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E-raamat: Optical, Acoustic, Magnetic, and Mechanical Sensor Technologies

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Light on physics and math, with a heavy focus on practical applications, Optical, Acoustic, Magnetic, and Mechanical Sensor Technologies discusses the developments necessary to realize the growth of truly integrated sensors for use in physical, biological, optical, and chemical sensing, as well as future micro- and nanotechnologies.

Used to pick up sound, movement, and optical or magnetic signals, portable and lightweight sensors are perpetually in demand in consumer electronics, biomedical engineering, military applications, and a wide range of other sectors. However, despite extensive existing developments in computing and communications for integrated microsystems, we are only just now seeing real transformational changes in sensors, which are critical to conducting so many advanced, integrated tasks.

This book is designed in two sectionsOptical and Acoustic Sensors and Magnetic and Mechanical Sensorsthat address the latest developments in sensors.

The first part covers:











Optical and acoustic sensors, particularly those based on polymer optical fibers Potential of integrated optical biosensors and silicon photonics Luminescent thermometry and solar cell analyses Description of research from United States Army Research Laboratory on sensing applications using photoacoustic spectroscopy Advances in the design of underwater acoustic modems

The second discusses:











Magnetic and mechanical sensors, starting with coverage of magnetic field scanning Some contributors personal accomplishments in combining MEMS and CMOS technologies for artificial microsystems used to sense airflow, temperature, and humidity MEMS-based micro hot-plate devices Vibration energy harvesting with piezoelectric MEMS Self-powered wireless sensing

As sensors inevitably become omnipresent elements in most aspects of everyday life, this book assesses their massive potential in the development of interfacing applications for various areas of product design and sciencesincluding electronics, photonics, mechanics, chemistry, and biology, to name just a few.

Arvustused

"The theory and operation of intensity and phase-based- and wavelength-based-fibers sensors are nicely reviewed. ... Coverage that may interest our readers includes scanning of magnetic fields, microsystems for sensing airflow, temperature and humidity by combining MEMS and CMOS technologies, MEMS-based hotplate devices for gas sensing applications, vibration energy harvesting methods using piezoelectric based MEMS, and self-powered wireless sensing in ground transport applications. ... Because mathematical details and in-depth theory are not thoroughly reviewed, the presented material is descriptive in nature and includes many illustrations, making this book very accessible to a general technical audience interested in sensing technology."

John J. Shea, IEEE Electrical Insulation Magazine, March/April, Vol. 29, No.2, 2013 "The theory and operation of intensity and phase-based- and wavelength-based-fibers sensors are nicely reviewed. ... Coverage that may interest our readers includes scanning of magnetic fields, microsystems for sensing airflow, temperature and humidity by combining MEMS and CMOS technologies, MEMS-based hotplate devices for gas sensing applications, vibration energy harvesting methods using piezoelectric based MEMS, and self-powered wireless sensing in ground transport applications. ... Because mathematical details and in-depth theory are not thoroughly reviewed, the presented material is descriptive in nature and includes many illustrations, making this book very accessible to a general technical audience interested in sensing technology."John J. Shea, IEEE Electrical Insulation Magazine, March/April, Vol. 29, No.2, 2013

Preface vii
Editor ix
Contributors xi
PART 1 Optical and Acoustic Sensors
Chapter 1 Optical Fiber Sensors
3(24)
Rogerio Nogueira
Lucia Bilro
Nelia Alberto
Hugo Lima
Joao Lemos Pinto
Introduction
3(1)
Intensity-Based Sensors
4(7)
Transmission and Reflection Schemes
4(1)
Macrobending or Microbending Sensors
5(1)
Spectrally Based Sensors
6(2)
Evanescent Wave-Based Sensors
8(1)
Partial or Total Removal of the Cladding
8(1)
Tapers
9(1)
Side Polishing with Core Exposure
10(1)
Self-Reference Techniques
11(1)
Phase-Based Sensors
11(3)
Phase Detection
11(1)
Mach-Zehnder
12(1)
Michelson
12(1)
Fabry-Perot
12(1)
Sagnac
13(1)
Polarization Control
13(1)
Wavelength-Based Sensors
14(5)
Multiparameter Sensors
17(2)
FBG Inscription Methods
19(2)
Interrogation of FBG Sensors
21(1)
References
22(5)
Chapter 2 Sensors Based on Polymer Optical Fibers: Microstructured and Solid Fibers
27(18)
Christian-Alexander Bunge
Hans Poisel
Overview
27(3)
General Requirements and Sensing Effects
28(2)
Sensors Based on Microstructured POFs
30(3)
Mechanical Sensing with Fiber Using Gratings
30(1)
Sensing of Fluids
31(1)
Spectroscopy Using Evanescent-Field Interaction
32(1)
Solid POF Sensors
33(8)
Attenuation
33(1)
Attenuation due to Microbending
33(1)
Attenuation due to Change of Refractive Index
34(1)
Reflection
35(1)
Capture of Reflected Light
35(2)
Mechanical Properties Using OTDR
37(1)
Elongation
38(2)
Temperature Sensors Based on Fluorescence
40(1)
Sensor Multiplexing by Fiber Bundles
41(1)
Conclusion
42(1)
References
43(3)
Chapter 3 Label-Free Biosensors for Biomedical Applications: The Potential of Integrated Optical Biosensors and Silicon Photonics
45(34)
Jeffrey W. Chamberlain
Daniel M. Ratner
Introduction
46(4)
Desired Biosensor Characteristics
46(1)
Sensitivity and Selectivity
46(1)
Label-Free
47(1)
Multiplexing
48(1)
General Label-Free Biosensor Setup and Operation
49(1)
Toward Fully Integrated Biosensors
50(4)
Silicon Photonics for Device Integration
51(1)
A Note on Classification
51(1)
Why Silicon?
51(1)
Waveguides: Fabrication and Basic Principles
52(2)
Label-Free Biosensors
54(13)
Electrochemical Biosensors
54(1)
Electrical Impedance Spectroscopy with Microelectrodes
54(1)
Nanofield Effect Transistors
55(1)
Mechanical Biosensors
56(1)
Microelectromechanical and Nanoelectromechanical Systems
56(2)
Optical Biosensors
58(1)
SPR and SPRi
58(2)
Grating-Based Sensors
60(1)
Interferometric Sensors
61(3)
Resonant Cavity Sensors
64(3)
Outlook and Conclusions
67(1)
Acknowledgments
68(1)
References
68(11)
Chapter 4 Luminescent Thermometry for Sensing Rapid Thermal Profiles in Fires and Explosions
79(28)
Joseph J. Talghader
Merlin L. Mah
Introduction
79(2)
TL as a Thermometer
81(8)
Basics of Trap Luminescence
82(3)
TL for Temperature and Thermal History Measurement
85(4)
Microheaters
89(3)
A Sample Process
92(3)
Thermal History Modeling and Reconstruction
95(5)
Sensor Survival
100(3)
Conclusion and Future Directions
103(1)
Acknowledgments
103(1)
References
104(3)
Chapter 5 Solar Cell Analyses with Ultraviolet-Visible-Near-Infrared Spectroscopy and I-V Measurements
107(32)
Andreas Stadler
Ultraviolet-Visible-Near-Infrared (UV-Vis-NIR) Spectroscopy
107(1)
Correct and Efficient Theory for Thin-Film Investigations: Single-Layer Model
108(14)
Surfaces, Interfaces, and Bulks of Materials: Reflections, Transmissions, and Absorptions
108(2)
Exact and Complex Parameter Extraction for a Single Layer
110(1)
Refractive Indices and Absorption Coefficients
110(4)
Light Velocities, Permittivities, Wavelengths, Wave Numbers, Layer Thicknesses, and Deposition Rates
114(1)
Band Gap Energies and Conductivities
114(3)
Effective Dopant Concentrations, Mobilities, and Lifetimes
117(4)
Approximate Parameter Extraction for a Multilayered System
121(1)
Quantum Mechanical Potential Barrier Models
122(2)
Single-Layer Model
122(1)
Keradec-Swanepoel Model
123(1)
Current-Voltage (I-V) Measurements
124(14)
Ideal and Real I-V Characteristic
124(5)
Maximum Power Rectangle
129(1)
Solar Spectrum and I-V Curve
130(4)
Quantum Efficiency
134(4)
References
138(1)
Chapter 6 Sensing Applications Using Photoacoustic Spectroscopy
139(36)
Ellen L. Holthoff
Paul M. Pellegrino
Introduction
139(1)
Fundamentals of Photoacoustics
140(15)
Photothermal Phenomena
140(1)
Photoacoustic Spectroscopy
140(2)
Experimental Arrangements for PA Detection
142(1)
Radiation Sources
143(5)
Acoustic Resonators
148(4)
Detectors
152(3)
PA Sensing Applications
155(9)
Gaseous Samples
155(5)
Liquid Samples
160(1)
Solid Samples
161(2)
Standoff Detection
163(1)
Conclusions and Outlook
164(2)
References
166(10)
Chapter 7 Design of a Low-Cost Underwater Acoustic Modem
175(38)
Bridget Benson
Ryan Kastner
PART 2 Magnetic and Mechanical Sensors
Introduction
176(1)
Transducer Design
177(7)
Piezo Ceramics
178(1)
Type
178(1)
Geometry
178(2)
Transducer Construction
180(1)
Wiring
180(1)
Potting
180(2)
Calibration Procedure
182(1)
Experimental Measurements
182(1)
Summary
183(1)
Analog Transceiver Design
184(4)
Power Amplifier Design
184(1)
Power Management Circuit
185(1)
Impedance Matching
185(2)
Preamplifier Design
187(1)
Summary
188(1)
Digital Design
188(10)
Modulation Schemes
189(1)
Frequency Shift Keying
189(1)
Phase Shift Keying
189(1)
Direct Sequence Spread Spectrum
189(1)
Orthogonal Frequency Division Multiplexing
190(1)
Selection of FSK
190(1)
Hardware Platforms
190(1)
Microcontrollers
191(1)
Digital Signal Processors
191(1)
Application-Specific Processors
191(1)
Field Programmable Gate Arrays
191(1)
Selection of FPGA
192(1)
Digital Transceiver
192(1)
Digital Down Converter
192(2)
Modulator/Demodulator
194(1)
Symbol Synchronizer
194(1)
HW/SW Codesign Controller
195(1)
Resource Requirements
196(2)
Summary
198(1)
System Tests
198(7)
Analog Testing
198(1)
Digital Testing
199(1)
Hard-Wired Tests
199(1)
Bucket Tests
199(2)
Integrated Tests
201(1)
Multipath Measurements
201(1)
Tank Tests
202(1)
Canyon View Pool Tests
203(1)
Westlake Tests
203(1)
Integrated System Test Summary
203(1)
Summary
203(2)
Conclusion
205(1)
References
206(8)
Chapter 8 Accurate Scanning of Magnetic Fields
213(30)
Hendrik Husstedt
Udo Ausserlechner
Manfred Kaltenbacher
Introduction
214(1)
Motivation
214(1)
Approach
214(1)
Outlook
214(1)
Magnetic Sensors
215(2)
Overview
215(1)
Hall Sensors
215(2)
Coordinate Measuring Machine
217(4)
Working Principle
217(1)
Moving Axes
218(2)
Geometrical Probes
220(1)
Measuring the Spatial Dependency of Magnetic Fields
221(4)
Straightforward Approach
221(1)
Magnetic and Coordinate Measuring Machine
222(1)
Parameters of Calibration
223(1)
Measuring the Magnetic Field with Respect to the Geometry of the Field Source
224(1)
Calibration of an MCMM
225(11)
Conductor
225(1)
Method
225(1)
Reference Field
225(1)
Generating the Reference Field
226(1)
Orientation of the Conductor
226(1)
Realization
226(1)
Accuracy Assumption
227(1)
Accurate Angle Calibration
228(1)
Method
228(1)
Magnetic Sensor
228(1)
Misalignment of the Silicon Die
229(3)
Magnetic Reference Field
232(2)
Measurement of Distances
234(1)
Estimation of Accuracy
235(1)
Measurement Example
236(3)
Measurement System
236(1)
Field Source
236(1)
Optical Measurement
237(1)
Magnetic Measurement
238(1)
Conclusion
239(1)
References
240(3)
Chapter 9 Artificial Microsystems for Sensing Airflow, Temperature, and Humidity by Combining MEMS and CMOS Technologies
243(14)
Nicolas Andre
Laurent A. Francis
Bertrand Rue
Denis Flandre
Jean-Pierre Raskin
Introduction
243(1)
Three-Dimensional Microbeams as Airflow Sensors
244(5)
Three-Dimensional Multilayered Cantilevers
244(1)
Fabrication of Cointegrated CMOS 3D Sensors
245(1)
Design of 3D Sensors
246(1)
Flow Sensors
247(1)
Magnetic Sensors
248(1)
Thermal Sensors
249(1)
Thermal Actuators
249(1)
Two-Dimensional Microelectrodes as Hydrophilic Sensors
249(3)
Two-Dimensional Multilayered Microsystems
249(1)
Fabrication of Cointegrated CMOS Humidity Sensors
250(1)
Electrical Characterization of Humidity Sensors
250(2)
Application for Respiratory Rate Detection
252(1)
Conclusion
252(1)
Acknowledgments
253(1)
References
253(5)
Chapter 10 Microelectromechanical System-Based Micro Hot-Plate Devices
257(24)
Jurgen Hildenbrand
Andreas Greiner
Jan G. Korvink
State of the Art
258(1)
Design Process for Micro Hot-Plates
259(11)
Thermal Energy Transfer in Micro Hot-Plates
260(1)
Thermal Conduction
260(1)
Convection
261(1)
Thermal Radiation
262(2)
Hot-Plate Design
264(1)
Heater and Temperature Sensor Layout
265(1)
Material Considerations
265(1)
Heater and Temperature Sensor Design
266(1)
FEM Analysis of Micro Hot-Plates
267(3)
Fabrication
270(2)
Characterization of Micro Hot-Plates
272(2)
Static Electric Investigations
272(1)
Transient Investigations
273(1)
Further Recommended Investigations
274(1)
Micro Hot-Plates for Metal-Oxide-Based Gas Sensors
274(2)
Micro Hot-Plates for Thermal Emitters
276(2)
Acknowledgments
278(1)
References
278(4)
Chapter 11 Vibration Energy Harvesting with Piezoelectric Microelectromechanical Systems
281(34)
Marcin Marzencki
Skandar Basrour
Why Ambient Energy Harvesting?
282(3)
System Architecture
282(1)
Size Matters
283(1)
Ambient Mechanical Vibrations
284(1)
General Model
285(8)
Unidimensional Model
285(3)
Output Power
288(1)
Optimal Resistive Load
288(1)
Influence of Damping
289(1)
Critical Coupling
290(2)
Comparison of Piezoelectric Materials
292(1)
Cantilever Beam Model
293(13)
Specificity of MEMS
294(1)
Thin-Layered Piezoelectric Materials
294(1)
Geometry of the Modeled Device
295(2)
Boundary Conditions
297(1)
Piezoelectric Coupling
298(1)
Damping Types
298(1)
System Dynamics
299(1)
Modeling Results
300(1)
Comparison with FEM
301(2)
Comparison with Experimental Data
303(2)
Optimization of the Structure
305(1)
Complete System Modeling
306(4)
Design Flow
307(1)
Model Definition
308(1)
Evaluation
309(1)
Process Variation
309(1)
Conclusion
310(1)
Appendix
311(1)
References
312(3)
Chapter 12 Self-Powered Wireless Sensing in Ground Transport Applications
315
Anurag Kasyap
Alexander Edrington
Background
315(1)
Self-Powered Sensors
316(1)
Vibration to Electrical Energy Conversion
317(1)
Piezoelectric Energy Harvesting
318(2)
Introduction to Energy Harvesters
320(2)
Anatomy of an Energy-Harvesting Power Supply
322(1)
Evaluating Customer Application and Fit for Energy Harvesting
323(2)
Inside the Energy-Harvesting Module
325(1)
Commonly Adopted Wireless Platforms
326(2)
Ground Transport Vibration
328(1)
Candidate Applications and Field Trials
329(3)
Conclusion
332(1)
References
332
Index 335
Krzysztof (Kris) Iniewski manages R&D at Redlen Technologies Inc., a start-up company in Vancouver, British Columbia, Canada. Redlens revolutionary production process for advanced semiconductor materials is enabling a new generation of more accurate, all-digital, radiation-based imaging solutions. Dr. Iniewski is also president of CMOS Emerging Technologies, which organizes high-tech events covering communications, microsystems, optoelectronics, and sensors. Dr. Iniewski has held numerous faculty and management positions at the University of Toronto, the University of Alberta, SFU, and PMC-Sierra, Inc. He holds 18 international patents, has published more than 100 research papers in international journals and conferences, and has written and edited several books. He is frequently invited as a speaker and has consulted for several organizations around the world.