Contents |
|
v | |
Preface |
|
xiii | |
|
|
1 | (12) |
|
Compact MOSFET Modeling for Circuit Simulation |
|
|
1 | (4) |
|
The Trends of Compact MOSFET Modeling |
|
|
5 | (8) |
|
Modeling new physical effects |
|
|
5 | (1) |
|
High frequency (HF) analog compact models |
|
|
6 | (1) |
|
Simulation robustness and efficiency |
|
|
7 | (1) |
|
|
8 | (1) |
|
|
8 | (5) |
|
Significant Physical Effects In Modern MOSFETs |
|
|
13 | (52) |
|
MOSFET Classification and Operation |
|
|
13 | (5) |
|
Strong inversion region (Vgs>Vth) |
|
|
17 | (1) |
|
Weak and moderate inversion or the subthreshold region |
|
|
18 | (1) |
|
Effects Impacting the Threshold Voltage |
|
|
18 | (12) |
|
Non-uniform doping effects |
|
|
19 | (4) |
|
Normal short channel effects |
|
|
23 | (1) |
|
Reverse short channel effects |
|
|
23 | (2) |
|
Normal narrow-width effects |
|
|
25 | (2) |
|
Reverse narrow-width effects |
|
|
27 | (1) |
|
Body bias effect and bulk charge effect |
|
|
28 | (2) |
|
|
30 | (7) |
|
|
33 | (1) |
|
|
33 | (1) |
|
|
34 | (3) |
|
|
37 | (2) |
|
|
39 | (2) |
|
Channel Length Modulation |
|
|
41 | (3) |
|
Substrate Current Due to Impact Ionization |
|
|
44 | (4) |
|
Polysilicon Gate Depletion |
|
|
48 | (3) |
|
Velocity Overshoot Effects |
|
|
51 | (2) |
|
|
53 | (2) |
|
Inversion Layer Quantization Effects |
|
|
55 | (10) |
|
|
57 | (8) |
|
|
65 | (40) |
|
Threshold Voltage Model for Long Channel Devices |
|
|
65 | (2) |
|
Threshold Voltage Model with Short Channel Effects |
|
|
67 | (10) |
|
|
68 | (3) |
|
Quasi 2-D models for drain induced barrier lowering effect |
|
|
71 | (6) |
|
Narrow Width Effect Model |
|
|
77 | (3) |
|
Threshold Voltage Model in BSIM3v3 |
|
|
80 | (12) |
|
Modeling of the vertical non-uniform doping effects |
|
|
80 | (3) |
|
Modeling of the RSCE due to lateral non-uniform channel doping |
|
|
83 | (2) |
|
Modeling of the short channel effect due to drain induced barrier lowering |
|
|
85 | (3) |
|
Modeling of the narrow width effects |
|
|
88 | (2) |
|
Complete Vth model in BSIM3v3 |
|
|
90 | (2) |
|
|
92 | (13) |
|
|
101 | (4) |
|
|
105 | (38) |
|
Essential Equations Describing the I-V Characteristics |
|
|
105 | (1) |
|
Channel Charge Density Model |
|
|
106 | (8) |
|
Channel charge model in the strong inversion region |
|
|
106 | (1) |
|
Channel charge model in the subthreshold region |
|
|
107 | (2) |
|
Continuous channel charge model of BSIMv3 |
|
|
109 | (3) |
|
Continuous channel charge model with the effect of Vds |
|
|
112 | (2) |
|
|
114 | (3) |
|
Piece-wise mobility models |
|
|
114 | (2) |
|
Mobility models in BSIM3v3 |
|
|
116 | (1) |
|
I-V Model in the Strong Inversion Region |
|
|
117 | (7) |
|
I-V model in the linear (triode) region |
|
|
117 | (1) |
|
Drain voltage at current saturation, Vdsat |
|
|
118 | (2) |
|
Current and output resistance in the saturation region |
|
|
120 | (4) |
|
|
124 | (1) |
|
Single Equation I-V model of BSIMv3 |
|
|
125 | (4) |
|
Polysilicon Gate Depletion Effect |
|
|
129 | (1) |
|
|
130 | (13) |
|
|
140 | (3) |
|
|
143 | (68) |
|
Capacitance Components in a MOSFET |
|
|
144 | (1) |
|
Intrinsic Capacitance Model |
|
|
145 | (16) |
|
|
145 | (6) |
|
Shortcomings of the Meyer model |
|
|
151 | (3) |
|
Charge-based capacitance model |
|
|
154 | (7) |
|
Extrinsic Capacitance Model |
|
|
161 | (2) |
|
Capacitance Model of BSIM3v3 |
|
|
163 | (34) |
|
Long channel capacitance model (capMod=0) |
|
|
164 | (6) |
|
Short channel capacitance (capMod=1) |
|
|
170 | (8) |
|
Single-equation short channel capacitance model (capMod=2) |
|
|
178 | (8) |
|
Short channel capacitance model with quantization effect (capMod=3) |
|
|
186 | (11) |
|
Channel Length/Width in Capacitance Model |
|
|
197 | (1) |
|
|
198 | (13) |
|
|
207 | (4) |
|
|
211 | (8) |
|
Substrate Current Generation |
|
|
211 | (1) |
|
Substrate Current Model in BSIM3v3 |
|
|
212 | (3) |
|
|
215 | (4) |
|
|
217 | (2) |
|
|
219 | (24) |
|
The Physical Mechanisms of Flicker (1/f) Noise |
|
|
219 | (1) |
|
The Physical Mechanism of Thermal Noise |
|
|
220 | (1) |
|
Flicker Noise Models in BSIM3v3 |
|
|
221 | (8) |
|
SPICE2 flicker noise model (noiMod=1) |
|
|
221 | (1) |
|
Unified flicker noise model (noiMod=2) |
|
|
222 | (7) |
|
Thermal Noise Models in BSIM3v3 |
|
|
229 | (4) |
|
Modified SPICE2 thermal noise model (noiMod=1) |
|
|
230 | (1) |
|
BSIM3 thermal noise model (noiMod=2) |
|
|
230 | (3) |
|
|
233 | (10) |
|
|
240 | (3) |
|
Source/Drain Parasitics Model |
|
|
243 | (20) |
|
Parasitic Components in a MOSFET |
|
|
243 | (1) |
|
Models of Parasitic Components in BSIM3v3 |
|
|
244 | (10) |
|
Source and drain series resistances |
|
|
244 | (4) |
|
DC model of the source/drain diodes |
|
|
248 | (2) |
|
Capacitance model of the source/bulk and drain/bulk diodes |
|
|
250 | (4) |
|
|
254 | (9) |
|
|
261 | (2) |
|
Temperature Dependence Model |
|
|
263 | (18) |
|
Temperature Effects in a MOSFET |
|
|
263 | (2) |
|
Temperature Dependence Models in BSIM3v3 |
|
|
265 | (5) |
|
Comparison of the Temperature-Effect Models with Measured Data |
|
|
270 | (6) |
|
|
276 | (5) |
|
|
279 | (2) |
|
Non-quasi Static (NQS) Model |
|
|
281 | (22) |
|
The Necessity of Modeling NQS Effects |
|
|
281 | (3) |
|
|
284 | (8) |
|
Physics basis and model derivation |
|
|
284 | (5) |
|
|
289 | (3) |
|
Test Results of the NQS Model |
|
|
292 | (5) |
|
|
297 | (6) |
|
|
301 | (2) |
|
BSIM3v3 Model Implementation |
|
|
303 | (24) |
|
General Structure of BSIM3v3 Model Implementation |
|
|
303 | (3) |
|
Robustness Consideration in the Implementation of BSIM3v3 |
|
|
306 | (9) |
|
Testing of Model Implementation |
|
|
315 | (2) |
|
Model Selectors of BSIM3v3 |
|
|
317 | (2) |
|
|
319 | (8) |
|
|
324 | (3) |
|
|
327 | (26) |
|
Requirements for a MOSFET Model in Circuit Simulation |
|
|
327 | (2) |
|
|
329 | (4) |
|
|
333 | (17) |
|
|
350 | (3) |
|
|
351 | (2) |
|
Model Parameter Extraction |
|
|
353 | (22) |
|
Overview of Model Parameter Extraction |
|
|
353 | (2) |
|
Parameter Extraction for BSIM3v3 |
|
|
355 | (12) |
|
Optimization and extraction strategy |
|
|
355 | (1) |
|
|
355 | (12) |
|
|
367 | (1) |
|
Recommended Value Range of the Model Parameters |
|
|
368 | (4) |
|
Automated Parameter Extraction Tool |
|
|
372 | (3) |
|
|
373 | (2) |
|
RF and Other Compact Model Applications |
|
|
375 | (34) |
|
|
375 | (18) |
|
Modeling of the gate resistance |
|
|
376 | (7) |
|
Modeling the substrate network |
|
|
383 | (2) |
|
A RF MOSFET model based on BSIM3v3 for GHz communication IC's |
|
|
385 | (8) |
|
|
393 | (6) |
|
Technology Extrapolation and Prediction Using BSIM3 Model |
|
|
399 | (10) |
|
|
406 | (3) |
Appendix A BSIM3v3 Parameter Table |
|
409 | (12) |
|
A.1 Model control parameters |
|
|
409 | (1) |
|
|
410 | (1) |
|
A.3 Parameters for Vth model |
|
|
410 | (1) |
|
A.4 Parameters for I-V model |
|
|
411 | (3) |
|
A.5 Parameters for capacitance model |
|
|
414 | (1) |
|
A.6 Parameters for effective channel length/width in I-V model |
|
|
415 | (1) |
|
A.7 Parameters for effective channel length/width in C-V model |
|
|
416 | (1) |
|
A.8 Parameters for substrate current model |
|
|
417 | (1) |
|
A.9 Parameters for noise models |
|
|
417 | (1) |
|
A.10 Parameters for models of parasitic components |
|
|
418 | (1) |
|
A.11 Parameters for models of temperature effects |
|
|
419 | (1) |
|
A.12 Parameters for NQS model |
|
|
420 | (1) |
Appendix B BSIM3v3 Model Equations |
|
421 | (28) |
|
|
421 | (1) |
|
|
422 | (1) |
|
|
423 | (1) |
|
B.4 Drain saturation voltage |
|
|
423 | (1) |
|
|
424 | (1) |
|
B.6 Drain current expression |
|
|
424 | (1) |
|
|
425 | (1) |
|
B.8 Polysilicon depletion effect |
|
|
426 | (1) |
|
B.9 Effective channel length and width |
|
|
426 | (1) |
|
B.10 Drain/Source resistance |
|
|
426 | (1) |
|
B.11 Capacitance model equations |
|
|
426 | (14) |
|
B.12 Noise model equations |
|
|
440 | (3) |
|
B.13 DC model of the source/drain diodes |
|
|
443 | (1) |
|
B.14 Capacitance model of the source/bulk and drain/bulk diodes |
|
|
444 | (1) |
|
|
445 | (2) |
|
|
447 | (1) |
|
B.17 A note on the poly-gate depletion effect |
|
|
448 | (1) |
Appendix C Enhancements and Changes in BSIM3v3.1 versus BSIM3v3.0 |
|
449 | (6) |
|
|
449 | (1) |
|
|
449 | (6) |
Appendix D Enhancements and Changes in BSIM3v3.2 versus BSIM3v3.1 |
|
455 | (4) |
|
|
455 | (1) |
|
|
456 | (3) |
Index |
|
459 | |