementation in Junctionless FETs |
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211 | (2) |
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F.5 Junctionless Double-Gate and Nanowire FET Amplifier |
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213 | (1) |
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F.6 Junctionless Double-Gate and Nanowire FET Inverter |
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214 | (1) |
References |
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215 | (16) |
Index |
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231 | |