| Preface |
|
vii | |
|
1 Conventional SEM Design |
|
|
1 | (70) |
|
1.1 Introduction to the SEM |
|
|
2 | (7) |
|
1.2 Basic principles of electron optics |
|
|
9 | (10) |
|
|
|
19 | (5) |
|
1.4 Lens aberrations and primary beam probe size |
|
|
24 | (12) |
|
|
|
36 | (6) |
|
1.6 Quadrupole stigmators |
|
|
42 | (6) |
|
|
|
48 | (3) |
|
1.8 The emission hemisphere and BSE collection |
|
|
51 | (2) |
|
1.9 The scattered electron energy distribution |
|
|
53 | (2) |
|
1.10 The SE collection efficiency |
|
|
55 | (4) |
|
|
|
59 | (2) |
|
|
|
61 | (3) |
|
1.13 Selected SEM image examples |
|
|
64 | (7) |
|
2 Spectrometer Design Principles |
|
|
71 | (64) |
|
|
|
72 | (4) |
|
|
|
76 | (2) |
|
2.3 The retarding field analyzer |
|
|
78 | (5) |
|
2.4 Deflection field analyzers |
|
|
83 | (52) |
|
2.4.1 The parallel plate analyzer |
|
|
83 | (13) |
|
2.4.2 The cylindrical mirror analyzer |
|
|
96 | (5) |
|
2.4.3 Electric sector analyzers |
|
|
101 | (12) |
|
2.4.4 Magnetic deflector analyzers |
|
|
113 | (11) |
|
|
|
124 | (7) |
|
2.4.6 Magnetic collimation and time of flight spectrometers |
|
|
131 | (4) |
|
|
|
135 | (50) |
|
3.1 Magnetic immersion lenses |
|
|
135 | (8) |
|
3.2 Magnetic semi-in-lens designs |
|
|
143 | (13) |
|
3.3 Electric retarding field lenses |
|
|
156 | (8) |
|
3.4 Mixed field in-lens designs |
|
|
164 | (12) |
|
3.5 Selected in-lens image examples |
|
|
176 | (9) |
|
4 Sub-nanometer Probe Diameters |
|
|
185 | (38) |
|
4.1 Monochromators and immersion objective lenses |
|
|
185 | (13) |
|
4.2 Aberration correctors |
|
|
198 | (20) |
|
4.3 The helium ion microscope |
|
|
218 | (5) |
|
5 Secondary Electron Spectrometers |
|
|
223 | (40) |
|
5.1 Early deflection analyzers |
|
|
223 | (3) |
|
5.2 Retarding field analyzers |
|
|
226 | (11) |
|
5.3 Surface fields and signal-to-noise characteristics |
|
|
237 | (7) |
|
5.4 Deflection/multi-channel analyzers |
|
|
244 | (19) |
|
6 Full Range Deflector Spectrometer Designs |
|
|
263 | (24) |
|
6.1 First-order focusing toroidal analyzers |
|
|
265 | (5) |
|
6.2 A second-order focusing toroidal analyzer design |
|
|
270 | (11) |
|
6.3 A modified fountain analyzer design |
|
|
281 | (6) |
|
7 Full Range Parallel Energy Spectrometer Designs |
|
|
287 | (32) |
|
7.1 The time-of-flight spectrometer |
|
|
290 | (3) |
|
7.2 A Gaussian field magnetic sector |
|
|
293 | (8) |
|
7.3 A round magnetic beam separator |
|
|
301 | (18) |
|
8 Spectroscopic SEM Proposals |
|
|
319 | (8) |
| Appendix 1.0 Field Expansions |
|
327 | (10) |
| Appendix 1.1 Derivation of the Paraxial Equation |
|
337 | (12) |
| Appendix 1.2 Spherical Aberration |
|
349 | (16) |
| Appendix 1.3 Chromatic Aberration |
|
365 | (10) |
| Appendix 2 Multipole Lenses |
|
375 | (10) |
| Bibliography |
|
385 | (14) |
| Index |
|
399 | |
Lisainfo e-raamatute kohta